VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

REA/REB

9 u o i @7 @9 @5 @6 @4 e y r !3 q #0 !1 w @0 !8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

REA/REB

29 50 16 92 11 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA50/63 14 2 -Rc 1/4 L 0 0.2 NA 33 14 E (h8) E (h8) I X D 4-TC Effective thread depth R 14 8-Q Effective thread depth R 14 22 23 25 K W 23 25 4-M8 x 1.25 Effective thread depth 12 B C 0.1 14.5 2 S + Stroke 2 ZZ + Stroke (mm) Model B C D E (h8) I

VFS

0, Metal joint q, w, Terminal i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VVFS5000-1A-1!0 Manifold block assembly 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

Proposals for Energy Saving

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Construction Auxiliary Pneumatic Equipment Air Preparation Equipment i q u !3 !1 r t y !2 e !4 !5 !4 !5 !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order w y e r t u o !

Cylinder with Lock

B1 B2 B3 CN d1 d2 d3 E FL H (Max.) L1 l1 (Min.) l2 R SR (Max.)

Table of Contents

IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Component Parts Material No.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Secondary Batteries

Example) 90-AFM30-N03B-RZ Air Filters/Pressure Control Equipment Actuators Air Grippers AFD 30 90 03 B Series compatible with secondary batteries q r t w e 90 Material restriction q Symbol Description 30 40 Body size Nil N F Rc NPT G w Thread type + 02 03 04 06 1/4 3/8 1/2 3/4 Port size e + Nil B Note 1) a Without mounting option With bracket Option r Mounting + Nil R Flow direction b Flow

MB

0 14B @2@3N@4@5 Locking at rod end Manual release non-locking type: L Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 No. !7 !8 !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.

Series SV

E x 500-IE3 (PNP) VOLTAGE IP CODE 24VDC/60mA IP65 -X1 MADE IN JAPAN C US TYPE1 C US TYPE1 R R For the remote I/O (RIO) type, be sure to enter "-X1" at the end of the part number. MADE IN JAPAN 5 6 Indicate input sensor specifications and block arrangement (order) with "" symbols.

Hydraulic

Stainless steel With switch only 9 Magnet plate 10 Scraper 11 Rod seal NBR 12 Piston seal 13 Tube gasket 14 Piston gasket 6 Series CHKDB Dimensions 2-Rc P F with effective thread depth G F with effective thread depth G Q Q R D R H E E 4-K through 8-L counter bore 4-K through C B + Stroke J J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

REA/REB

Speed 600 mm/s E(h8) E(h8) X D I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 K W 23 25 23 25 4 -M8 x 1.25 Effective thread depth 12 High Precision Guide Type REBH Order Made Auto Switches C 0.1 14.5 B 2 S + Stroke ZZ + Stroke 2 (mm) Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25