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Vacuum suction from the vacuum port minimizes external particle generation from the ball screw and guide. 25AVacuum suction LEC Vacuum suction LEC S LEC SS-T LEC Y Support Guide/11-LEFG Series Page 527 Motorless A support guide is designed to support workpieces with significant overhang.

584 C85 CXWM20-275 119.5 289 20 90 620 277 329 606 634 CXWM20-300 132 314 20 90 670 302 354 656 684 C95 CXS 10 M L CXS 15 M L CXS 20 M L CXS 25 M L CXS 32 M L Model Stroke SS ZZ Z Model F L K P Q S SS Z ZZ CP95 175 257 287 200 282 312 125 207 237 150 232 262 110 192 222 120 202 232 80 135 152 50 150 210 229 75 120 175 192 70 150 205 222 80 90 145 162 60 80 100 100 155 172 110 165 182 125

Time [s] LEC SS-T T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] LEC Y T2: Constant speed time can be found from the following equation.

H O W T O O R D E R S E R I E S NCA1 A I R C Y L I N D E R X T A1 NC C O N S T R U C T I O N T Y P E (PLEASE SEE PAGE 1 FOR CONSTRUCTION DETAILS) Steel Construction (1.5~14) All Stainless Steel (1.5~14) Steel w/ Composite Tube (1.5 14) Stainless Steel w/ Composite Tube (1.514) A U T O S W I T C H Standard D w/Auto S (Stainless Steel Composite Tube Only) ST SS SCT SSCT ...

O T T Y P E NC(D)GLN_-_ A N D NC(D)GLA_-_ L O N G S T R O K E ( I N C H) BORE LB STROKE RANGE SIZE ZB 3.02 8.01~20 20 3.60 3.02 12.01~25 25 3.72 3.09 12.01~40 32 4.05 3.41 12.01~45 40 4.37 4.00 12.01~55 50 5.27 4.00 12.01~55 63 5.27 Note: Long Stroke design is a three piece construction: Rod Cover, Head Cover and Tube Body BORE MAX STD SIZE STROKE A AB AH Y DD AL AO AT D EE KK LB MM P R SS

LEC SS-T 100 LEC Y Lead 12: LEY25A Selection example) Based on the graph shown on the right side, Torque limit/Command value: 30 [%] Force: 255 [N] Therefore, the LEY25B is temporarily selected. 0 20 10 40 30 Motorless Torque limit/Command value [%] (LEY25) LAT LZ Step 3 Check the lateral load on the rod end.

Vacuum suction from the vacuum port minimizes external particle generation from the ball screw and guide. 25AVacuum suction LEC Vacuum suction LEC S LEC SS-T LEC Y Support Guide/11-LEFG Series Page 527 Motorless A support guide is designed to support workpieces with significant overhang.

Construction Wetted Parts Material AK3542 Wetted Parts S Body 316 SS Diaphragm Ni-Co Alloy Seat PCTFE (Option: Polyimide) Diaphragm Seat Body 1 Diaphragm Valves for General Applications Air Operated Type Series AK3542 & 4542 Specications Operating Parameters AK3542 AK4542 Status Normally closed (N.C.)

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket

(mm) Model CXS25-10 S SS ZZ Z 10 94 118 30 20 104 128 40 30 114 138 40 40 124 148 40 21-/2210-/11-/12CXS25-20 CXS25-30 CXS25-40 CXS25-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 134 158 60 21-/2210-/11-/12100 184 208 80 CXS25-75 CXS25-100 21-/2210-/11-/1275 159 183 60 21-/2210-/11-/12858 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS32, CXSL32 10-/11221221S ZZ SS 38 16 14 2

Please refer to page 1114. 2 ports Wetted Parts Material Specifications Operating Parameters Status Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Wetted Parts Body Surface finish Diaphragm Seat S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) AZ4542 AZ3542 Normally closed (N.C.)

2-3.4 through 2-6.5 counter bore depth 3.3 2-2.5 x 14l AW (spring pin) 20 Z 9 5 1 35 0.2 35 0.2 33.6 46 44 20 6.3 5 2.1 2-M4 x 0.7 (through) M4 x 0.7 x 14.5l and M4 x 0.7 (hexagon bolt) (hexagon nut) 7.5 2-M3 x 0.5 (through) 20 (Z) 4-M3 x 0.5 thread depth 4.5 (same on reverse side) 4-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 7 3 8.5 30 8 Model S ZZ Z SS CXS10-10-XB19

NE RR2 SS H PP2 QQ PP1 QQ NH NC P (Port) P (Hexagon socket head taper plug) Back port (Refer to page 39.)

NE RR2 SS H PP2 QQ PP1 QQ NH NC P (Port) P (Hexagon socket head taper plug) Back port (Refer to page 39.)

Problem 3 Red ON OFF Red Flashing W-SS W-SS LED flashes red or orange or is off Problem 4 Orange Flashing OFF Green Flashing Red Flashing Red ON W-NS W-NS LED does not turn on green. Problem 5 Red Green Alternate Flashing OFF Red Flashing W-MS W-MS LED does not turn on green.

Y S Applicable O-ring C6 C6 WX 30 32 Bore size (mm) 16 20 9 6.5 6.5 8 8-12-18 19 Series MY1W Mechanically Jointed Rodless Cylinder With Protective Cover Dimensions: 25, 32, 40 L (LL) PA 4-MM depth M 4-B counterbore depth C LD through-hole bottom side J depth K YW MX PB QW LW MTS MY Q + Stroke PG CY P (Hexagon socket head taper plug) P (Port) W MG CH LH RR1 SS NE CX RR2 SS H PP2 QQ PP1 QQ

GR-S-010 (10 g), GR-S-020 (20 g) Technical Data 1353 MY1W Series Dimensions: 16, 20 (LL) L 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.

XX SS RR NE QQ PP H UU TT RW PH G A N UU VV T-slot for body mounting Z + Stroke (mm) Model MY2C16G MY2C25G MY2C40G LB 72.4 108.7 135.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 MW 64.6 97.5 121.5 C 3.3 5.4 8.6 M 7 9 13 B 6.5 9.5 14 L 80 110.8 180 LW 104 158 214 A 80 105 165 LC 6 7 7 (LL) 40 49.6 75 LD 3.4 5.5 9 LE 5 5 5 MM M4 x 0.7 M5 x 0.8 M6 x