5 Port Solenoid Valve Series SY3000/5000/7000/9000

(-D) [ ]: AC When P, R port outlets are indicated on the D side, the P, R ports on the opposite side are plugged.

Integrated Controller

Dimensions [mm] Stroke [mm] L A B n D E G 150 4 130 200, 250, 300 6 2 300 280 350, 400, 450 8 3 450 430 500, 550, 600 10 4 600 580 650, 700, 750 12 5 750 730 800, 850, 900 14 6 900 880 950, 1000 16 7 1050 1030 1100, 1200 18 8 1200 1180 256.8 6 178 28 Slider Type/EQFSH Series Auto Switch Mounting Auto Switch Proper Mounting Position Applicable auto switch: D-M9, D-M9E(V), D-M9W A Operating

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MB = ~Hs Auto switch = ~ Hs Auto switch MB1 CA2 CS1 Proper Auto Switch Mounting Position Auto Switch Mounting Height D-G5W D-K59W D-G59F D-G5 D-K5 D-G5NTL D-G5BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF C76 D-G5NTL D-G59F D-H7C D-G5BAL D-C7/C8 D-H7 D-H7W D-H7F D-H7BAL D-B5/B6 D-B59W D-G5/K5 D-G5W D-K59W Auto switch model D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-B59W C85 Bore size (mm) C95 HS

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Stations 3 2 1 D D D D How to Order Valve 10-SV 1 1 0 0 F 5 Note) q w r e t y u i Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors q Series r Back pressure check valve Note) Available with manifold block for station additions.

Made to Order

Proper Auto Switch Mounting Position/Applicable Cylinder Series: CDBG1-XC13 (mm) Auto Switch Mounting Height (mm) Lock position D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F7/F79F D-J79/F7NT D-F7W/J79W/F7BA H (Head side) R (Rod side) W (Both sides) A B Note 2) A B A B Note 2) Auto switch model D-F7V D-F7WV D-F7BAV D-J79C D-A7 D-A80 D-A73C D-A80C D-A79W Bore size 20 +0 +12 +11 +0 +11 +12 25 +0.5 +11.5

Slider Type Ball Screw Drive/11-LEFS Series

Model L A B n D E Without lock With lock 11-LEFS40ll-150l 564.5 594.5 156 328 4 150 11-LEFS40ll-200l 614.5 644.5 206 378 6 2 300 11-LEFS40ll-250l 664.5 694.5 256 428 6 2 300 11-LEFS40ll-300l 714.5 744.5 306 478 6 2 300 11-LEFS40ll-350l 764.5 794.5 356 528 8 3 450 11-LEFS40ll-400l 814.5 844.5 406 578 8 3 450 11-LEFS40ll-450l 864.5 894.5 456 628 8 3 450 11-LEFS40ll-500l 914.5 944.5 506 678

CY1

Note 2) D-Z73, D-Z76, D-Z80 D-F79, D-F7P, D-J79 D-F7NV, D-F7PV, D-F7BV D-J79C D-F79W, D-F7PW, D-J79W D-F7NWV, D-F7BWV Note 1) D-F9N, D-F9P, D-F9B Note 2) D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Note 2) D-Y7NW, D-Y7PW, D-Y7BW D-Y7NWV, D-Y7PWV, D-Y7BWV D-F7BA D-F7NT D-F79F D-F7LF Note 1) Indicates auto switches for CY1R6 to 20.

Environment

How to Order R 6N 1 1 D B 25 50 LEY X5 o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !

0.4

VQZ 7 6 5 4 3 2 1 n D side Stations U side SQ VFS D-sub> VFR (DIN rail clamp screw) VQ7 BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 (7.5) 20.5 One-touch fitting 13.4 56.9 [1(P), 3(R) port] Applicable tubing O.D.

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

Series SV

(S, R, RS) P PG PH 1 2 U D B (-D) When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

Series VQ Base Mounted Metal Seal/Rubber Seal

R port. 2.

CV/MVGQ

(Not mountable after the time of shipment) RHC MK(2) Auto Switch Mounting Height RS Q G D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7lWV D-A44 D-A44C D-A3 D-G39 D-K39 D-A3C D-G39C D-K39C D-A5 D-A6 D-A59W RS H A RZQ Bore size (mm) Hs Ht Hs Hs Hs Ht Hs Hs Ht Hs Ht Hs Hw Hs Hw MI W S

CV/MVGQ

(Not mountable after the time of shipment) RHC MK(2) Auto Switch Mounting Height RS Q G D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7lWV D-A44 D-A44C D-A3 D-G39 D-K39 D-A3C D-G39C D-K39C D-A5 D-A6 D-A59W RS H A RZQ Bore size (mm) Hs Ht Hs Ht Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw MI W S

SQ1000/2000

08/10 Dual flow fitting SSQ2000-52AP. 44 P. 46 P. 47 P. 48 C10 N11 P R D side U side Individual SUP spacer SSQ2000-P-3Silencer (for EXH port) EXH block plate SSQ2000-B-R Port plug VVQZ2000-CP P. 44 P. 46 P. 47 P. 48 C8 L8 P R D side SMC AN200 U side Special wiring specification (-K) D-sub connector Individual EXH spacer SSQ2000-R-3Back pressure check valve (-B) SSQ2000-BP Built-in silencer

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-B5/B6, D-B59W, D-A3/A44 Band mounting Reed switch Tie rod mounting D-A5/A6, D-A59W, D-A3C/A44C D-G5/K59, D-G5NTL, D-G5W/K59W D-G5BAL, D-G59F, D-G39/K39 D-F5/J5, D-F5NTL, D-F5W/J59W D-F5BAL, D-F59F, D-G39C/K39C D-H7, D-H7W, D-H7F, D-H7BAL, D-H7C, D-G5NTL, D-G39A/K39A Band mounting Solid state switch Tie rod mounting 3.4-1 Series CB Prior to Use Precautions Be sure to read before handling

IDU/IDF

P N M L K J I H G F E D C A B Model Port size 70 65 580 580 470 317 289 363 157 77 405 (450) 131 (85) 152 630 570 260 620 R 3/4 IDF11C/11D 70 65 580 580 470 337 309 383 207 77 405 (450) 131 (85) 175 680 620 280 620 R 1 IDF15C/15C 70 30 700 700 600 351 323 398 199 642 405 (530) 98 183 760 680 295 750 R 1 IDF22C/22C1 70 30 776 780 680 376 348 423 249 722 405 (610) 98 208 810 730 320 830 R 1

5

L LV LX D C Axis LR R +0.15 +0.05 0.040 0.076 LC hole H B (mm) Part no.

A

D E R S E R I E S ADH 4000 H E A V Y A U T O D R A I N S Y M B O L S ADH4 00 04 T H R E A D .Rc(PT) N .NPT M A X.