Table of Contents

0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4 13 0.31 3.2 14 [13] 14 [13] 0.32 [0.30] 3.6 [3.2] 14 0.30 3.7 0.32 [0.30] 3.6 [3.2] 13 [5.0] 0.27 [0.42] 3.2 [1.3] 13 0.28 3.1 15 [5.3] 0.22 [0.42] 3.7 [1.5] 13 0.28 3.3 0.30 2 position 3 position Single 5 50 or less VFR420 VFR421 VFR424 Double 5 50 or less VFR430

IDG

Refer to Made to Order Specifications on page 14-19-50. Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

ZP

50 50 B 42 42 42 52 52 52 C 63 98 134 63 98 134 D 118.5 ZPT40H 25-A18 ZPT40H 50-A18 ZPT40H 75-A18 ZPT50H 25-A18 ZPT50H 50-A18 ZPT50H 75-A18 ZPT63H 25-A18 ZPT63H 50-A18 ZPT63H 75-A18 ZPT80H 25-A18 ZPT80H 50-A18 ZPT80H 75-A18 ZPT100H 25-A22 ZPT100H 50-A22 ZPT100H 75-A22 ZPT100H 100-A22 ZPT125H 25-A22 ZPT125H 50-A22 ZPT125H 75-A22 ZPT125H 100-A22 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01

MB

25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 50 12.5 CS1 64 16.5 80 23.5 C76 80 23.5 119 28.5 Note) For a double clevis, a pin (cotter pin) and a flat washer are equipped as standard.

CL

77 85 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 42 50 59 76 92 100 112 118 60 70 86 102 116 15 17 17 21 21 16 16 11 11 11 11 11 16 16 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 32 40 40 52 52 14 14 14 9.0 9.0 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 MGG 11.5 MGC 13.5 13.5 19 19 19 MGF 112.5 121 133 141.5 150 167 CY1 18.5

SY

type) With indicator light/surge voltage suppressor (non-polar type) 5 24VDC 6 12VDC 1 100VAC 50/60Hz 2 200VAC 50/60Hz Note 1) "DOZ" is not available. 110VAC 50/60Hz [115VAC 50/60Hz] Note 2) "S" specification is not available for AC since it is integrated with the rectifier. 3 4 220VAC 50/60Hz [230VAC 50/60Hz] Electrical entry D With connector DIN terminal DO Without connector Note) When

1

16 20 25 c + Stroke 378.5 115 132.5 45 37.5 45 50 80 M42 x 1.5 NCA (61.1) 56.1 (27) 22 14 19 7 11 5 3.5 378.5 115 132.5 45 37.5 50 50 80 M42 x 1.5 5 to 30 h + Stroke + Adjustment (61.5) 56.5 (27) 22 14 19 7 11 5 3.5 476 140 175 55 50 60 70 110 M56 x 2 ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) D(77.5) 67.5 (36) 26 20 22.5 10 17 8 4.5 496 140 175 55 50 70 70 110 M56 x 2 5 to 50 (81

ZP

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 Vacuum Pad Series ZP Replacement Parts: Pad Unit (With lock ring/

MY1

Therefore, also check the allowable load for the selected conditions. 16 20 25 32 40 50 63 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 MY1C 30 14 10 49 21 6 60 23 20 68 30 8.2 115 35 35 93 42 11.5 150 50 50 130 60 16 The above values are the maximum allowable values for moment and load.

Air Slide Table

64 32 14 31 13 18 Extension stroke end adjuster Retraction stroke end adjuster F 0.5 Adjustment range E Adjustment range C F MXQ8B 45 27 16 26 15 11 MXQ12B 50 28 15 27 14 13 Max.

JIS Standard Hydraulic Cylinder

21 11 35 14 37 104 88 M10 x 1.25 13 11 3/8 39 136 57 14 29 40 0.15 0.18 25 to 800 118 65 45 10 11 21 37.5 14 36 104 M10 x 1.25 95 13 11 3/8 42 136 57 29 14 50 25 to 800 145 76 52 10 27 14 45 17 43 116 115 M10 x 1.25 18 11 1/2 46 150 60 18 35 63 25 to 800 165 90 63 10 27 18 50 19 132 43 114 M12 x 1.5 20 14 1/2 52 156 71 19 41 0.20 80 25 to 1000 190 110 80 11 22 18 60 24 44 124 155 M16 x 1.5

Table of Contents

17 14 17 19 14 17 19 17 19 Connection thread 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 1 4 3 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 26.1 18.0 14 8 18.5 KQ2F16 Applicable tubing 17 41.5 29.5 21 10 Connection thread 19 14 12 58.3 46.1 22 19 18 15 19 24 81 (81) 113 (96) 24 25.7 16 24 25 Note 1) D2: Max. diameter Note 2) ( ): Values for soft nylon 15-2-14 6 One-touch Fittings Series KQ2

10

Bore size [mm] E1 L1 MM R1 U1 NDH10 NX NZ I-03M 32 40 14 20 30 M10 x 1.25 12 16 10 +0.058 0 14 0.10 0.30 I-04M 40 50 19 22 40 M14 x 1.5 12.5 19 10 +0.058 0 14 0.10 0.30 I-05M 50, 63 64 24 28 50 M18 x 1.5 16.5 24 14 +0.070 0 20 0.10 0.30 I-08M 80 80 26 40 60 M22 x 1.5 23.5 34 22 +0.084 0 30 0.10 0.30 I-10M 100 80 26 40 60 M26 x 1.5 23.5 34 22 +0.084 0 30 0.10 0.30 I-12M 125 119 36 46 92 M27

Proposals for Energy Saving

20 (10A) 3/8 (15A) 1/2 (20A) 3/4 (25A) 1 03 04 Rated coil voltage 06 10 12 14 20 1 2 3 1 100VAC, 50/60Hz 200VAC, 50/60Hz 110VAC, 50/60Hz 220VAC, 50/60Hz 24VDC 12VDC 240VAC, 50/60Hz Other (32A) 1 1/4 (40A) 1 1/2 2 (50A) 2 4 5 6 5 7 9 Optional How to Order Pilot Valve Assemblies 00 VT3113 G 1 Electrical entry Rated coil voltage 1 100VAC, 50/60Hz 200VAC, 50/60Hz 110VAC, 50/60Hz 220VAC, 50/

ZP

32 40 50 ZP50U 53 7 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no.

Table of Contents

65 60 Inrush Frequency (Hz) 50 45 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 11 8 20 18 32 27 VX21 VX21 VX22 VX22 VX23 VX23 Note) The values are for an ambient temperature of 20C and at the rated voltage.

ISO Cylinder

27 11 9 58 5.5 10 M10 x 1.5 38 7 40 21 24 M38 x 1.5 14 46.5 38 G1/4 35 16 32 13 12 69 7 12 M12 x 1.75 50 8 Bore size NB SW TC TD TW (WH) (XB) 32 34.5 17 M8 x 1 12+0.08 0 33.1 38 47 40 42.5 19 M10 x 1 14+0.08 0 39.5 45 57 Double End Boss-cut [mm] Bore size Stroke Item S (XC) ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51

Stability of suction position,

to 100 Dimensions/With Ball Joint Buffer: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-TF50UMJB ZP3E-TF63UMJB Width across flats 17 Rc1/8 Bushing Width across flats 14 Rc1/8 8 8 8 8 21.5 30.5 A B 50 Bushing Bushing 15 19.7 A B 35 9 9 Width across flats 30 M22 x 1.5 Bushing Width across flats 22 Width across flats 27 M18 x 1.5 Width across flats 14 32 50 17 40 4 2.5 5 22.61)

15

5.2 14 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NY M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 11 4.5 30 M4 x 0.7 7 70 50 4.6 13 60 NW M4 x 12 3.6 M4 x 12 1.5 M6 x 14 5.2 9 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NU M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 11 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NT M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 12 8.5 30 M5 x 0.8 8.5 70 50 4.6 17 60 NM1 M3 x 5 0.63 M4 x 12 1.5 M6 x 14 5.2

Air Cylinder

133 142 25 22 19.5 17 30 9 10 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 32 22 19.5 17 30 9 10 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 38 10 15 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39 M14 x 1.5 42.5 M32 x 2 1/4 11 88 18 177 188 With Rod Boot (mm) B3 e f h l Z Symbol Stroke 1 to 50