Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: 6 (600mm)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: 6 (600mm)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

53

Rc1 Flow direction Barrel nipple 25A Y-strainer (Accessory) Y-strainer (40 mesh) 25A Barrel nipple (25A) (Accessory) 141 HRSH090 Series Inverter Type Recommended External Piping Flow External piping circuit is recommended as shown below. 6 Thermo-chiller 1 Facility water outlet (Water-cooled refrigeration) 6 1 Facility water equipment Facility water inlet (Water-cooled refrigeration) 1 7

Lightweight and Compact

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

33

Model Description Material Qty Note q Body PP 1 w EJ202S-005X11 Element PP/PE 1 EJ202S-075X11 e Particle filter bracket SGCC 1 r Nipple Stainless steel 1 Conversion from R to NPT t Extension piece Stainless steel 1 Conversion from NPT to Rc y Tapping screw 4 u Handle 1 When -H is selected i Sealant tape PTFE 1 206 HRSE Series Cooling Capacity Calculation Required Cooling Capacity

Series 10-, 21- AW-B Filter Regulator

Fittings & Tubing Air Cylinders Rotary Actuators Nil 1 Note 6) Set pressure c 0.05 to 0.85 MPa setting 0.02 to 0.2 MPa setting + Polycarbonate bowl Metal bowl Nylon bowl Metal bowl with level gauge With bowl guard Nylon bowl with bowl guard + Nil 2 6 8 C 6C Bowl d Semi-standard J Drain port Note 7) Drain guide 1/8 Drain guide 1/4 + Nil N Exhaust mechanism e Relieving type Non-relieving type

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

AWM20 to AWM40

Note 6) Set pressure 0.05 to 0.85 MPa set 0.02 to 0.2 MPa set d + Polycarbonate bowl Metal bowl Nylon bowl Metal bowl with level gauge With bowl guard Nylon bowl with bowl guard Nil 2 6 8 C 6C Semi-standard e Bowl + With drain cock Drain guide 1/8 Drain guide 1/4 Drain cock with barb fitting: For 6 x 4 nylon tube Nil J Note 8) f Drain port Note 7) W Note 9) 67 Mist Separator Regulator Series

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators Nil 1 Note 6) Set pressure c 0.05 to 0.85 MPa setting 0.02 to 0.2 MPa setting + Polycarbonate bowl Metal bowl Nylon bowl Metal bowl with level gauge With bowl guard Nylon bowl with bowl guard + Nil 2 6 8 C 6C Bowl d Semi-standard J Drain port Note 7) Drain guide 1/8 Drain guide 1/4 + Nil N Exhaust mechanism e Relieving type Non-relieving type

Air Tank Series AT 1

9 9 9 12 12 12 16 16 460 665 693 693 1162 1162 1162 1416 1416 19 19 19 19 19 19 19 27 27 80 M16 x l 250 M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: 10 (1000mm)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: K (Plug Connector, 300mm)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: KO (Plug Connector, w/o Connector)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: KZ (Plug Connector, 300mm)