Mounting: Basic, Model: 20mm, Thread Type: NPT, Rod Length: 600mm, Made to Order: -

Mounting: B (Basic), Model: 40 (16mm), Thread Type: TN (NPT), Rod Length: 600mm

Mounting: B (Basic), Model: 100 (30mm), Thread Type: TN (NPT), Rod Length: 600mm

Mounting: B (Basic), Model: 50 (20mm), Thread Type: Rc, Rod Length: 600mm

Mounting: B (Basic), Model: 40 (16mm), Thread Type: Rc, Rod Length: 600mm

Mounting: F (Flange), Model: 100 (30mm), Thread Type: Rc, Rod Length: 600mm

Mounting: B (Basic), Model: 63 (20mm), Thread Type: TN (NPT), Rod Length: 600mm

Mounting: F (Flange), Model: 50 (20mm), Thread Type: TN (NPT), Rod Length: 600mm

Mounting: F (Flange), Model: 80 (25mm), Thread Type: TN (NPT), Rod Length: 600mm

Mounting: B (Basic), Model: 63 (20mm), Thread Type: Rc, Rod Length: 600mm

A_HEC-OM-J017

Host SOH UT ENQ 32H Check sum CR () () Thermo-con SOH UT STX 32H Internal sensor ETX Check sum CR 101 100 10-1 10-2 () () Host ACK UT CR (Possible to omit) Note2DH is entered in101 digit is attached to temperature data.

ZP

Form w 1 Material 12 N S U F GN GS 10 10 11 1 ZP UT 13 13 14 1.5 16 16 17 Y 2.5 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber A B Construction p. 115 Mounting Bracket Assembly From p. 121 With adapter 10 to 16 w q ZPT UT N A5 10 e Vacuum inlet (Male thread) B Width across flats D 15.5 C A5 M5 x 0.8 A6 M6 x 1 A Model A B C D

HEC-OM-S008

Host SOH UT ENQ 32H Check sum CR (H) (L) Thermo-con SOH UT STX 32H Internal sensor ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK UT CR (Possible to omit) Note) 2DH is entered in 101 digit is attached to temperature data.

ZP

Front matter 30 Symbol/Type U: Flat C: Flat with rib UT: Thin flat B: Bellows Compact Pad 3, 4, 5, 6, 7, 8 Pad diameter 7 types of 3 to 8 are added.

ZP

Front matter 30 Symbol/Type U: Flat C: Flat with rib UT: Thin flat B: Bellows Compact Pad 3, 4, 5, 6, 7, 8 Pad diameter 7 types of 3 to 8 are added.

ZP

Front matter 30 Symbol/Type U: Flat C: Flat with rib UT: Thin flat B: Bellows Compact Pad 3, 4, 5, 6, 7, 8 Pad diameter 7 types of 3 to 8 are added.

ZP

), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU A A B B Y Y Model Model ZP10UT ZP10CT 10 10 11 11 1 0.8

ZP

), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Profi-E

Com m uni cat i on dat a al l ocat i on Set t arget val ue Resol ut i on : 12bi t ( 100% F. S. ) , O ccupi ed byt e : 2 Byt e Target val ue ( 0 area) 12bi t 0 0 0 0 Target value(Lower 12 bits) * b0 b15 b11 Put 0 i n upper 4 bi t s ( N ot e) M oni t or t he out put pressure. Resol ut i on : 12bi t ( 100% F.

CC-Link-E

O ut put area I nput area W o rd d ata area In p u t w o rd d ata Rem arks W o rd d ata area O u tp u t w o rd d ata Rem arks RW w 0 b15, b14, b1, b0 b 1 1b 0100% F.S. RW r0 b15, b14, b1, b0 b 1 1b 0100% F.S. RW w 1 U nused RW r1 U nused RW w 2 U nused RW r2 U nused RW w 3 U nused RW r3 U nused O ut put dat a occupi es 4 w ords, but uses onl y t he 1st w ord act ual l y.