LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot

MY1

WX S R D Bottom side (ZZ) piping (applicable O-ring) Y 2-d (Machine the mounting side to the dimensions below.)

Vacuum System Peripherals:

e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A80 12 to 25 32 to 100 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NTL D-F7BAL 12 to 25 32 to 100 D-A73C D-A80C D-J79C 12 to 25 32 to 100 D-A79W D-F7WV D-F7V D-F7BAVL 32 to 100 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 7-6-22 23 Compact Cylinder with Auto Switch: Standard Type Double Acting, Single Rod Series CDQ2 Operating Range 180 200 Bore size (mm) Auto switch model

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

V

F S TAT I O N S 02 2 Stations 20 20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200

Table of Contents

D. Applicable tube O. D.

15

E C x 200 (= D) 20 Note) When mounting the actuator using the body mounting reference plane, use a pin.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

E C x 200 (= D) 25 Note 1) Distance within which the table can move when it returns to origin.

Series SV

(S, R, RS) P PG PH 1 2 U D B (-D) When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

smcmaintenancepartslist

Pressure Control Equipment D B K P C C C K U P O S A A H L C to U S O H L to B D !0 o D-D C-C B-B A-A !0 o !1 !1 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters y y q IN OUT IN OUT u r t u r t i i The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AWG.

SV

B (S, R, RS) (-D) Stations When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

NCQ8

0.34 0.25 0.50 0.25 0.50 0.34 0.53 0.34 B 0.66 0.41 Through screw clearance hole / NC(D)Q8N(Z)S T (Inch) Symbol Bore E 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.20 0.25 0.25 0.34 0.34 0.41 43 Series NCQ8 Dimension Both ends tapped NC(D)Q8A-(C)(M) NC(D)Q8WA-(C)(M) NC(D)Q8A-S(M) NC(D)Q8A-T(M) Both Ends Tapped (Inch) O1 R Bore size Remarks R R O1-Thread 056 (

CXWM/CXWL

(mm) Hs Ht Hw 23 Auto switch model Auto switch model D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C Hw 23 Ht Hv D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C D-F7LF 12.5 10.5 15 15 23 12.5 10 23 15 15 22 23 23 24 30 12.5 15 12.5 15 12.5

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1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R 1/4 17 29.4 35.4 34.4 40.4 34 36 Reference dimensions for M5 and R threads after installation. 20.0 Inch Size A L4 Model Weight (g) M1 d D2 L2 L3 D1 L1 H T Max.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Switch Internal Circuit D-Y7GL Motor model Compatible driver model Power supply voltage (VAC) Motor output (W) + Brown lead wire 100/115 200/230 100/115 200/230 100/115 200/230 MSD5A1P1E MSD5A3P1E MR-C10A1 MR-C10A SGDE-A5BP SGDE-A5AP Main circuit of switch Matsushita Electric Industrial Co., Ltd.

TABLE OF CONTENTS

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen

MGG

R Y + Stroke View D-D' 63 to 100 Reinforcing bracket Mounted in case of 301mm or longer strokes Front mounting flange Width across flats HT B HS C D View C-C' HU D' C' A R Y + Stroke View D-D' Auto switch mounting position Auto switch mounting height (mm) (mm) D-A72, A7H, A80H D-A73C, A80C D-F7, F7V, F7W D-F7WV, F7BAL D-J7 D-A7H, J79W D-A80H, F7BAL D-F7, F7F D-J79, F7NTL D-F7W D-A7, A8 D-F7V

Air Cylinder

(mm) Auto Switch Mounting Height D-A9l(V) D-M9l(V) D-M9lW(V) D-M9lA(V) D-H7l D-H7lW D-H7BA D-H7NF D-C7l D-C80 Auto switch model D-B5l D-B64 D-B59W D-G5NT D-H7C D-G39A D-K39A D-A3lA D-A44A D-C73C D-C80C Hs Hs Hs Hs Hs 20 24.5 25.5 25 60 69.5 25 27 28 27.5 62.5 72 32 30.5 31.5 31 66 75.5 40 34.5 35.5 35 70 79.5 Bore size D-X Technical Data 263 CM2 Series Auto Switch Proper Mounting Position

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

/C8 D-H7 A B 12 Hs 14.5 24.5 Auto switch D-B5/B6 D-G5/K5 A B 8.5 Hs 14.5 11 Auto switch D-B7/B8 D-G7/K7 Proper Auto Switch Mounting Position Auto Switch Mounting Height D-G5/K5 D-G5W D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F D-G5 D-K59 D-G5W D-K59W D-G5NTL D-G5BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-C7/C8 D-H7 D-H7W D-H7NF D-H7BAL D-B7/B8 D-B73C