SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.

Body Class: Class 6, Orifice ø22, Valve Type: Normally Closed, Port Size: 1, Thread: NPT, Material: Body: SUS, Endplate: PPS, Diaphragm: PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -

Body Class: Class 6, Orifice ø22, Valve Type: Normally Closed, Port Size: 1, Thread: R, Rc, Material: Body: PFA, Endplate: PPS, Diaphragm: PTFE, Option: Indicator, Specification: -, Z: -

Body Class: Class 6, Orifice ø22, Valve Type: Normally Closed, Port Size: 1, Thread: R, Rc, Material: Body: PFA, Endplate: PPS, Diaphragm: PTFE, Ammonium Hydroxide Compatible, Option: Indicator, Specification: -, Z: -

Body Class: Class 6, Orifice ø22, Valve Type: Normally Closed, Port Size: 1, Thread: NPT, Material: Body: PFA, Endplate: PPS, Diaphragm: PTFE, Option: Indicator, Specification: -, Z: -

Body Class: Class 6, Orifice ø22, Valve Type: Normally Closed, Port Size: 1, Thread: NPT, Material: Body: PFA, Endplate: PPS, Diaphragm: PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -

Body Class: Class 6, Orifice ø22, Valve Type: Normally Closed, Port Size: 1, Thread: R, Rc, Material: Body: PFA, Endplate: PPS, Diaphragm: PTFE, Option: -, Specification: -, Z: -

Body Class: Class 6, Orifice ø22, Valve Type: Normally Closed, Port Size: 1, Thread: NPT, Material: Body: PFA, Endplate: PPS, Diaphragm: PTFE, Option: -, Specification: -, Z: -

Body Class: Class 6, Orifice ø22, Valve Type: Normally Closed, Port Size: 1, Thread: R, Rc, Material: Body: PFA, Endplate: PPS, Diaphragm: PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -

Body Class: Class 6, Orifice ø22, Valve Type: Normally Closed, Port Size: 1, Thread: R, Rc, Material: Body: SUS, Endplate: PPS, Diaphragm: PTFE, Option: Flow Rate Adjustment, Specification: -, Z: -

Compatible Fluid: Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 22, Option

Compatible Fluid: Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 22, Option

Compatible Fluid: Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 22, Option: None

Compatible Fluid: Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 22, Option: With

Body Class: 6 (Class 6, Orifice ø22), Valve Type: 0 (Normally Closed), Port Size: 10 (1), Thread: N (NPT), Material: C (Body: PFA, Endplate: PPS, Diaphragm: PTFE), Option: 1 (Flow Rate Adjustment)

Body Class: 6 (Class 6, Orifice ø22), Valve Type: 0 (Normally Closed), Port Size: 10 (1), Thread: N (NPT), Material: A (Body: SUS, Endplate: PPS, Diaphragm: PTFE)

Body Class: 6 (Class 6, Orifice ø22), Valve Type: 0 (Normally Closed), Port Size: 10 (1), Thread: N (NPT), Material: A (Body: SUS, Endplate: PPS, Diaphragm: PTFE), Option: 1 (Flow Rate Adjustment)

Body Class: 6 (Class 6, Orifice ø22), Valve Type: 0 (Normally Closed), Port Size: 10 (1), Thread: N (NPT), Material: A (Body: SUS, Endplate: PPS, Diaphragm: PTFE), Option: 4 (Indicator)

Body Class: 6 (Class 6, Orifice ø22), Valve Type: 0 (Normally Closed), Port Size: 10 (1), Thread: R, Rc, Material: C (Body: PFA, Endplate: PPS, Diaphragm: PTFE), Option: 4 (Indicator)

Body Class: 6 (Class 6, Orifice ø22), Valve Type: 0 (Normally Closed), Port Size: 10 (1), Thread: R, Rc, Material: N (Body: PFA, Endplate: PPS, Diaphragm: PTFE, Ammonium Hydroxide Compatible), Option: 4 (Indicator)