Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Magnet: D (Built-in), Mounting: T (Shaft Trunnion Type), Bore Size: 63mm, Port Thread: Rc, Stroke: 125mm, Rod Boot: None, Lock Style: RN (Rod Side Lock/Non-locking)

Magnet: D (Built-in), Mounting: T (Shaft Trunnion Type), Bore Size: 63mm, Port Thread: Rc, Stroke: 700mm, Rod Boot: None, Lock Style: RN (Rod Side Lock/Non-locking)

Magnet: D (Built-in), Mounting: T (Shaft Trunnion Type), Bore Size: 63mm, Port Thread: Rc, Stroke: 250mm, Rod Boot: None, Lock Style: RN (Rod Side Lock/Non-locking)

Magnet: Built-in, Mounting: Shaft Trunnion Type, Bore Size: 63mm, Port Thread: Rc, Stroke: 125mm, Rod Boot: None, Lock Style: Rod Side Lock/Non-locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Shaft Trunnion Type, Bore Size: 63mm, Port Thread: Rc, Stroke: 700mm, Rod Boot: None, Lock Style: Rod Side Lock/Non-locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Shaft Trunnion Type, Bore Size: 63mm, Port Thread: Rc, Stroke: 250mm, Rod Boot: None, Lock Style: Rod Side Lock/Non-locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mechanical Valves Series NVM, NVFM, NVZNI

Series NVM, NVFM, NVZNI Mechanical Valves l .,:lii::rii.r:t,: Series NVM MECHANICAL VALVES CONTENTS/SPECI FICATION S SPECIFICATIONS Contents Faoe NVM Mechanical Valves NVM 100 Cv 0.14 NVM 200 Cv 1.00 NVM 430 Cv 0.38 NVM 830 Limit Valve Cv 0.33 CHARACTERISTICS NVM100 tNVM2oCNVlt430 Port Size (NPT) 1/a 1/a 1/s 1/e Cy 0 . 1 4 1.00 | 0 38 0 3 3 Max.

IIIIIII

Series NVM, NVFM, NVZNI Mechanical Valves l .,:lii::rii.r:t,: Series NVM MECHANICAL VALVES CONTENTS/SPECI FICATION S SPECIFICATIONS Contents Faoe NVM Mechanical Valves NVM 100 Cv 0.14 NVM 200 Cv 1.00 NVM 430 Cv 0.38 NVM 830 Limit Valve Cv 0.33 CHARACTERISTICS NVM100 tNVM2oCNVlt430 Port Size (NPT) 1/a 1/a 1/s 1/e Cy 0 . 1 4 1.00 | 0 38 0 3 3 Max.

Magnet: Built-in, Mounting: Shaft Trunnion Type, Bore Size: 63mm, Port Thread: Rc, Stroke: 125mm, Rod Boot: None, Lock Style: Rod Side Lock/Non-locking, Auto Switch: Z73--Reed, DC Volt., AC Volt, 2 Wire, LED, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Built-in, Mounting: Shaft Trunnion Type, Bore Size: 63mm, Port Thread: Rc, Stroke: 125mm, Rod Boot: None, Lock Style: Rod Side Lock/Non-locking, Auto Switch: F5BA--Solid State, Water Resist., 2 Wire, Lead Wire or Prewired Connector: 3m, Number: -

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port thread type: Rc,

Magnet: D (Built-in), Mounting: T (Shaft Trunnion Type), Bore Size: 63mm, Port Thread: Rc, Stroke: 200mm, Rod Boot: None, Lock Style: HL (With Rear End Lock Locking Style)

Magnet: D (Built-in), Mounting: T (Shaft Trunnion Type), Bore Size: 63mm, Port Thread: Rc, Stroke: 200mm, Rod Boot: None, Lock Style: WL (Lock on Both Sides Locking)

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port thread type: Rc,

Magnet: Built-in, Mounting: Shaft Trunnion Type, Bore Size: 63mm, Port Thread: Rc, Stroke: 200mm, Rod Boot: None, Lock Style: With Rear End Lock Locking Style, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Table of Contents

100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

ISO Cylinder

200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

Table of Contents

Caution 5 150 100 200 300 1.