Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 07 (1/4"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

Body Class: 6 (ø22 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Fitting Size: 25 (Tubing O.D. 1), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Fitting Size: 13 (Tubing O.D. 1/2), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

Body Class: 6 (ø22 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 25 (1" or ø25), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 13 (1/2"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 13 (1/2"), Output Tube Size: None, Pilot Connection: R (Thread Type 1/8 Rc), Pilot Port Direction: Direction 1, Option 1: 6 (High Back Pressure w/Flow Rate Adjustment)

)Air, Water, Inert gasFluoropolymer fitting LQ1 series1.60.90.450.232515260CModified PTFE (Polytetrafluoroethylene resin)

Air Operated Chemical Valve Series LVQ

(New PFA) ultrapure water. trapure wat ultrapure water. j adjustment y p and by-pass Options Variations Variations Applicable tubeing outside diameter Orifice Series Flow rate Inch size diameter characteristics 6 4 8 12 10 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 8.4 LVQ20 (0.35) 31.2 (1.3) 45.6 (1.9) LVQ30 LVQ40 120 LVQ50 (5) 192 LVQ60 (8) With reducer Standard size Specifications 1MPa < w> -98kPa

Inch Size 1/8" to 1/2" ?3.18~?

Body class: 2, Valve Type: N.C., Fitting Type: LQ2, Compatible sizes: Tube: 1/4 in × 5/32", B port (out) different diameter size: Same size as A, Pilot port type: LQ1 integrated fitting, connection tube size 1/8 in × 0.086 in (3 × 2), Pilot port direction: 1, Option (1): None, Option (2): None, Orifice diameter(ø): 4

Body class: 4, Valve Type: N.C., Fitting Type: LQ2, Compatible sizes: Tube: 1/2 in × 3/8", B port (out) different diameter size: Same size as A/B port, Pilot port type: LQ1 integrated fitting, connection tube size 1/8 in × 0.086 in (3 × 2), Pilot port direction: 1, Option (1): With indicator, Option (2): None, Orifice diameter(ø): 10

)Air, Water, Inert gasFluoropolymer fitting LQ1 series1.40.70.350.22010260CModified PTFE (Polytetrafluoroethylene resin)

)Air, Water, Inert gasFluoropolymer fitting LQ1 series1.40.70.350.22010260CModified PTFE (Polytetrafluoroethylene resin)

)Air, Water, Inert gasFluoropolymer fitting LQ1 series1.40.70.350.24023260CModified PTFE (Polytetrafluoroethylene resin)

Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 07 (1/4"), Output Tube Size: None, Pilot Connection: R (Thread Type 1/8 Rc), Pilot Port Direction: Direction 1, Option 1: 9 (High Back Pressure w/Indicator)

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 13 (1/2"), Output Tube Size: None, Pilot Connection: R (Thread Type 1/8 Rc), Pilot Port Direction: Direction 1, Option 1: 9 (High Back Pressure w/Indicator)

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 11 (3/8"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment), Option 2: N (for Ammonium Hydroxide)

Body Class: 6 (ø22 Orifice), Valve Type: 0 (N.C.), Tube Size: 25 (1" or ø25), Pilot Port Thread: LQ1 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: 5 (High Back Pressure, 0.42 MPa), Option 2: P (High Flow Spec, LVQ6* Only)

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 11 (3/8"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

Body Class: 6 (ø22 Orifice), Valve Type: 1 (N.O.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 19 (3/4" or ø19), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: None, Option 2: J (for High Temperature)