High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

RHC

RZQ 80 47 63 63 1500 250 Up to 1200 80 84 MI W S 80 80 1500 250 Up to 1400 80 127 100 100 1500 250 Up to 1500 80 196 CEP1 Note 1)The cylinder performance may not be as expected when stroke is shorter than recommended stroke (1 to 249 stroke), even they are available.

Refrigerated Air dryer Series IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

NCA1

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult SMC Customer Service for larger sizes.

Air Cylinder NCA1 Series

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult P/A Customer Service for larger sizes.

HRX-OM-W002

1600/1800 1000/1200 1600/1800 2000/2400 2500/3000 Heating capacity(50/60Hz)4 W 400/500 450/500 550/700 Temperature stability 5 0.1 0.13(at 7L/min)/0.18(at 7L/min) Pump capacity (50/60Hz) 6 MPa For option T : 0.42(at 10L/min)/0.4(at 14L/min) 0.13at 7L/min/0.18(at 7L/min) For option MT : 0.32(at 10L/min)/0.32(at 14L/min) For option -T/MT0.36at 7L/min/0.42(at 10L/min) For option T1 : 0.28(

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

cylinder (5 to 50 mm/s) -XB14 Cylinder with heat resistant auto switch 16 to 63 only -XB18 Low friction cylinder, 32 to 100 only -XC4 With heavy duty scraper, 20 to 100 only -XC6 Piston rod and rod end nut made of stainless steel -XC8 Adjustable stroke cylinder/Adjustable extension type -XC9 Adjustable stroke cylinder/Adjustable retraction type -XC10 Dual stroke cylinder/Double rod type -XC11

MB

MB1 Standard Stroke Bore (mm) CA2 Standard stroke (mm) Max. stroke 32 CS1 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C76 Made to Order Specifications (For details, refer to 6-6-39.) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125,

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com -XC11 Dual stroke cylinder/Single rod type -XC18 NPT finish piping port -XC35 With coil scraper, 32 to 100 only -XC36 With boss in rod side -XC58 Water resistance improved type/Built-in hard plastic magnet, 20 to 100 only -XC59 Fluoro rubber for seal/

Digital Flow Switches, Series PF2A, Series PF2W

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 9 Series PF2A For Air Digital Flow Switch Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

Digital Flow Switches Series PF2A

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 11 Digital Flow Switch Series PF2A For Air Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

Digital Flow Switch

4800 7200 9600 12000 0 600 1200 1800 2400 3000 0 1200 2400 3600 4800 6000 Flow [L/min] Flow [L/min] Flow [L/min] 11 3-Color Display Digital Flow Switch for Large Flow PF3A7 H Series IN Side Straight Section and Accuracy (Reference Data) PF3A703H (for 3000 L/min) PF3A706H (for 6000 L/min) PF3A712H (for 12000 L/min) 70% 70% 70% PFG300 Function Details PF3A7 H With 1/2" connected With 1" connected

Digital Flow Switches

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 9 Series PF2A For Air Digital Flow Switch Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow rate

PF2A/PF2W

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 16-11-14 11 Series PF2A Digital Flow Switch, High Flow Type For Air Flow Characteristics (Pressure loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 ZSE ISE PSE Z I SE3 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400

Table of Contents

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 16-11-14 11 Series PF2A Digital Flow Switch, High Flow Type For Air Flow Characteristics (Pressure loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 ZSE ISE PSE Z I SE3 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 DIntermediate strokes and short strokes other than the above are produced upon receipt of order.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

RY RT [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 50 Up to 1200 20 to 1200 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 63 Up to 1200 20 to 1200 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 80 Up to 1400 20 to 1400 40 37 102 32

10

v v XC4 With heavy duty scraper v v v v XC5 Heat resistant cylinder (10 to 110C) v v v v v XC6 Made of stainless steel Note 6) v v 32 to 125 XC7 Tie-rod, cushion valve, tie-rod nut, etc. made of stainless steel v v v v XC8 Adjustable stroke cylinder/Adjustable extension type v v XC9 Adjustable stroke cylinder/Adjustable retraction type v v XC10 Dual stroke cylinder/Double rod type v v XC11

CNA

1001 to 1200 11.5 105 23 140 64 170 40 92 48 263 58 52 19 66 1/4 stroke 258 1001 to 1200 1001 to 1200 13.5 124 28 164 84 198 45 112 59 317 80 65 21 80 1/4 stroke 310 1001 to 1400 1001 to 1400 13.5 140 29 180 100 220 50 136 60 347 80 65 21 81 1/4 stroke 339 1001 to 1500 1001 to 1500 9-7-15 16 Series CNA Dimensions Head side flange style (G): CNAGN Rc BP unlocking port Unlocked when pressurized

CNA

1001 to 1200 11.5 105 23 140 64 170 40 92 48 263 58 52 19 66 1/4 stroke 258 1001 to 1200 1001 to 1200 13.5 124 28 164 84 198 45 112 59 317 80 65 21 80 1/4 stroke 310 1001 to 1400 1001 to 1400 13.5 140 29 180 100 220 50 136 60 347 80 65 21 81 1/4 stroke 339 1001 to 1500 1001 to 1500 9-7-15 16 Series CNA Dimensions Head side flange style (G): CNAGN Rc BP unlocking port Unlocked when pressurized