Clean Exhaust Filter

L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. flow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch fitting type Symbol Applicable tubing O.D.

Safety Instructions

Verify the operation of the switch and interlock function on a regular basis. 3. Do not disassemble or modify the main body. 16-11-3

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 1000mm, CE Compliant: -

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 10 (1000mm)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override)

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: -, CE Compliant: -

For example, the LVM10R1 (N.O. type) uses IN as “1” and OUT as “2” for convenience, while the JIS symbol (as shown in the catalog) is a double-sided arrow. Note, however, that the flow direction of the LVM11/13 direct operated poppet type is fixed as indicated by the JIS symbol (as shown in the catalog).

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

For DC: 5 01 SY 5 1 20 LO Z 10 1 01 SY 5 1 20 LOZ For AC: 10 Clean series Thread type Series Nil Rc 3 10-SY3000 5 10-SY5000 G F N 7 10-SY7000 NPT NPTF T Type of actuation Except for M5 1 2 position single 2 2 position double 3 3 position closed center 4 3 position exhaust center 5 3 position pressure center Rated voltage 1 100 VAC 3 110 VAC (115 VAC) Manual override Nil Non-locking push

Table of Contents

Burst Pressure Characteristics Curve and Operating Pressure Specifications 10-TCU 10-TFU 10-TFU 10-TCU 0425B-2 0425B-3 0604B-2 0604B-3 0805B-2 0805B-3 3 cores 2 cores 3 cores 2 cores 3 cores 10-TFU 10-TFU Model Tubing O.D. (mm) No. of cores 2 cores 4 6 4 8 5 2.5 Tubing I.D.

Electric Actuators

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

SY

Series 3 SY3000 5 SY5000 SUP/EXH block assembly mounting position Type of actuation Symbol Applicable stations Mounting position D side U side B 2 to 16 stations 2 to 10 stations 2 to 10 stations D U 2 2 position double 3 3 position closed center Both sides M Special specifications 4 3 position exhaust center 5 3 position pressure center For special specifications, order separately on a

Table of Contents

-04 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650-14 AME850-20 AME850-20 AMF850-20 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH550-10 AMH550-10 AMH650-14 AMH850-20 AM850-20 AMH850-20 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF37C1-3 IDF55C-3 IDF75D-3 IDF120D-3 IDF150D-3 IDF240D-3 IDF55C

CRB2/CRBU2/CRB1

(mm) L2(3 x P) Size 10 X L1 max.

MY1

Do not use a shock absorber and air cushion together. 200 200 100 1 2 3 4 5 10 20 30 1002 3 5 10 20 50 40 50 30 100 m2, m3 max. m1 max. m2 max. m3 max. m1 max.

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Free Mount Cylinder

Kit no. 10 CU10S-PS 16 CU16S-PS 20 CU20S-PS Seal kit includes @3, @4.

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112