Clean Exhaust Filter

Warning 1.

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 10 (1000mm)

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 1000mm, CE Compliant: -

Safety Instructions

Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Thread 1/8 1/4 3/8 1/2 3/4 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Tube Connection, Plumbing Thread Nominal: -, Tube Diameter: φ2.8, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Body Ported

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket)

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 10-SY3000 SY3000-38-20A 10-SY5000 SY5000-38-1 A 10-SY7000 SY7000-38-1 A EXH port (Both sides) E5 5 10-SY3000 SY3000-39-20A 10-SY5000 SY5000-39-1 A 10-SY7000 SY7000-39-1 A 1 8 1 4 10-SY9000 SY9000-39-1 A 1 4 1 8 1 4 10-SY9000 SY9000-38-1 A 1 4 P1 1 SUP port Note) In case of types 20P and 23P, for protection of the wiring unit section from drainage, piping at the EA

Table of Contents

10 16 10 17 24 14 19 25 20 22 20 22.5 20.5 23 21.5 23.5 24.5 22.5 24.5 25.5 21 1 8 17.5 2.5 15.5 10 9.6 1 4 1 8 2-Applicable tubing 21.5 5 32 18 3 16 10.4 10 1 4 1 8 1 4 22.5 22.5 24 24.5 25 26 26.5 27 3 16 19.5 3.5 11.4 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 Connection thread 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 46 27 24 31 30 29.5 30 27 26.5 1 4 17.46 3 8 1 2 3 8 17.9 25.5 7 21 17

Electric Actuators

LJ1 LG1 LC1 LX LC6D/LC6C Switches LC6C Power Connector Cable LC6D Connector Cable Model LC6-1-C2--X252 Model LC6-1-C1--X258 Electric actuator LC6D Electric actuator LC6C Cable length 1 1m 3 3m 5 5m Cable length 1 1m 2 2m 5 5m Power connector Cable length: 1 to 5m Motor cable b Cable length: 1 to 5m 13 12 11 10 6 5 4 3 2 1 a Motor cable 7 13 12 11 10 9 8 6 5 4 3 2 1 Switch cable 14 15 16 17

ZP

32 40, 50 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, Rc M5 x 0.8, M6 x 1, M8 x 1.25, Rc M6 x 1, M8 x 1.25, Rc 1 8 1 8 Mounting Use connection for vacuum entry Pad Type Flat with ribs Deep Bellows Pad form Thin flat/Thin flat with ribs Flat 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20, 25, 32, 40, 50 Pad diameter (mm) 10, 13

SY

SS5Y71, #1 L type plug connector . SS5Y71, #1 + #10 M type plug connector .

Table of Contents

110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 5.5 6 6 7 7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 10 10 10 10 10 10 10 10 10 1 8 1 4 3 8 AMG150 , , 1 4 3 8 , AMG250 1 2 3 8

MY1

0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

CRB2/CRBU2/CRB1

W1 = L3 = L1 = 10 10 4.5 to 14 0.5 to 2 Y-1 L2-1 6.5 to 14 X-3 L1-1 0.5 to 2 L4 = 15 15 Y = 5.5 to 18 Y-1.5 L2-1 0.5 to 2.5 X-4 L1-1 8 to 18 0.5 to 2.5 L2 = 20 20 Y-1.5 L2-1 6 to 20 0.5 to 3 9 to 20 X-4.5 L1-1 0.5 to 3 X = 30 30 0.5 to 4 Y-2 L2-2 8.5 to 22 0.5 to 4 X-5 L1-2 11.5 to 22 W2 = 40 40 0.5 to 5 Y-4.5 L2-2 13.5 to 30 0.5 to 5 15.5 to 30 X-5.5 L1-2 29 Series CRB2 Axial: Top (Long-shaft

Free Mount Cylinder

1 pc. 10 5 10 2 pcs.

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112