33

HRS PF001 W075 H Table 2 Symbol Accessory Nil None H With handle u Table 1 Symbol Nominal filtration accuracy (m) Replacement element part no. for L125 (individual part) Nil Without element W005 5 EJ202S-005X11 W075 75 EJ202S-075X11 y e 204 R1/2 r i NPT1/2 NPT1/2 NPT1/2 t Mounting view Rc1/2 w q Parts List No.

VXA21/22

Min. 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500cSt or less Note 3) "V" in the parenthesis is option symbol. Options Material Tightness of Valve(Leakage) No. Description Standard Brass (Base is aluminum.)

VXA21/22

TI/ TIL 5 PA PAX Material Model PB %# & 1 & VXA212 0 2 2 0 2 . 2 0 2 . 2 . 0 2 . 0 2 . 0 2 . 0 2 ) .!* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 2 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.

Safety Instructions

Control circuits including switches may malfunction due to noise from these other lines. 2. Do not connect directly the power source and the output wire. (2-wire type) If a switch changes to the ON condition without any load connected, damage will occur due to overcurrent flow. 3.

VXZ

Note 1) Note 2) Brass or BC6, Copper B Note 1) Note 2) Note 1) Note 2) Polyacetal B H Brass or BC6, Copper Stainless steel Note 1) Non-lube type.

0.4

Manifold base recommended dimensions Lead wire Base mounting hole 1 (IN) 2 (OUT) 1 (IN) 9.5 or more Valve mounting pitch 2 (OUT) A A M3 x 0.5 Thread depth 5 2 (OUT) port 1 (IN) port 3 M3 x 0.5 Thread depth 5 Electrical entry can be on the either side, right or left. 2 (OUT) port 3 11 11 40 Sectional view A-A (2:1) 4 4 46 or more RZ12.5 1 (IN) port 510 High Speed 2 Port Valve SX10 Series Control

VXA31/32

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

Clean Exhaust Filter

Criteria of the products life The service life of the product ends when either of the following two conditions occurs. 1) After 2 years of usage has elapsed. 2) When the back pressure of the SFE reaches 0.1 MPa even though the operating period has been less than 2 years. 3) When the system fails to operate normally due to clogging. 3.

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: KO (Plug Connector, w/o Connector)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: KO (Plug Connector, w/o Connector)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: KO (Plug Connector, w/o Connector)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: KO (Plug Connector, w/o Connector)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: KO (Plug Connector, w/o Connector)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: KO (Plug Connector, w/o Connector)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: KO (Plug Connector, w/o Connector)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: KO (Plug Connector, w/o Connector)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: KO (Plug Connector, w/o Connector)

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -