Lightweight and Compact

Note) 200 V type only. 400 V type is provided with an earth leakage breaker as standard. 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) HRZ Specifications HRZD Model HRS090-Wl-20-l HRS090-Wl-40-l Cooling method Water-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.15 Control method PID control Ambient temperature1 C 5 to

53

mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (not usable for inductive load) Contact output signal To the thermo-chiller Users equipment side 7 24 VDC 6 24 VDC output (500 mA MAX) 5 15 14 24 VCOM output 13 24 VCOM Signal description Default setting 12 4.7 k Circuit diagram Contact input signal 2 4 1 k 11 Run/stop signal input Contact input

ML1

, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 330, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port thread type: Rc,

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 330, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port thread type: Rc,

CEx-OMQ0011

Sol.1 Sol.2 Sol.3 A ON OFF ON B OFF ON ON OFF OFF OFF 25 VFS250 VFS240R VFS210 AR425 6-4 32 VFS250 VFS240R VFS210 AR425 6-4 40 VFS250 VFS240R VFS210 AR425 8-5 50cm 1m 0.30.5MPa0.3MPa 0.5MPa 15 <> <> <> <> <> <> WR WL 1 2 3 4 5 6 WL WR A C E G I K B D F H J L 1)6 2)1245 SMC O A 2532 40 O C9 C11.2 Rz12.5 A 6 8 16 4-1 ML2 () 1(an1) (an1 ) 500mm/s W N Va P MPa NG NG

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

C95

40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

-fl Seies

EXH block di6c Blank plate: WFS40O0-1OA EXH Relocation spacer lnterface sped control wl-En disassembling valve for maintenance purposes or when spare manifold stations are required, install Blank plate on the manifold block. %% % % Needle valve on the manifold block can controlcylinder speed by ihrottling exhaust.

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

MY2H40G-500 Average operating speed a 300mm/s Mounting orientation . Wall mounting 1. Horizontal mounting 2. Wall mounting z y Features 4 Wb: MGGLB25-200 (4.35kg) x y x z Wa: Connection plate t =10 (880g) MY2H40G-500 3. Ceiling mounting Features 4 4.

CM2

51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 68 81 93 106 131 156 12.5 25 37.5 50 75 100 48 61 73 86 111 136 36 18.2 25 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 36 18.2 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 36 18.2 40

%silltr

O = 1.4 . (63 mmr2 . nr4. 500 mm . sotrin . ffiff .16-6 6634;1s1 = 453.19s Umin By using the table, we find 3.021 ymin per 100 mm skoke. This ligure has to be multiplid by 150, tor 5 times 100 mm stroke and 30 times per minute: 150/min .3.021 liters = 453.15 l/min.

ML1C

Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer

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Electric silICOn rubber(8lack with -MIne two marKs) Hardness NBR (500) , Silicon rubber (40") , Urethane rubber-Fluorine rubber{60-) Electric NBR (50') , Electric silicon rubber(500) How To Order 1 ~ _ _ -.J Pad dla/mm) 02 12 Mounting thread (Application: Refef to List.)

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g',,'-___ : ','(); Pin:t12"",: g= WL idth across fl~tsl 4.7 ./ ClevIS wld!h CK 1A :1 6.s=+P 40 80+ Stroke ZZ+ StJoke 2 CK1B : 195!

q"s

Flow characteristics sJppy pressL,e 1.0vea Reliel flow chatacteristics suppry pressu 1 0 Mpa Pressure chalacteristics setpressure: 04 [4pa 0.9 0.8 P o.z 3 o.o 3 o.s P 0.4 0.8 G n 7 g 0.6 3 o.s E 0.4 -o 0.3 t o.z 0.1 0.0 500 1000 1500 2000 Flow te (l/min IANR)) I E E .9 .9 6 " " a o.2 0 . 1 o 0.0 500 1000 1500 2000 Flow raie (rmin (aNB)) 0.4 0.6 0.8 1.0 1.2 Supply pressure (MPa) series ITV

MGP

The kinetic energy of the load can be obtained with the following formula: Cushion rush speed u (mm/s) 200 300 400 500 Also, the graph above can be used for making a selection. Example: Obtain the maximum load weight when a lifter is used at an average speed of ua 300mm/s on a slide bearing type cylinder with a 32 bore and a 100mm stroke.