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(different sides) D-M9N/M9P/M9B 15 3 3 3.5 2 pcs. (same side) D-F9NW/F9PW/F9BW 55 5 5 4.5 D-M9N/M9P/M9B 1 or 2 pcs. (different sides) D-F9BAL 15 5 6 5 2 pcs. (same side) The operating range for the MGZP series is under examination. 55 Solid state switch D-F9NW/F9PW/F9BW 1 or 2 pcs. (different sides) 15 2 pcs. (same side) 70 Bore size (mm) D-F9BAL Auto switch model 1 or 2 pcs.

Air Cylinder

stainless steel 20 to 100 Note 6) v v XC8 Adjustable stroke cylinder/Adjustable extension type XC9 Adjustable stroke cylinder/Adjustable retraction type v v XC10 Dual stroke cylinder/Double rod type v 20 to 63 XC11 Dual stroke cylinder/Single rod type v XC12 Tandem cylinder v v v Note 15) XC13 Auto switch rail mounting 20 to 100 v v v XC20 Head cover axial port 20 to 63 v v XC22

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) (1600) (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1CW50 MY1MW40 MY1MW40 MY1MW40 (1300) (1300) (1300) (1300) 60 60 1.

Electric Actuator/Slider Type

1600 1890 1606 1730 18 8 1600 1700 1990 1706 1830 20 9 1800 1800 2090 1806 1930 20 9 1800 1900 2190 1906 2030 22 10 2000 2000 2290 2006 2130 22 10 2000 2500 2790 2506 2630 28 13 2600 Encoder cable (7) Motor cable (7) Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of R chamfering.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

400 600 800 1000 1200 1400 1600 Speed [mm/s] 0 200 400 600 800 1000 1200 1400 1600 Speed [mm/s] LEC Y LEC Y Regenerative resistor area Applicable Motor/Driver Motorless * When using the actuator in the Regenerative resistor area, download the AC servo capacity selection program/SigmaJunmaSize+ from the SMC website.

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Model LEFB25 LEFB32 LEFB40 300, 400, 500 600, 700, 800 900, 1000, (1100) 1200, (1300, 1400) 1500, (1600, 1700) (1800, 1900), 2000 2500 300, 400, 500 600, 700, 800 900, 1000, (1100) 1200, (1300, 1400) 1500, (1600, 1700) (1800, 1900), 2000 2500, 3000 300, 400, 500 600, 700, 800 900, 1000, (1100) 1200, (1300, 1400) 1500, (1600, 1700) (1800, 1900), 2000 LEF Stroke [mm] Note 1) LEJ Actuator specifications

10

v 32 to 125 XC7 Tie-rod, cushion valve, tie-rod nut, etc. made of stainless steel v v v v XC8 Adjustable stroke cylinder/Adjustable extension type v v XC9 Adjustable stroke cylinder/Adjustable retraction type v v XC10 Dual stroke cylinder/Double rod type v v XC11 Dual stroke cylinder/Single rod type v v XC12 Tandem cylinder v v v v v v XC14 Change of trunnion bracket mounting position XC22

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Smooth Cylinder/Low Speed Cylinder

50 47 157 160 128 32 71 43 19 20 212 112 255 15 M14 x 1.5 15 Up to 1600 56 53 177 180 144 38 78.5 42 19 20 236 118 275 18 M16 x 1.5 15 Up to 1600 (mm) Bore size (mm) Without rod boot With rod boot W K KA M MM N P S ZZ e f h ZZ1 H l 125 140 160 27 13 M30 x 1.5 30.5 1/2 98 17 15 110 221 75 40 133 1/ 5 stroke 244 27 13 M30 x 1.5 30.5 1/2 98 17 15 110 221 75 40 133 1/ 5 stroke 244 34 15 M36

MY1

Support brackets are not for mounting; use them solely for providing support. m 90 MY1C63 MY1C63 MY1C63 MY1C63 80 (1600) (1600) (1600) (1600) (1600) (1600) 70 MY1C50 MY1C50 MY1C50 MY1C50 MY1C50 MY1C50 l l 60 (1400) (1400) (1400) (1400) (1400) (1400) MY1C40 MY1C40 MY1C40 MY1C40 50 MY1C32 MY1C32 MY1C32 MY1C32 MY1C32 MY1C32 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1C25 MY1C25 MY1C25 MY1C25

Compact

BMY3-016 Auto switch model Tightening torque D-M9l(V) D-M9lW(V) 0.10 to 0.15 210 Solid State Auto Switch Direct Mounting Type D-M9N(V)/D-M9P(V)/D-M9B(V) RoHS Refer to SMC website for the details of the products conforming to the international standards.

smcmaintenancepartslist

(Fluororubber seal) 12 MGP12-XC22-PS 16 MGP16-XC22-PS 20 MGP20-XC22-PS 25 MGP25-XC22-PS 32 MGP32-XC22-PS 40 MGP40-XC22-PS 50 MGP50-XC22-PS 63 MGP63-XC22-PS 80 MGP80-XC22-PS 100 MGP100-XC22-PS Grease Pack Part No. * Grease pack part numbers other than below are the same as basic type.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

Environment

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

Tie-rod Type Hydraulic Cylinder

Symbol -XC22 Fluororubber Seals 1 CHQ How to Order CHK XC22 Standard model no. CHN CHM Fluororubber seals CHS Specifications CH2 Note 1) Please confirm with SMC, as the type of chemical and the operating temperature may not allow the use of this product.

2

Single Unit Type/Flow-rate Characteristics Conditions: Inlet air temperature 25C, P1: Inlet air pressure Standard dew point20C [Symbol: Nil], 15C [Symbol: H] IDG100, IDG100H IDG75, IDG75H IDF IDU IDF FS 0.08 0.10 P1 = 0.3 MPa 0.08 0.06 P1 = 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) IDG P1 = 0.5 MPa 0.06 P1 = 0.5 MPa 0.04 0.04 P1 = 0.7 MPa 0.02 P1 = 0.7 MPa 0.02 0.00 0 800 1200 400 1600

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

Table of Contents

D-M9N(V)/D-M9P(V)/D-M9B(V) Direct Mounting Style . D-F8N/D-F8P/D-F8B Direct Mounting Style . D-Y59A, B /D-Y69A, B /D-Y7P(V) Direct Mounting Style . D-F9G/D-F9H Normally Closed Direct Mounting Style. D-Y7G/D-Y7H Normally Closed Direct Mounting Style. 2-color Indication Type . D-F79W/D-F7PW/D-J79W Rail Mounting Style. D-F7NWV/D-F7BWV Rail Mounting Style .

CLS

3 5 30 46 M14 x 1.5 161 78 18 110 146 128 16 114 64 110 100 298 112 246 27 Up to 1400 1401 to 1600 M16 x 1.5 182 95 23 132 169 144 18.5 130 74 120 106 338 118 275 30.5 Up to 1400 1401 to 1600 5 5.5 6 30 34 42 16 21 35 M18 x 1.5 204 106 36 167 195 162 18.5 149 86 135 125 398 132 320 35 1801 to 2000 Up to 1800 118 226 124 40.5 187 216 182 18.5 165 97 135 M20 x 1.5 132 418 150 348

CE

Nil L 0.5 m Standard cylinder stroke (mm) Refer to Standard Stroke on page 10-12-9. 3 m Connector Nil Z With connector Without connector Fluoro rubber seals: -XC22 (Example) CEP1B12-100-M9N-XC22 Applicable counter Series CEU5 05 Extension cable CE1-R Mounting Bracket Part No. Cable length Suffix 05 10 15 20 Nil C Cylinder part no.