5 Port Solenoid Valve Series SY3000/5000/7000/9000

Grommet (G) With External Pilot Specifications (Pitch) P=24 22.3 24.3 18.3 11 3/5 R 3/5 R 18.8 18.8 18 4 A 4 A 4 A 4 A 4 A 3/5 R 3/5 R 4 A 4 A 4 A 4 A 4 A 39.3 39.3 40.1 63.3 79.8 1 P 1 P 2 B 2 B 2 B 2 B 2 B : 12 : 10, 3/8" Applicable tubing O.D.: 8, 5/16" [4(A), 2(B) port] One-touch fitting [1(P), 3/5(R) port] Plug 1 P 2 B P 1 2 B 2 B 2 B 2 B Applicable tubing O.D.: 12, 3/8" [1(P), 3/5(R

Table of Contents

63 Rc 1/4 61.5 75 P indicates cylinder supply ports.

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

1

56.5 56.5 69 81.5 94 106.5 P 25 45 65 90 90 90 90 90 P 65 90 65 90 90 90 90 90 I I Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm 175 mm 200 mm Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm 175 mm 200 mm 67 67 CXWM20 CXWL20 CXWM32 CXWL32 Stroke F P 55 80 105 130 155 180 205 230 P 22 45 70 95 125 145 175 195 P F 37 F 35.5 48 56.5 54 66.5 79 91.5 104 P 25 35 60 75 F 27 34.5 34.5 39.5 44.5 57

Proposals for Energy Saving

R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no. Body size Port size Part no.

5

141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot brackets.

CL

Bore size 16 16mm Lock operation Spring lock (Exhaust lock) Pneumatic lock (Pressurized lock) Spring and pneumatic lock E P D 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Cylinder standard stroke (mm) Head cover port position R 90 to axis Axial direction Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

Cylinder with Lock

Lock unit Rod 4 C O N T E N T S Cylinder with Lock CP96N/C96N Series Model Selection p. 6 Working Principle p. 8 CP96N Series VCP96N Series/Double Acting, Single Rod/Double Rod How to Order p. 9 Specifications p. 10 Construction (Single Rod) p. 12 Dimensions (Single Rod) p. 13 Construction (Double Rod) p. 16 Dimensions (Double Rod) p. 17 Auto Switch Mounting p. 23 VAccessories p

MGP

0 r @4 e o t w @7 !0 y CL 16: 25 stroke 20, 25: Under 75 stroke MLGC !8 CNA !3 16: Over 50 stroke CB 25 stroke CV/MVG 20, 25: Over 100 stroke @1 @0 @2 20, 25: Over 50 stroke CXW CXS Cushion valve section CXT MGPM32 to 100 MGPL32 to 100 MX @5 i !6 !5 u q !4 !2 @3 !9 !1 !7 MXU @6 !0 t @4 @7 @5 @8 !0 MXS MXQ 32 to 63: 50/75 stroke 80, 100: Over 50 stroke Over 50 stroke y w o r e MXF !8 !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Without auto switch A B P With auto switch A B P Bore size (mm) 5 st 50 st or less 55 to 75 80 to 100 50 st or less 55 to 75 80 to 100 10 to 100 50 st or less 55 to 75 80 to 100 50 st or less 55 to 75 80 to 100 5 to 100 st 44.5 + Stroke 30.5 + Stroke 54.5 + Stroke 40.5 + Stroke 129.5 154.5 115.5 140.5 Rc 1/8 129.5 154.5 115.5 140.5 32 M5 x 0.8 Rc 1/8 54 + Stroke 40 + Stroke 64

Secondary Batteries

(mm) 4 6 8 4 6 8 1(P) 1(P) 1(P): Male thread 2(A): One-touch fitting Applicable tubing O.D. (mm) 1 8 4 Port size R Connection thread R Applicable tubing O.D.

VQZ1000/2000/3000

required) DIN terminal (YZ) DIN terminal (Y) 1 (P) 5 (R) Except VQZ1000 ) ( VQZ2000 N.C. 1.4 1.6 (B) 2 1 (P) 3 (R) Except VQZ1000) ( N.O.

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

JIS Standard Hydraulic Cylinder

3 @3 r @5 !

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

MGP

indicator) P. 69 Y7BA 2 wire P. 62 Note 3) Magnetic field resistant (2 color indicator) P. 70 P5DW P. 63 Note 1) Lead wire symbols 0.5m .

Table of Contents

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

MG

0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

CA2

side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4, 6, 8 55 + 50(n 2) n = 2, 3, 4 75 + 50(n 2) n = 2, 4, 6, 8 80 + 50(n 2) n = 2, 4, 6, 8 Different sides With n D-A44 Same side 10 20 100 75 80 90 75 80 90 100 100 100 1 Different sides

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) (With individual EXH spacer) 300 (PE port) VFR (PE port) Applicable cable O.D. 2.3 to 2.8 (PE port) (Lead wire length) (PE port) Applicable cable O.D.