0.5

400 800 1200 1600 2000 2400 2800 Installation distance [mm] Installation distance [mm] With adjustable louver: Angle setting 5, Air flow level: 10 With adjustable louver: Angle setting 5, Air flow level: 10 IZF21-W IZF31-W 300 mm 300 mm 2 s 4 s 6 s 8 s 0 2 s 4 s 6 s 8 s 0 300 mm 300 mm 0 400 800 1200 1600 2000 0 400 800 1200 1600 2000 2400 2800 Installation distance [mm] Installation distance

Thermo-chiller/Rack Mount Type

50/60 Hz) Concentration meter HRR012 1000/1200 400/500 (100 V type) 450/500 (200 V type) Air-cooled refrigeration With electric conductivity control function, Applicable to DI water piping HRR018 1600/1800 Watercooled refrigeration Particle filter element for replacement (UL Standards) Applicable to DI water piping Air-cooled: Option U (Water-cooled: Standard) HRR024 2000/2400

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

MY1

The spacing (l) of the support must be no more than the values shown in the graph on the right. 180 170 l 160 150 140 (2400) (2400) (2400) (2400) 130 120 Weight m m l 110 Caution 100 m (2000) (2000) (2000) (2000) 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

Digital Flow Switches, Series PF2A, Series PF2W

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 9 Series PF2A For Air Digital Flow Switch Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

Digital Flow Switches Series PF2A

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 11 Digital Flow Switch Series PF2A For Air Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

Digital Flow Switches

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 9 Series PF2A For Air Digital Flow Switch Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow rate

PF2A/PF2W

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 16-11-14 11 Series PF2A Digital Flow Switch, High Flow Type For Air Flow Characteristics (Pressure loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 ZSE ISE PSE Z I SE3 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400

Table of Contents

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 16-11-14 11 Series PF2A Digital Flow Switch, High Flow Type For Air Flow Characteristics (Pressure loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 ZSE ISE PSE Z I SE3 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400

Digital Flow Switch

4800 7200 9600 12000 0 600 1200 1800 2400 3000 0 1200 2400 3600 4800 6000 Flow [L/min] Flow [L/min] Flow [L/min] 11 3-Color Display Digital Flow Switch for Large Flow PF3A7 H Series IN Side Straight Section and Accuracy (Reference Data) PF3A703H (for 3000 L/min) PF3A706H (for 6000 L/min) PF3A712H (for 12000 L/min) 70% 70% 70% PFG300 Function Details PF3A7 H With 1/2" connected With 1" connected

Table of Contents

Select the communication speed from 1200, 2400, 4800, 9600 or 19200 with the UP/DOWN keys. Store the setting with the SET key. The SEL. key only shifts the cursor without storing the setting. UP J DOWN DFUNC. FUNC. SEL. key 3-8 -X Unit no. 20Data The unit number registration mode is selected by pressing the SEL. key while UNIT is flashing.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line LZ 200 W /l60 (Motor rotation speed) (3750 rpm) (2400 rpm) LC3F2 A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63l Motor mounting position: Top/Parallel, In-line 400 W /l60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L 2.86 70 (Motor rotation speed) (1470 rpm

Electric Actuator/Slider Type

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W / 60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 400 W / 60 Motor mounting position: Top/Parallel, In-line (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L 2.86 70 (Motor rotation speed) (1470 rpm) 70 Series

Environment

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L* 2.86 70 (Motor rotation speed) (1470 rpm) * Top/Parallel

15

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W equivalent (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63l 400 W equivalent (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L 2.86* 70 (Motor rotation speed) (1470 rpm) * Equivalent lead which includes the screw lead

Environment

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L* 2.86 70 (Motor rotation speed) (1470 rpm) * Top/Parallel

HRX-OM-W002

R410A(HFC) Quantity of refrigerant Kg 0.36 0.36 0.38 0.38 0.47 0.47 Control method PID control Ambient temperature andhumidity and altitude 1 Temperature:5 to 40,Humidity:30 to 70%,Altitude: Less than 3000m Circulating fluid2 Tap water, Ethylene glycol aqueous solution 15% Operating temperature range1 5 to 3520 Cooling capacity(50/60Hz) 3 W 1000/1200 1600/1800 1000/1200 1600/1800 2000/2400

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17