Body Class: ø22 Orifice, Valve Type: N.C., Fitting Type: LQ1, Body Class: 2, 3, 4, 5, 6, Tube Size: 3/4" or ø19, Output Tube Size: None, Pilot Connection: Thread Type 1/8"NPT, Pilot Port Direction: -, Option 1: -, Option 2: -

HIGH PURITY CHEMICAL VALVE. High purity chemical liquid valve. 0.7 lb.

Size: Ports A & B Same Size, Pilot Port Thread Type: NPT 1/8, Pilot Port Position: None (Position 1), Material: Body: PFA; End Plate: PVDF; Diaphragm: PTFE; Seal, Buffer: FKM, Option: -

Size: Ports A & B Same Size, Pilot Port Thread Type: NPT 1/8, Pilot Port Position: None (Position 1), Material: Body: PFA; End Plate: PVDF; Diaphragm: PTFE; Seal, Buffer: FKM, Option: 5 [High Back Pressure (0.5 MPa) Tolerant]

Size: Ports A & B Same Size, Pilot Port Thread Type: N (NPT 1/8), Pilot Port Position: None (Position 1), Material: F (Body: PFA; End Plate: PVDF; Diaphragm: PTFE; Seal, Buffer: FKM), Option: 5 [High Back Pressure (0.5 MPa) Tolerant]

Size: Ports A & B Same Size, Pilot Port Thread Type: N (NPT 1/8), Pilot Port Position: None (Position 1), Material: F (Body: PFA; End Plate: PVDF; Diaphragm: PTFE; Seal, Buffer: FKM)

HIGH PURITY CHEMICAL VALVE. VIPER VALVE. 810 lb. B23.

.: 1/4", 3/8", 1/2", 3/4", 1", 3, 4, 6, 8, 10, 12, 19, 25 , Orifice: 4, 8, 10, 16, 22 , Cv factor: .35 to 8.0 LVQ VIPER VALVE. VIPER VALVE. VALVE. LVQ OTHER SIZE RATING. 1.54161 lb. 1A.

1

1 SY 3 5 1 0 0 1 Base mounted !

2

J H J H J AW10-A M5 x 0.8 1/16 25 59.9 47.4 12.5 M18 x 1 25 12.5 26 26 AW20(K)-B 1/8, 1/4 1/8 40 87.6 72.4 26 M28 x 1 40 26 5 28 27 27.8 37.5 37.5 62.5 37.5 63.5 AW30(K)-B 1/4, 3/8 1/8 53 115.1 85.6 29.4 30 M38 x 1.5 55 29.4 3.5 28 30 27.8 40.9 37.5 66.9 37.5 67.9 AW40(K)-B 1/4, 3/8, 1/2 1/8 70 147.1 91.7 37.3 38.4 M42 x 1.5 80 37.3 1.5 28 38.4 27.8 48.8 42.5 75.7 42.5 75.7 AW40(K)-06

Table of Contents

8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 ML2B G 1/8 G 1/8 G 1/4 G 1/4 Moantable Auto switch C J G5-S Bore Size/Standard Stroke (mm) CV MVGQ Standard stroke Bore size (mm) Model 20 15 CC RSH RS1H 32 20 50 30 RB RS1H 63 30 J 80 40 Weight D(kg) -X Bore size (mm) Action Weight Rod end configuration 2020 0.41 Data Double acting, 32 0.75 Lever type with built-in

CATALOG

/4 1 1/4 3/4 3/4-16 7/8 1/2 5/8 3/4 400 (4) 1 1/8 1 1/2 1/2 3/8-24 4 1/2 0 1.57 1.18 1 1 1/4 1 4.7 2.72 2.34 1 3/8 7 1/2 4 1/4 8 1/4 1 1/4 3/4 3/4-16 7/8 1/2 5/8 3/4 D I M E N S I O N S D O U B L E R E A R C L E V I S T Y P E NC A1X F WF BORE (INCH) KK A AA B C DD E EA G MM D EE J LF P Y LR ZB CW CB CD XD M L 1 150 (1.5) 7/16-20 3/4 2.02 1 1/8 3/8 1/4-28 2 0.3 1.26 5/8 1.1 3 5/8 2.36 1.71

Modular Design with Uniform Body Style

: Z) Round type pressure gauge (with color zone) P1 P2 A B C*1 D E F G J K H J H J H J AW20-D 1/8, 1/4 1/8 40 87.6 71.8 21 M28 x 1 40 21 5 37.5 57.5 37.5 58.5 37.5 58.5 AW30-D 1/4, 3/8 1/8 53 115.3 86.5 26.5 30 M38 x 1.5 55 26.5 3.5 37.5 63 37.5 64 37.5 64 AW40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M42 x 1.5 80 35.5 42.5 73 42.5 73 42.5 73 AW40-06-D 3/4 1/8 75 149.1 93 35.5 38.4 M42

ZP

+20 +15.5 50 +40 +25 +60.5 13-11-109 Series ZPT ZPT F 10-0-A14 (With buffer/One-touch fitting) 20 25 32 J K ZPT F 10-0-A14 (With buffer/One-touch fitting) 40 50 J K Applicable tubing O.D.Q Applicable tubing O.D.Q Hexagon width across flats P Rc 1/8 Hexagon width across flats P Rc 1/8 M14 x 1 M14 x 1 Hexagon width across flats 19 Hexagon width across flats 19 5 5 I I 5 D C K K 5 D C J J Hexagon

ZP

A8 M8 x 1 G J J 04 4 06 6 08 8 Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

ZP

Note 2) The symbol "" indicates buffer type "J" or "K". Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note 2) The symbol "" indicates buffer type "J" or "K".

A

T E R T R U N N I O N M O U N T I N G T Y P E NC A1T (XB5) XI + 1 /2 STROKE Y P + STROKE UM 2EE (NPTF) DD D ACROSS FLATS KK 1/32 R EA MM BA TD UV E B AA A C FA G TT J LF + STROKE ZB + STROKE R WF TL TM TL E UV TM 0 0.001 TL Y XI BORE (INCH) KK A AA B BA C D DD E EA EE FA G J R UM MM WF P ZB TT TD LF 2.56 3 2.09 3.29 1 1/8 2.6 1.5 1 1/8 1/2 2 1/2 0.3 1.26 1.06 1.84 1 5 5/16-24 200 (2) 1 1

Air Slide Table

RoHS Air Slide Table 6, 8, 12, 16, 20, 25 Reduced in height 10% 1 reduction 27 mm 1 (Current model: 30 mm1) Product weight 22% 1 reduction 298 g 1 (Current model: 380 g1) Allowable kinetic energy Reduced in height and weight with thinner table 64% 1 improvement Thin table made of special stainless steel Durable material with the same strength as the current model 0.09 J 1 (Current model:

ZP

P. 82 P. 83 ZPB-X3 (J/JB/JF)01 68 Vacuum Equipment Precautions 1 Be sure to read this before handling.

Vacuum Pad

Note 2) The symbol "" indicates buffer type "J" or "K". Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note 2) The symbol "" indicates buffer type "J" or "K".