MPC 105T Dry Pump System, universal voltage - 20L/min, 1.5 Torr

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod side flange style: CQ2FS/CDQ2FS Rod Side Flange Style RQ Bore size (mm) Stroke range (mm) Without auto switch With auto switch FZ FX FV FT FD A B A B MU 46 56 53.5 63.5 63 73 64 74 73.5 83.5 85 95 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 108 92 80 9 9 74 56 D80 134 116 99 11 11 83.5 63.5 -X 100 154 136 117 11 11 95 73 B + Stroke A + Stroke Bore size (mm) Stroke range (mm) 20L

CV/MVGQ

M8 x 1.25 15 24 M20 x 1.5 62 116 13 8 15.5 13 26 18 20 0 0.033 DUp to 300 45 120 13 22 14 6 8 70.5 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 62 19.5 17 32 10 22 26 0 0.033 Up to 300 13 25.8 16 45 6 8 76.5 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 64 122 19.5 17 32 12 22 26 0 0.033 -X Up to 300 16 50 7 88 154 16 29.8 8 10 84.5 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 22 41 14 24 32 0 0.039 With Rod Boot 20l

CV/MVGQ

65.3 28 M8 x 1.25 15 24 M20 x 1.5 18 8 15.5 13 26 20 0 0.033 DUp to 300 13 45 120 14 5.5 62 22 6 8 70.5 33.5 M10 x 1.25 15 30 M26 x 1.5 22 10 19.5 17 32 26 0 0.033 Up to 300 13 45 122 16 5.5 64 25.8 6 8 76.5 37.5 M10 x 1.25 15 34.5 M26 x 1.5 22 12 19.5 17 32 26 0 0.033 -X Up to 300 16 50 154 16 7 88 29.8 8 10 84.5 46.5 21.5 42.5 M32 x 2 M14 x 1.5 14 24 21 22 41 32 0 0.039 With Rod Boot 20l

Table of Contents

65.3 28 M8 x 1.25 15 24 M20 x 1.5 18 8 15.5 13 26 20 0 0.033 DUp to 300 13 45 120 14 5.5 62 22 6 8 70.5 33.5 M10 x 1.25 15 30 M26 x 1.5 22 10 19.5 17 32 26 0 0.033 Up to 300 13 45 122 16 5.5 64 25.8 6 8 76.5 37.5 M10 x 1.25 15 34.5 M26 x 1.5 22 12 19.5 17 32 26 0 0.033 -X Up to 300 16 50 154 16 7 88 29.8 8 10 84.5 46.5 21.5 42.5 M32 x 2 M14 x 1.5 14 24 21 22 41 32 0 0.039 With Rod Boot 20l

1

A1 Symbol: A2 Symbol: A4 Symbol: A3 CS1 X X L C76 X L X K F C C0.5 DA RD L 30 30 L 30 C85 C95 E Symbol: A21 Symbol: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L

MG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 80 8-RR depth RL Section XX CX WB Z QA WA QB DSection XX -X 4-OA through 4-NN depth NL Section XX Z WA 4-OB counterbore depth OL 4-MM depth ML 20L HA Hexagon bolt T-slot for Data X0.02 X0.02 DA VB VA X X T H U PW DB PB GC XAH7 depth XL XAH7 depth XL

CLS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-FD MM CNA GB BZ CNS EA E BF FY D CLS W CLQ FA AL C MLGP B A K N N F FT FX FZ H BY S + Stroke RLQ ZZ + Stroke MLU BW With rod boot 180, 200, 250 ML1C BV DBZ e -X BG BE 20l f 15 Data h + l 4-MA Effective thread depth MB (To attach eyebolt) ZZ1 + l + Stroke

4-channel Flow Monitor ( compatible)

gal/min 0.00 to 3.53 0.00 to 3.70 PD 0 to 1000 0 to 1050 Flow L/min 0 to 200 0 to 210 200 L Flow gal/min 0.0 to 7.1 0. to 7.4 PD 0 to 1000 0 to 1050 Flow L/min 0 to 500 0 to 525 500 L Flow gal/min 0.0 to 17.6 0. to 18.6 PD 0 to 1000 0 to 1050 Flow L/min 0.40 to 4.00 0.25 to 4.50 4 L Flow gal/min 0.11 to 1.06 0.07 to 1.19 PD 100 to 1000 63 to 1125 Flow L/min 1.8 to 20.0 1.3 to 21.0 PF2D5 20L

PFxx-OMO0007CN

1F.S. 2F.S. 5F.S. 0 3 (3 digits) 50 ms 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 5 L/pulse 5F.S. 3 7 OUT1ON OUT2ON DC1224 V10 () 150 mA 160 mA 170 mA -35No.PF-OMO0007CN PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 IP65 050 -2585 () 3585R.H.() 3F.S.(1535 )5F.S.(050 ) AC1000 V1 50 M(DC500 V ) CERoHS (RcNPTG) 1/81/4 3/8 1/2 ADCNBRSUSPBTPtlrFeNiOFC 250 g 290 g 100 g 1 0.927= 20L

LFE-OMZ0012

. -10No.LFE*-OMZ0012 Model Indication and How to Order LFE Z Isolation Specifications Symbol OUT2 Rated flow range Symbol Content Nil Not isolated 1 0.5 20L/min Z Isolated 2 2.5100L/min 3 5200L/min Output Specifications Options Symbol OUT2 Symbol Lead wire and M12 connector Bracket J Analogue 1 to 5V K Analogue 4 to 20mA Nil Yes 1 2 Yes Yes 3 Yes Thread type Port size Symbol Content Rated

LEH_C

() (40%) INP 1) INP ON 0.50 2) ()INP ON a) b) INP ON c) INP ON 21 - INP SV1.0* () INP ON SV0.6* a.40%() () INP ON b. 40% ON INP OFF LEHZ LEHZJ LEHF LEHS SV10 [mm/sec] () 4150 50% 100% 540 40% 100% 3150 70% 100% 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50% 100% 10 , 16 20 , 25 540 40% 100% 2150 80% 100% 1120 60% 100% 10L , 16L 510 50% 100% 3150 70% 100% 20L

Hydraulic

Cotter pin size C type, 9 for shaft C type, 9 for shaft 3 x 18l 3 x 18l Size Tolerance AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 -0.013 -0.035 -0.013 -0.035 -0.016 -0.043 -0.016 -0.043 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 12 +0.058 0 +0.2 +0.1 Y-02 3.2 x 16l 14 5 20 18 M8 x 1.25 36 16 9 20 CDP-1 9 +0.058 0 Y-03 +0.2 +0.1 14 5 20 18 M10 x 1.25 38 18 9 25 CDP-1 9 4 x 20l

ARJ310

Downstream pressure MPa Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l

AMR3000 to 6000

0 q w e r Valve ass'y Valve spring O ring Gasket Polyacetal Aluminum alloy Note 1) The MC cartridge element and the separation element are integrated. 1.9-2 AMR3000 to 6000 Precautions Flow characteristics Pressure characteristics Condition: Supply pressure 0.7MPa Conditions: Supply pressure 0.7MPa, Secondary pressure 0.2MPa Flow 20l/min (ANR) Be sure to read before handling.

Proposals for Energy Saving

Port size Rc 3/8 Pressure 1.0MPa 0 VBA2100/2200 VBA4100/4200 04 Rc 1/2 Related products Model Description Note VBA1110/1 VBA2100/2200 VBA4100/4200 VBA4200-04 AM250-02 AM450-04, 06 AM550-06, 10 Page 4.6-1 (Best Pneumatics No.4) Mist separator AMC310-03 AMC510-06 AMC610-10 35dB or more noise reduction Exhaust cleaner Air operated type VBAT05 (5l, Directly connected to booster valve) VBAT20 (20l

Modular F.R.L. Unit

When mounting a check valve, make sure the arrow (IN side) points in the correct direction of air flow. 2 AC10 to 60 Conditions: Inlet pressure 0.7MPa Outlet pressure 0.2MPa Flow rate 20L/min (ANR) Pressure Characteristics (Representative values) AC10 AC40-06 0.3 0.25 Set point Outlet pressure MPa Outlet pressure MPa 0.25 Set point 0.2 0.2 0.15 0.15 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

XB19 30 109 90 (Z) (30) 2-M5 x 0.8 Thread depth 8 CXS15-35-XB19 35 114 95 35 CXS15-40-XB19 40 119 100 8 CXS15-45-XB19 45 124 105 CXS15-50-XB19 50 129 110 CXS15-60-XB19 60 139 120 CXS15-70-XB19 70 149 130 45 CXS15-75-XB19 75 154 135 CXS15-80-XB19 80 159 140 CXS15-90-XB19 90 169 55 150 CXS15-100-XB19 100 179 160 CXS20--XB19 ZZ S 14 10 SS 25 2-3.4 through 2-6.5 counter bore depth 3.3 2-4 x 20l

Miniature Regulator Series ARJ310

Downstream pressure MPa Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Cotter pin size C type, 9 for shaft C type, 9 for shaft 3 x 18l 3 x 18l Size Tolerance -0.013 -0.035 -0.013 -0.035 -0.016 -0.043 -0.016 -0.043 AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 12 +0.058 0 +0.2 +0.1 Y-02 14 5 20 18 M8 x 1.25 36 16 9 3.2 x 16l 20 CDP-1 9 +0.058 0 +0.2 +0.1 Y-03 14 5 20 18 M10 x 1.25 38 18 9 25 CDP-1 9 4 x 20l