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VAC, 100 VDC or less.

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

Rotary Actuator

V V V -XC47 to -XC58 -XC59 to -XC61 Change of port location V V V V V V V V 30 to 100 S,W,Y* V S,W,Y* S,W,Y* S,W,Y* S,W,Y* -XC59 to -XC61 -XC63 One side air-hydro, One side air V V V V V V V V 50, 63, 80, 100 V V V V -XC64 One side air-hydro, One side air V V V V V V V V V V V V * -XC8 to -XC11 and -XC31 to -XC36 do not include the angle adjustable type. * -XC37 to -XC46 and -XC47

Battery-less

Vertical Mounting, Sliding Bearing q 70 mm stroke or less w Over 75 mm stroke 100 100 LEYG32M E/40M E Load mass m [kg] Load mass m [kg] LEYG32M E/40M E LEYG16M E 10 10 LEYG25M E LEYG16M E LEYG25M E 1 1 0.1 0.1 10 100 1000 10 100 1000 Eccentric distance L [mm] Eccentric distance L [mm] The limit of vertical load mass varies depending on lead and speed.

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100) Made to Order Specifications: -XC1, 4, 5, 6, 7, 26, 27, 30 Shaft type W Standard J K S Refer to T page 11-4-7.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

CN7 150 CN1 Motor capacity Hole position Mounting dimensions Mounting hole A B C D V5 (100 W) qw 5 5 5 5 V7 (200 W) qw 5 5 5 V8 (400 W) we 5 5 5 5 CN8 CN2 * The mounting hole position varies depending on the motor capacity. w 40 4 766 AC Servo Motor Driver LECY M U Series Specifications -@ Type Model LECYM2-V5 LECYM2-V7 LECYM2-V8 Compatible motor capacity [W] 100 200 400 Compatible encoder

CL

Then, operate the lockup. 3.1-53 Series CL1 Construction CL140 to 100 CL1125 to 160 Component Parts/CL140 to 100 Component Parts/CL1125 to 160 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CQ2

63.5 100 95 73 CU Stroke range (mm) Bore (mm) M L FZ FX FV FT FD L1 CQS 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 43.5 60 18 108 92 80 9 9 CQ2 80 53.5 77 20 134 116 99 11 11 MU 100 53.5 94 22 154 136 117 11 11 Rear flange/CQ2G, CDQ2G Rear flange (mm) W/o auto switch W/ auto switch Stroke range (mm) Bore (mm) A L L1 A 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 73 74.5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

100) Made to Order Specifications: -XC1, 4, 5, 6, 7, 26, 27, 30 Shaft type W Standard J K S Refer to T page 11-4-7.

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9@0 w!0!1 e !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

100) Made to Order Specifications: -XC1, 4, 5, 6, 7, 26, 27, 30 Shaft type W Standard J K S Refer to T page 11-4-7.

High Vacuum Angle Valve

XLC/XLCV Series How to Order XLC M9N A 16 Flange size 16, 25, 40 XLC M9N A 50 1 Flange size 50, 63, 80, 100, 160 q t y w e r u XLC16 to 40 q Flange size e Pilot port direction w Flange type Rear flange surface Applicable flange 16, 25, 40, 50, 63, 80 100, 160 63, 80, 100, 160 Type Symbol Size 16 25 40 50 63 80 100 160 Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear

Smooth Cylinder/Low Speed Cylinder

80 100 Applicable pin O.D.

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Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.

CV/MVGQ

Different sides RZQ 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2, 4, 6, 8 Same side CEP1 10 35 55 75 80 90 100 100 100 75 80 90 1 Different sides CE1 2 Same side 35 + 30 (n 2) n = 2, 3, 4 75 + 30 (

CV/MVGQ

2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 Same side RS H A 15 90 100 110 35 100 100 100 100 1 Different sides RZQ 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2,

Hydraulic

(mm) S l R T V W H ZZ e f h Z 40 37 106 11 7.5 8 66 188 55 25 92 214 50 43 112 11 10 9 73 207 60 28 99 233 1/4 stroke 63 47 116 11 12 10 80 216 65 30 106 242 80 57 127 11 16 13 90 243 80 32 116 269 100 66 137 12 20 16 100 263 100 35 123 286 1/5 stroke 125 77 137 12 20 16 100 267 100 35 123 290 160 94 155 12 24 20 108 297 120 38 131 320 94 Series CHA Dimensions Rear flange type: CHAG V T

ISO Cylinder

32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1 0.3 38 79 0.1 (40)1 (40)1 Head ( side ) 0.5 37 29 60 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke [mm] (40)1 0.7 34 30 23 50 63 1 The data

Air Cylinder

264 24 20 4 100 M26 x 1.5 106 Rc1/2 122 264 24 20 4 CS1 CS2 * Refer to w/rubber bumper for the female rod end.

CRB2/CRBU2/CRB1

180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 10 1.2 1.5 15 2.9 3.7 20 6.1 7.9 30 15 20.2 21 25 40 31.5 41 30 32 49 51 66 68 70 73 94 97 118 121 88 93 138 143 188 193 186 197 281 292 376 387 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34 48 52 98 104 136 146 272 294 50 Single vane Double vane 63