LFE-OMY0008

/min( 20L/min( 20L/min( 20L/min( 1 1 1 1-5V 5V 5V 5V ) ) ) ) [F22] 46 No.LFE*-OMY0008 [F30] OFF 2 5 100 24 5 5 100 500 9.5 2 2 100 200 3.8 [F30] [SAVE] 2 2 2 2 5 5 5 5 [F30] 2 5 OFF OFF 2 5 B OFF OFF OFF OFF 47 No.LFE*-OMY0008 [F32] () 1. 1. 1. 1.

AC

-01, -02, -03, -04, -06, -10 after part number indicate port size. (-01: 1/8, -02: 1/4, -03: 3/8, -04: 1/2, -06: 3/4, -10: 1) Air filter Regulator Lubricator 1.1-29 AC2001 to 4001 Precaution Pressure Characteristics Flow Characteristics Condition: Supply pressure 0.7MPa Conditions: Supply pressure 0.7MPa Secondary pressure 0.2MPa Flow 20l/min(ANR) Be sure to read before handling.

Modular F.R.L. Unit

When mounting a check valve, make sure the arrow (IN side) points in the correct direction of air flow. 2 AC10 to 60 Conditions: Inlet pressure: 0.7MPa Outlet pressure: 0.2MPa Flow rate: 20L/min (ANR) Pressure Characteristics (Representative values) AC10 AC40-06 0.3 0.25 Set point Outlet pressure MPa Outlet pressure MPa 0.25 Set point 0.2 0.2 0.15 0.15 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9

Modular F.R.L. Unit

Pressure Characteristics (Representative values) Flow rate 20L/min (ANR) (You can visually verify this with the "orange AW20K AW40K mark" that appears in the gap.) Push the pressure regulator knob to lock.

Modular Type Filter Regulator Series AW

Flow rate L/min (ANR) 0 0 0 500 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AW20 Rc 1/4 AW40 Rc 1/2 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 600 800 400 200 0 2000 0 0 1000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics (Representative value) Conditions: Inlet pressure 0.7MPa; Outlet pressure 0.2MPa; Flow rate 20L

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Digital Flow Switch for Deionized Water and Chemicals Digital Flow Switch for Deionized Water and Chemicals Body and sensor Body and sensor New PFA New PFA Tube Tube Super PFA Super PFA Three types of flow range 0.4 to 4l/min (PF2D504) 1.8 to 20l/min (PF2D520) 4.0 to 40l/min (PF2D540) Swept flow characteristics Tapered side seal minimizes dead volume to reduce accumulation of liquid pool

Speed Controller with One-touch Fittings

L-bracket AS-20L 2 pcs. Threaded stud kit for manifold AS-32B 1 pc. 616 AS Series Speed Controller with One-touch Fittings In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Applicable model AS-10L AS1002FS AS-20L AS2002FS AS-25L AS2052FS AS-30L AS3002FS AS-40L AS4002FS Part no.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 80 8-RR depth RL Section XX CX WB Z QA WA QB DSection XX -X 4-OA through 4-NN depth NL Section XX Z WA 4-OB counterbore depth OL 4-MM depth ML 20L HA Hexagon bolt T-slot for Data X0.02 X0.02 DA VB VA X X T H U PW DB PB GC XAH7 depth XL XAH7 depth XL

Speed Controller with

L-bracket AS-20L 2 pcs.

Speed Controller with

AS-32B AS-34B AS-36B AS-37B AS2002Fm-03A AS-38B AS2002Fm-07A L-bracket AS-20L 2 pcs.

LV50-OMQ0002

Press the S Flow rate[L/min] 20L/min (Analogue 1 5V) Press the button to set. Return to function selection mode. [F22] Setting of analogue output complete. -46No.LV50***-OMQ0002-G [F30] Accumulated value display The default setting is to clear the accumulated flow value when the power supply is turned off.

HRX-OM-O021

The tank level is within the specified range. 4.6 Adjustment of Circulating Fluid Flow adjustment If the flow rate is less than 20L/min it will not be able to achieve the specified cooling capacity.

HRX-OM-R005

The tank level is within the specified range. 4.6 Adjustment of Circulating Fluid Flow adjustment If the flow rate is less than 20L/min it will not be able to achieve the specified cooling capacity.

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

CXWM/CXWL

counterbore depth 7 (mm) ZZ Z G SS S Q P L F Model CXWM32-25 CXWM32-50 163 123 27.5 96 27 143 22 41 37 213 173 28 121 52 193 45 65 38 8-26-30 29 Series CXWM Slide Unit: Build-in Shock Absorber Slide Bearing Type 32 With End Lock: CXWM32Stroke/75 to 200 R 2 x 2-M8 x 1.25 thread depth 15 2 x 2-8H7 depth 12 2-M14 x 1.5 Adjusting bolt +0.015 0 15 depth 28.5 (With an adjusting bolt M14 x 1.5 x 20L

MY1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L L CX R R DR Note 1) Note 1) R R R L L R L L L -X 20L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L L CX R R DR Note 1) Note 1) R R R L L R L L L -X 20L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

MHC2

MHC2-10l MHC2-16l SMH03, #1 (#1+#9) SMH03, #2 (#2+#9) 2.6-3 Angular Style Standard Series MHC2 MHC2-20l Note) When signal acting type is used, one side port is bleed port and adjusting needle for finger speed is not attached. MHZ2 MHZJ2 When auto switch is used, through hole mounting type is not available.

MXW

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX 27 58 46 D-X (Y) 29 26 103 26 (Y) 20L 5H9 +0.030 depth 4.5 0 Data 10 15 15 K A 35 20 26.5 A 3 Z N-M5 x 0.8 thread depth 10 (N 1) x H G H 6 Bottom through-hole 4.2 M5 x 0.8 thread depth 10 GG 5H9 +0.030 depth 4.5 Bottom through-hole 4.2 0 F E 5H9 +