Series KC Self-seal Fittings

L1 D L2 A Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 28.0 33.5 38.5 39.0 13.6 17.6 25.2 27.0 17.8 28.5 33.8 57.1 14 17 19 24 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 85 Series KB Piping Module 3 Other Piping Material Nipple: KBN Weight (g) L A D Part No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3

IDX-OM-M051

/4 R3/4 20 50 165 475 9902 1030 950 Facility water outlet 1.3 Name and function of parts Terminal block for signal (Symbol: W5) (Symbol: W5) R3/4 R3/4 Refer to 6.3 Outer dimensions 6 5 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

IDX-OM-Z004

/4 R3/4 20 50 165 475 9902 1030 950 (-W5) -W5 1,3 (-W5) -W5 R3/4 R3/4 IDF100F150F-W 6 5 IDX-OM-Z004 6 6.4 IDF100/125F/150F-30-W R R GFCI PE TB1 THR MC1 CM OLR MC1 HM PRR SWL PLC TB2 Y0 1 MC1 COM0 2 Y3 3 COM3 4 MC1 Y1 X4 5 () PRR () COM1 X0 6 THR X1 PRS2 PRS3 X3 L P P N 24V EDV PE CM OLR V V MC1 THR TB1,2 SWL PRR PRS1 PRS2 PRS3 PLC HM GFCI EDV IDF100F150F-W 6 6 IDX-OM-Z004

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 117 76 24 LQ-GK VX3 36 SET POS. 53 127 63 43 VXA (MAX.50) 114 VN LVC 53 63 43 LVA LVH LVD LVQ LQ LQ-GM LQ-GL LVN 50 TI/ TIL 50 207 85 PA 342 85 PAX LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 PB 6 6 4-R3 4-R3 191 (MAX.91) (MAX.91) 325 87 60

Prevents Micro-Bubbles

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112

LVQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following

Size: 32, Bearing Type: Sliding Bearing, Motor Mounting Position: Top Mounting, Lead: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 150mm, Motor Option: w/Lock/Motor Cover, Guide Option: w/o Option, Actuator Cable Type, Length: 5m, Controller: Ether Net/IPâ„¢, Mounting: DIN Rail, I/O Cable: -, Communication Plug Connector: -

Size: 32, Bearing Type: Sliding Bearing, Motor Mounting Position: Top Mounting, Lead: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 200mm, Motor Option: w/Lock/Motor Cover, Guide Option: w/o Option, Actuator Cable Type, Length: 5m, Controller: Ether Net/IPâ„¢, Mounting: Screw Mounting, I/O Cable: -, Communication Plug Connector: -

Size: 32, Bearing Type: Sliding Bearing, Motor Mounting Position: Top Mounting, Lead: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 200mm, Motor Option: w/Lock/Motor Cover, Guide Option: w/o Option, Actuator Cable Type, Length: 8m, Controller: Ether Net/IPâ„¢, Mounting: Screw Mounting, I/O Cable: -, Communication Plug Connector: -

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 150mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 200mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 7 (Screw Mounting)

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 200mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R8 (8m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 7 (Screw Mounting)

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 250mm, Motor Option: C (w/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R3 (3m), Controller: C61 [Parallel Input (PNP)], Mounting: 7 (Screw Mounting), I/O Cable: 3 (I/O Cable, 3m)

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: F (w/Grease Retaining Function), Actuator Cable Type, Length: R1 (1.5m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 300mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 7 (Screw Mounting)

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

One-touch Fittings

connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3

Industrial Filters

/4 FN Rp1/4 203 203 R3/4 EB ES DRAIN R3/4 90 90 260 DRAIN FGES type (V-band type) (mm) FGEL type (V-band type) (mm) FGET type (Bolt tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931 1325 516 871 1225 1191 1860 1191 1825 647 1133