CATALOG

~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 24VDC (10~28VDC) 26VDC or less 28VDC or less 24VDC (10~28VDC) 24VDC (10~28VDC) Yes/3 Wire (NPN) Yes/3 Wire (PNP) Yes/2 Wire Yes/3 Wire (NPN) Yes/3 Wire (NPN) Yes/3 Wire (PNP) Yes/2 Wire Yes/2 Wire Yes/3 Wire (NPN) Yes/3 Wire (PNP) Yes/2 Wire Yes/4

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 10-SY3000 10-SY5000 10-SY7000 Air 10-SY9000 Series Fluid 2 position single 2 position double 3 position 0.15 to 0.7 Internal pilot operating pressure range (MPa) 0.1 to 0.7 0.2 to 0.7 10 to 50 (No freezing) Ambient and fluid temperature (C) 2 position single, double 3 position Max. operating frequency (Hz) 10 3 5 3 5 3 5 3 Non-locking push

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators (mm 2) 14/2 (PA/B) 4, 2 (A, B) 1, 5, 3 (P, EA, EB) 4/25/3 (A/BEA/EB) area M8 connector 67 (41) 89 (63) L/M plug connector Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 10-SYJ3143 10-SYJ3243 10-SYJ3343 10-SYJ3443 10-SYJ3543 10-SYJ3123 10-SYJ3223 10-SYJ3323 10-SYJ3423 10-SYJ3523 10-SYJ3133 10-SYJ3233 10-SYJ3 10-SYJ3433 10-SYJ3533 Single Double

CV/MVGQ

For Safety Instructions and Actuator Precautions, refer to pages 10-24-3 to 10-24-6.

CV/MVGQ

For Safety Instructions and Actuator Precautions, refer to pages 10-24-3 to 10-24-6.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 0 2 W 1 10 VQ2000 2 Series CE compliant Circular connector kit with cable (3 m) CE compliant Nil Q Function 10-VV5Q21-09C6M2-W 10-VQ2100-51 10-VQ2200-51 10-VQ2300-51 VVQ2000-10A-1 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 3 setsValve part no. (Stations 4 to 6) 2 setsValve part no. (Stations 7 to 8) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 0 2 W 1 10 VQ2000 2 Series CE compliant Circular connector kit with cable (3 m) CE compliant Nil Q Function 10-VV5Q21-09C6M2-W 10-VQ2100-51 10-VQ2200-51 10-VQ2300-51 VVQ2000-10A-1 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 3 setsValve part no. (Stations 4 to 6) 2 setsValve part no. (Stations 7 to 8) 1 setBlanking plate part no.

CA2

Dd9 L Clevis Knuckle CDP-2A 40 10 0.040 0.076 4 Polished round 10 3 46 3 x 18l 38 C76 CDP-3A 40, 50, 63 50 12 0.050 0.093 4 Polished round 12 3 55.5 3 x 18l 47.5 C85 CDP-4A 63 16 0.050 0.093 5 Polished round 16 4 71 4 x 25l 61 l CDP-5A 80 18 0.050 0.093 5 Polished round 18 4 76.5 4 x 25l 66.5 C95 CDP-6A 100 80 20 0.065 0.117 5 Polished round 20 4 83 4 x 30l 73 CDP-7A 100 25 0.065 0.117

Series VQ Base Mounted Metal Seal/Rubber Seal

Example) Lead wire length 1000mm VQ1110N-5LO 3 pcs. AXT661-14AN-10 3 pcs.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting

SZ3000

To obtain the weight with solenoid valves attached, add the solenoid valve weights given on page 1-3-10 for the appropriate number of stations. For DIN rail weight, refer to page 1-3-12.

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

HEC_W-E

-8-8 8.6.3 SETTING MODE, LEVEL 3 -8-10 9 ALARM -9-1 9.1 HOW TO IDENTIFY ALARM -9-1 9.2 ALARM INDICATION -9-2 9.3 HOW TO RESET ALARM -9-3 9.4 ALARM CODE LIST-9-3 9.5 TROUBLESHOOTING -9-5 10 APPENDIX -10-1 10.1 SIGNAL AND STYLE OF CONNECTORS -10-1 10.2 POWER SUPPLY CABLE -10-2 10.3 CALCULATION OF DEW POINT (FROM PSYCHOMETRIC CHART) -10-3 v Contents Figure List Page No.

Model Selection 1

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.

VDW Series

Stainless steel Types 10, 20 VVDW 2 0 5A Series 1 2 10 20 Type 30 VVCW20-5A 12 Compact Direct Operated 3 Port Solenoid Valve for Water and Air Series VDW100/200 How to Order Valves (Single Type) VD W 2 50 1 G 2 01 For water, air and vacuum Series Option 2 3 200 300 None Foot type bracket Nil F Note) Foot brackets are packed with valves. Materials and insulation type C.O.

IDX-OM-W011

. 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Stainless steel Types 10, 20 VVDW 2 0 5A Series 1 2 10 20 Type 30 VVCW20-5A 12 Compact Direct Operated 3 Port Solenoid Valve for Water and Air Series VDW100/200 How to Order Valves (Single Type) VD W 2 50 1 G 2 01 For water, air and vacuum Series Option 2 3 200 300 None Foot type bracket Nil F Note) Foot brackets are packed with valves. Materials and insulation type C.O.

VDW

N.C. (2) N.O. (3) AZ-T-VDW Valve model no. on page 17-2-64/68/74 LVA (1) IN 3 Port Valve LVH Clip part no. (2 port) Max. operating pressure differential (MPa) Series VDW 2 0 10 2 Orifice size (mm ) LVD Model Pressure port 1 Pressure port 2, 3 (1) LVQ 0.9 1 0.3 2 3 10, 20 30 VDW200 0.7 1.6 0.1 LQ 0.8 2 0.2 Socket assembly part no. (3 port) VDW300 0.4 3 0.1 LVN 0.2 4 0.05 Series VDW 2 0 12A

Title not found

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane