2.0

Length 3 3 x 1 6 600 mm 10 1000 mm 3A 1/8" x 1/16" 4 4 x 2 4A 5/32" x 1/32" 6 6 x 4 6A 1/4" x 1/8" 100 mm Specifications Model LPV21 LPV22 Valve type N.C. N.O.

PF2A/PF2W

size (Rc, NPT, G) 3/8 1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

Series PF2W Digital Flow Switch For Water

Noise resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Weight Note 3) 410 g 470 g 650 g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.

VXP21/22/23

Thread 1 1 VXP2272-12 1 4 1 2 AC 1 VXP2382-14 2 VXP2392-20 VXP2272-32 VXP2382-40 VXP2392-50 32A 40A 50A Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.

33

Model Description Material Qty Note q Body PP 1 w EJ202S-005X11 Element PP/PE 1 EJ202S-075X11 e Particle filter bracket SGCC 1 r Nipple Stainless steel 1 Conversion from R to NPT t Extension piece Stainless steel 1 Conversion from NPT to Rc y Tapping screw 4 u Handle 1 When -H is selected i Sealant tape PTFE 1 206 HRSE Series Cooling Capacity Calculation Required Cooling Capacity

VXZ

Note 1) B B Polyacetal Stainless steel, Silver Note 1) Stainless steel Silver Note 1) H Stainless steel H Note 1) Note 2) Note 1) Note 2) Brass or BC6, Copper B Note 1) Note 2) Note 1) Note 2) Polyacetal B H Brass or BC6, Copper Stainless steel Note 1) Non-lube type.

VXA21/22

Min. 40 1 60 5 40 5 40 40 5 (1) 5 (2) Normally open (N.O.) Note 1) Dew point: 5C or less Note 2) 500cSt or less Note 3) "V" and "M" in the parenthesis are option symbols. Tightness of Valve(Leakage) Fluid Seal Non-leak Vacuum V, M 105atm cc/sec (1) (2) Liquid Air 1cm3/min 0.1cm3/min NBR, FPM, EPR Note 1) Different from the operating condition of pressure.

Digital Flow Switches

2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

VXA31/32

VX VX3 VXA VN LVC LVA LVH LVD LVQ Variations LQ LVN TI/ TIL Pilot port " ## Valve PA , 1 & ' (!)* (!+ $ $!%! PAX PB Model %# & 0 & VXA3114 VXA3124 VXA3134 VXA3224 VXA3234 VXA3244 , 1 , / , 1 , / , 1 , / , / . 1 , / . 1 , / . 1 ,!* )!).)!)./ Material 17-3-101 The VX series will be revised shortly.

VXD21/22/23

LQ Hexagon width across flats Bracket 2-Rc , , 4 1 8 3 2 1 LVN TI/ TIL Conduit terminal: T PA PAX PB Bracket 2-Rc , , 4 1 8 3 2 1 : Port size Rc 1/2 17-3-39 8 The VX series will be revised shortly.

0.4

Power consumption Temperature rise 4 W type 5C 10 W type 14C Required time for attachment/detachment: Approx. 5 seconds (per unit) Reduces installation time for multiple numbers of valves. During continuous operation at 24 VDC, 0.25 MPa, 300 Hz Filter is mounted to port 1 (IN). Filter is mounted to port 1 (IN) for quick disconnect type as well.

VXA21/22

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

VXR21/22/23

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)

1

7 @1 @0 !9 !1 !0 MGP CY CX CK1 C(L)K CDJZ2B10/16-Z-B C(L)KU CKQ Component Parts CKZ2N No.

ZP

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

High Vacuum Angle Valve

83 7-1 90 u o K flange i 83 KF flange 2-1 0.2 112 q 114 90 O-ring Part No.

CRB2/CRBU2/CRB1

Shaft type W1 = J K T J K T J K T J K T Size L1 = L3 = 50 11.5 to 39.5 1 to 6 Y3 L22 L4 = 50 L12 11.5 to 39.5 1 to 6 X3 L2 = 63 12.5 to 45 Y = Y3 L22 1 to 7.5 63 L12 1 to 7.5 12.5 to 45 X3 80 13.5 to 53.5 Y3 L22 1 to 8.5 80 L12 1 to 8.5 X3 13.5 to 53.5 X = 100 18.5 to 65 Y4 L22 1 to 12.5 W2 100 L12 1 to 12.5 X4 18.5 to 65 (mm) Caution Size Size W1 W2 W1 W2 L1L3 L2L4 L1L3 L2L4 For the shaft

Electric Actuators

Mount Specification X60 Stroke 2 H 1 F P K 2 LJ1H10 Vertical Mount Specification Refer to Table below.

Table of Contents

KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F-1 -02F-1 -03F-1 KKA4S-02F-1 -03F-1 -04F-1 KKA6S-03F-1 -04F-1 -06F-1 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 1/8 1/8 1/4 1/4 1/2 1/2 15-2-90 19 19 S Couplers Stainless Steel Type Series KKA Specifications K Fluid Water