VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

15

Drive LEFB Series LEFB25, 32, 40 How to Order LEFB 25 300 S q w e r t NZ q Size r Equivalent lead [mm] t Stroke [mm] w Motor mounting position e Motor type 25 32 40 300 300 to to 3000 3000 Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW Mounting type W NV Mounting type V NU Mounting type U NT Mounting type T NM1 Mounting type M1 NM2 Mounting type M2 Nil Top mounting

Air Cylinder

3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

High Vacuum Angle Valve

r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

VFS

0, Metal joint q, w, Terminal i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VVFS5000-1A-1!0 Manifold block assembly 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

MG

0 r o @2 e !

SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 1-5-78. 1-5-6 7 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 SV SZ u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) SY y 3 position closed center/exhaust center/pressure center SYJ 3 position closed

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

R.

Table of Contents

suppressor (Non-polar type) Vacuum switch None With vacuum switch Nil E Silencer Types R and U are DC only.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

U E R P.C.D.

MGP

Note 6) Dimension E' cannot be less than the standard dimension E.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 e #1 @9 #0 i !0 !3 !1 !2 @7 t y o u @8 r #2 @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 No. !8 !

SQ1000/2000

e q w r e q w SQ2130 SQ2131 (A) (B) (A) (B) 2 4 2 4 5 1 3 5 1 3 (P)(R2) (R1) (P)(R2) (R1) Double (latching): SQ2230 Double (latching): SQ2231 t e q w t e q w SQ2230 SQ2231 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ2230D Double (double solenoid): SQ2231D e e q w y e e q w y SQ2231D SQ2230D (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1)(P)(R2) (R1) (P)(

Proposals for Energy Saving

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Construction Auxiliary Pneumatic Equipment Air Preparation Equipment i q u !3 !1 r t y !2 e !4 !5 !4 !5 !

SX

External pilot Grommet L plug connector M plug connector G: Lead wire length 300 mm MN: Without lead wire M: With lead wire (Length 300 mm) L: With lead wire (Length 300 mm) V 6 VDC S 5 VDC R 3 VDC Common specifications LN: Without lead wire LO: Without connector MO: Without connector H: Lead wire length 600 mm Nil Positive common N Negative common Note) Put nothing for single grommet style

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

MGP

86 110 124 98 106 130 142 M8 X 1.25 16 16 20 20 45 46 48 50 4 4 5 5 21 22 24 24 63 72 92 110 4.5 4.5 6 6 24 24 24 28 3 3 4 4 48 48 48 52 6 6 8 8 32 40 50 63 124 124 124 128 300 300 300 300 M8 X 1.25 M10 X 1.5 M10 X 1.5 MGPM(Slide Bearing)/Dimensions A, DB, E MGPL(Ball Bushing Bearing)/Dimensions A, DB, E A E DB Bore (mm) Bore (mm) A E DB 200st< 100st< 200st 100st< 200st 50st< 200st 50st

Air Cylinder

7 @0 @1 q o u r t e w y Long stroke 80, 100 r y u u e i Long stroke 1001 to 1500 With air cushion o w !5 !1 !3 !6 !2 !4 !0 !9 @0 !8 !7 @1 @1 @2 q r t e Long stroke Component Parts No. Description Material Note 1 Rod cover Aluminum alloy Hard anodized 2 Tube cover Aluminum alloy Hard anodized 3 Piston Aluminum alloy No.

smcmaintenancepartslist

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Part No.