Mounting: L (Axial Foot), Model: 80 (25mm), Thread Type: Rc, Rod Length: 1000mm

Mounting: F (Flange), Model: 100 (30mm), Thread Type: Rc, Rod Length: 1000mm

Mounting: L (Axial Foot), Model: 80 (25mm), Thread Type: TN (NPT), Rod Length: 1000mm

Mounting: B (Basic), Model: 63 (20mm), Thread Type: TN (NPT), Rod Length: 1000mm

Mounting: B (Basic), Model: 50 (20mm), Thread Type: TN (NPT), Rod Length: 1000mm

Mounting: B (Basic), Model: 100 (30mm), Thread Type: TF (G), Rod Length: 1000mm

Mounting: F (Flange), Model: 100 (30mm), Thread Type: TF (G), Rod Length: 1000mm

Mounting: F (Flange), Model: 100 (30mm), Thread Type: TN (NPT), Rod Length: 1000mm

Mounting: B (Basic), Model: 100 (30mm), Thread Type: TN (NPT), Rod Length: 1000mm

ZP

Form w 1 Material 12 N S U F GN GS 10 10 11 1 ZP UT 13 13 14 1.5 16 16 17 Y 2.5 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber A B Construction p. 115 Mounting Bracket Assembly From p. 121 With adapter 10 to 16 w q ZPT UT N A5 10 e Vacuum inlet (Male thread) B Width across flats D 15.5 C A5 M5 x 0.8 A6 M6 x 1 A Model A B C D

A_HEC-OM-J017

Host SOH UT ENQ 32H Check sum CR () () Thermo-con SOH UT STX 32H Internal sensor ETX Check sum CR 101 100 10-1 10-2 () () Host ACK UT CR (Possible to omit) Note2DH is entered in101 digit is attached to temperature data.

HEC-OM-S008

Host SOH UT ENQ 32H Check sum CR (H) (L) Thermo-con SOH UT STX 32H Internal sensor ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK UT CR (Possible to omit) Note) 2DH is entered in 101 digit is attached to temperature data.

ZP

), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Profi-E

Com m uni cat i on dat a al l ocat i on Set t arget val ue Resol ut i on : 12bi t ( 100% F. S. ) , O ccupi ed byt e : 2 Byt e Target val ue ( 0 area) 12bi t 0 0 0 0 Target value(Lower 12 bits) * b0 b15 b11 Put 0 i n upper 4 bi t s ( N ot e) M oni t or t he out put pressure. Resol ut i on : 12bi t ( 100% F.

Mounting: Basic, Model: 30mm, Thread Type: NPT, Rod Length: 1000mm, Made to Order: Stainless Steel

Mounting: B (Basic), Model: 100 (30mm), Thread Type: TN (NPT), Rod Length: 1000mm, Made to Order: XC68 (Stainless Steel)

CC-Link-E

O ut put area I nput area W o rd d ata area In p u t w o rd d ata Rem arks W o rd d ata area O u tp u t w o rd d ata Rem arks RW w 0 b15, b14, b1, b0 b 1 1b 0100% F.S. RW r0 b15, b14, b1, b0 b 1 1b 0100% F.S. RW w 1 U nused RW r1 U nused RW w 2 U nused RW r2 U nused RW w 3 U nused RW r3 U nused O ut put dat a occupi es 4 w ords, but uses onl y t he 1st w ord act ual l y.

Shock Absorbers and Rate Controls

Pdrt Numlel llodel (Rel) A I D T H I K UFfll0xl ut 6363109 0 tli0. l l'l( E ) M l O x l r,50 .41 .24 .25 1.000.98 0.49 IVA.20 N/A Ut l2rl ut5588189 0H,r. r 5 (BI M l 2 x l t.50 .47 .24 .15 1.000.980.49 N/A.20 N/A UlV2.20 ut3935095 ([n)0EM.25(B) rr.?0 uNt 1.50 .56.28 -t) t.001.00 0.50 fl/A .?0 il/a UtjA6.

O

P_1P_2 P_1P_2 W i ndow com parat or m ode H yst eresi s m ode O ut put pressure of E/P regul at or P_2 P_1 P_1 P_2 O N O FF O N O FF Sw i t ch out put P_1P_20 O ut of range m ode The sw i t ch out put t urns on w hen set pressure i s achi eved.

O

P_1P_2 P_1P_2 W i ndow com parat or m ode H yst eresi s m ode O ut put pressure of E/P regul at or P_2 P_1 P_1 P_2 O N O FF O N O FF Sw i t ch out put P_1P_20 O ut of range m ode The sw i t ch out put t urns on w hen set pressure i s achi eved.