High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

10

125 150 89 102 114 127 152 177 202 227 63 64 51 25 12.5 25 37.5 50 75 100 125 150 89 102 114 127 152 177 202 227 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 120 130 140 150 170 190 210 230

MY1

Wn 111 210 X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 0 mm 5 mm 65 mm Y Wb 4.35 kg 0 mm 42.5 mm 150 mm Wc 0.795 kg 111 mm 42.5 mm 150 mm X Wd 0.5 kg 210 mm 42.5 mm 150 mm 65 150 n = a, b, c, d 3.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

Air Slide Table

40 ST 150 ST 150 0.400 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.020 ST 50, 75 0.350 0.015 ST 100 ST 125 ST 125 0.300 ST 10 to 100 0.015 ST 40, 50, 75 0.250 ST 125 ST 100 0.010 0.200 ST 100 0.010 0.150 ST 10 to 50 ST 125, 150 ST 10 to 30 0.005 ST 75 ST 150 0.100 0.005 0.050 0.000 0.000 0.000 0 50 100 0 50 100 0 50 100 Load [N] Load [N] Load [N] ST = Stroke

XM, XY

A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

e-Rodless Actuator

(Wn) Weight (mn) Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 5 mm 0.88 kg 0 mm 65 mm 111 Wb 42.5 mm 4.35 kg 0 mm 150 mm Y 210 Y Wc 42.5 mm 0.795 kg 111 mm 150 mm Wd 42.5 mm 1.0 kg 210 mm 150 mm n = a, b, c, d 3 Calculation of composite center of gravity m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg 1 m3 X = x (mn x xn) 1 7.025 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.0 x 150) = 139.4 mm 1

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

75 19 8 71.5 23.5 39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38 28 28 42 42 56 84 75 22 9 60.5 32.5 46.5 88.5 88.5 42.5 46.5 52.5 32.5 Solid state auto switch: D-M9B, D-M9N Stroke B Stroke E Auto switch operating range Model A 40 50 150 75 100 10 20 30 125 75 100 150 20 30 125 10 40 50 13-/22-MXQ6(L) 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 1.5 10 13-/22-MXQ8(L) 2 2 6 10 25 26 36 12 12 16 20

MXQ

(mm) MXQ20-40 MXQ20-75 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 MXQ20-30 MXQ20-75 MXQ20-30 0.06 MXQ20-40 MXQ20-40 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20

CQS

175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

A A 16 25 Angle type M9N In-line type 1 5 6 2 3 4 7 2.

Compact

LAT Speed [mm/s] Work load: Horizontal [kg] Equivalent lead [mm] Stroke [mm] Series Size Page LZ 6 (10) 25 1000 Page 170 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 LEMB Basic type LC3F2 48 11 (20) 1000 Page 170 32 LEMC Cam follower guide type 25 10 1000 Page 170 50, 100, 150, 200,

CHKD/CHKG

) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100

SMC

Solid state switch: D-M9B, D-M9N Stroke B Stroke E Model Auto switch operation range A 100 40 50 150 75 100 75 10 20 30 125 125 30 20 10 40 150 50 -0.4 -0.4 -0.4 11.6 17.5 13-/22-MXS6 9.6 9.6 9.6 21.6 27.6 1.5 10 4.9 -0.1 0.9 8.9 16.9 41.9 13-/22-MXS8 10.9 9.9 14.9 18.9 26.9 1.5 51.9 11.6 13-/22-MXS12 12.4 22.4 32.4 14.4 24.4 2.5 22.4 12.4 2.4 4.4 14.4 35.4 64.4 74.4 45.4 15.6 13-/22-MXS16

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Solid state auto switch: D-M9B, D-M9N B E Model Auto switch operating range Stroke Stroke A 40 50 150 100 75 100 10 20 30 125 75 20 30 125 150 10 40 50 13-/22-MXS6 0.4 0.4 0.4 11.6 17.5 9.6 9.6 9.6 21.6 27.6 1.5 10 13-/22-MXS8 4.9 0.1 0.9 8.9 16.9 41.9 14.9 9.9 10.9 18.9 26.9 51.9 1.5 11.6 13-/22-MXS12 74.4 32.4 22.4 12.4 14.4 24.4 22.4 12.4 2.4 4.4 14.4 35.4 64.4 2.5 45.4 15.6 13-/22

2

P R V Nil 1 2 3 Size Size Air compressor size Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

225 48 200 213 4 175 188 15 150 163 313 125 138 288 23 100 113 263 36 75 100 238 54 12.5 37.5 50 88 75 250 225 54 200 213 4 175 188 17 150 163 313 125 138 288 23 100 113 263 36 75 100 238 54 12.5 25 37.5 50 88 87 250 225 69 200 225 5 175 200 24 150 175 325 125 150 300 25 100 125 275 51 75 112 250 64 12.5 25 37.5 50 100 87 250 225 69 200 225 5 175 200 24 150 175 325 125 150 300 25 100 125

CE

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.

CE

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.