ZP

E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 40 43 6.5 15 4.5 40.5 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5

High Purity Fluoropolymer

E W Y H M L 11.5 18.5 LQ1H1A-F LQ1H2A-F LQ1H2B-F LQ1H2C-F LQ1H2D-F LQ1H2E-F LQ1H2F-F LQ1H3A-F LQ1H3B-F LQ1H3C-F LQ1H3D-F LQ1H4A-F LQ1H4B-F LQ1H4C-F LQ1H4D-F LQ1H5A-F LQ1H5B-F LQ1H5C-F LQ1H5D-F LQ1H6A-F LQ1H6B-F LQ1H6C-F LQ1H6D-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 10 10 1/8" 26.5 18.5 1/8" 35 16.5 14 15 14 21.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

H L M E W Y LQ 11.5 18.5 LQ1H1A-F LQ1H2A-F LQ1H2B-F LQ1H2C-F LQ1H2D-F LQ1H2E-F LQ1H2F-F LQ1H3A-F LQ1H3B-F LQ1H3C-F LQ1H3D-F LQ1H4A-F LQ1H4B-F LQ1H4C-F LQ1H4D-F LQ1H5A-F LQ1H5B-F LQ1H5C-F LQ1H5D-F LQ1H6A-F LQ1H6B-F LQ1H6C-F LQ1H6D-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 10 1/8" 10 26.5 LVN 18.5 1/8" 35 TI/ TIL 16.5

ZP

M6 x 1 A8 M8 x 1 G J J 04 4 06 6 08 8 Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

Table of Contents

E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 6.5 15 4.5 40.5 40 43 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5

V

Exhaust) 1 Plug in unit T Y P E O F M A N I F O L D N U M B E R O F S TAT I O N S 01 1 Station 16 16 Stations N o t e 1 ) When more than one option is desired Combined symbols in alphabetical order.

Table of Contents

Plug-in type, conduit terminal Thread type Port size (P, A, B, EA, EB port) Porting specifications (P, A, EA, EB port) Nil F Rc G N NPT T NPTF Nil 02 Without sub-plate 1 4 3 8 Nil B Side ported 03 Bottom ported For bottom ported: Rc 1/4 Option 1 02 F Plug-in VFR3 5 0 0 D Non plug-in VFR3 02 1 1 Common electrical entry 1 1 G Non plug-in VFR3 02 1 1 4 0 Individual electrical entry Courtesy

Table of Contents

Mounting style B L F 12 mm equivalent S 1 pc.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

ZP

58.1 84 74 4.5 2.3 Deep Deep Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 ZPR40D 40 43 29 42.5 53.3 71.1 97 25 15 87 17 ZPR25D 25 28 20 35 48.5 63.6 89.5 25 15 79.5 10 Applicable Tubing Applicable Tubing Applicable tubing O.D.

ZP

1 H: M8 x 1 U4 (Soft tube 4/2.5) Model A B C D E Y F G F G 14.5 5 1.8 H: M5 x 0.8 H: M6 x 1 Model A B C D E Y F G F G 40 43 29 39 57 83 25 15 73 17 ZPY40D U6 (Soft tube 6/4) 16.5 7 2.5 10 12 15 25 41 62 20 25 67 6 ZPY10D 16 18 16 26 42 63 68 7 ZPY16D 13-11-46 Series ZPY Vacuum Pad: Lateral Vacuum Entry with Barb Fitting without Buffer Connection Barb Fitting Bellows Pad Form Lateral Male

LEC-OM02704CN

14 45 14 (c) [C][7][0][1][F][F] 14.4.2 [C][7] [0][1][F][F] 0 16 0 EEP-ROMRAM 1 RAM 1 RAM 1 1 EEP-ROM (d) [C][8][0][1][F][F] 14.4.2 [C][8] [0][1][F][F] 0 16 0 EEP-ROMRAM 1 RAM 1 RAM 1 1 EEP-ROM 14 46 14 (e) (DWELL) (DWELL) [C][A][0][1][F][F] 14.4.2 [C][A] [0][1][F][F] 0 16 0 EEP-ROMRAM 1 RAM 1 RAM 1 1 EEP-ROM (f) [C][B][0][1][F][F] 14.4.2 [C][B] [0][1][F][F] 0 16 0

Hydraulic

limit chart: Bore sizes 32 & 40 Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation F F F F F F F F F F F Bore size 32 B-rod 2000 5 2 4 8 3 7 1 1000 6 500 Stroke (mm) 100 50 10 0.1 0.5 1 5 10 20 Load (kN) Bore size 40 B-rod C-rod 3 7 5 2 4 3 7 2000 4 8 1 5 8 6 2 1 1000 6 500 Stroke (mm) 100 50 0.5 1 5 10 20 0.5 1 5 10 20 Load (kN

Stability of suction position,

Mounting thread size Applicable ball joint assembly (e) ZP3EA-SW6 M6 x 1 ZP3EA-F(1/2)-AL6 ZP3EA-SW12 M12 x 1.25 ZP3EA-F(3/4/5/6)-AL12 ZP ZPT ZPR Mounting nut (Sales unit: 10 pcs.) Part no.

Table of Contents

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

ZP

E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 6.5 15 4.5 40.5 40 43 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5

Table of Contents

s, Rise time 1 ns Resistance Note 1) In the case of PF2W711, 3% of F .S. or less (15C to 35C, based on 25C).

•

"F: 1 , 0 F . Model M' ;8 C R ~ !F. G ;K '.

Table of Contents

Rc F (2) Nil N (1) NPT Body size 01 NPT 1/8 Port size G Symbol F (2) G 40 30 02 1/4 Note 1) Drain guide is NPT 1/4 (applicable to AW30 to 40) Note 2) Drain guide is G 1/4 (applicable to AW30 to 40).

Modular Design with Uniform Body Style

C D F J K H J H J H J AR20K-D 1/8, 1/4 1/8 40 66.8 26.5 26 M28 x 1 26 2 37.5 62.5 37.5 63.5 37.5 63.5 AR30K-D 1/4, 3/8 1/8 53 86.5 30.5 31.5 M38 x 1.5 31.5 3.5 37.5 68 37.5 69 37.5 69 AR40K-D 1/4, 3/8, 1/2 1/8 70 91.5 35.5 40.5 M42 x 1.5 40.5 42.5 78 42.5 78 42.5 78 AR40K-06-D 3/4 1/8 75 93 35.5 40.5 M42 x 1.5 40.5 42.5 78 42.5 78 42.5 78 AR50K-D 3/4, 1 1/8 90 125 43 50 50 42.5 87.5 42.5