CY1 Symbol Symbol 12 Added mounting tap positions for slider 13 Oil-free exterior specifications -X206 -X210 CY1B CY1S X210 Bore Stroke Magnetic holding force Magnetic holding force CY1B X206 Bore Stroke Added mounting tap positions for slider Oil-free exterior specifications Mounting taps have been added on the surface opposite the standard positions.
Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Code Delivery pressure
0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR030-A-20, HRR030-W-20 [50 Hz] [60 Hz] 4000 4000 25C 25C 3500 3500 Cooling capacity [W] Cooling capacity [W] 3000 3000 32C 2500 2500 32C 2000 2000 40C 1500 1500 40C 1000 1000 Ambient temperature or facility water temperature Ambient temperature or facility water temperature Ambient temperature or facility
flow rate [L/min (ANR)] AFF50 AFF60 6 20 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 5 15 Inlet pressure 0.5 MPa Inlet pressure 0.5MPa 4 Pressure drop [kPa] Pressure drop [kPa] Max. flow capacity line 3 10 Max. flow capacity line Accessories Sold Separately/ International Standard 2 5 1 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 500 0 500 2000 1500 1000 2000 2500 1500 1000 3000 3500
Fig 9.4-4 Cooling capacity(HRS018--20) 9.4.5 HRS024--20-(BJMT) 3500 3500 Ambient Ambient 3000 3000 temperature temperature or or Cooling capacity[W] Cooling capacity[W] 2500 2500 facility water facility water temperature temperature 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[]
Ambient temp. 3500 or or or 3500 or or 2000 2000 2000 2000 Facility water temp. Facility water temp. or Facility water temp. Facility water temp. Facility water temp. Facility water temp.
125 3500 250 3500 120 3500 13 300 4000 150 4000 300 4000 130 4000 14 350 4500 175 4500 350 4500 140 4500 15 400 5000 200 5000 400 5000 150 5000 56 No.JXC-OMU0004-A 10.4 LEYLEYG LEYLEYG LEYLEYG [mm/s] 20 2] 1000 [mm/s [mm/s] 10 2] 1000 [mm/s [mm] 1 3 LEY16LEYG16 LEY25LEYG25 LEY32LEYG32 LEY40LEYG40 A B C A B C A B C A B C 14 27 51 63 126 232 80 156 296 156 298 570 26 50.5 96 92.5 182
1 e 3(R) Effective area (mm2) Model Component Parts VHS 2500, 3500 5 VM/VR Description Material ADC12 ZDC2 ADC12 Zinc alloy Zinc alloy C3604B A2017B C3604B Description No. q w e r t y u i No. !0 !1 !2 !3 !4 !5 !6 !7 !
New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer
REA (basic type) Symbol Special bearing 5 Additional mounting tap positions for slider -X206 X206 Bore size Stroke REA Additional mounting tap positions for slider Mounting taps have been added on the surface opposite the standard positions.
CX DSymbol Specifications 1200 -XB11 Long stroke (2001 mm and up) -X -XB13 Low speed specifications (7 to 50 mm/s) 1100 40 40 -X116 Hydro specifications 20-X132 Axial ports 1000 -X160 High speed specifications Data 900 -X168 Helical insert thread specifications -X206 Added mounting tap positions for slider Theoretical thrust (N) 800 -X210 Oil-free exterior specifications -X322 Outside of
CX DSymbol Specifications 1200 -XB11 Long stroke (2001 mm and up) -X -XB13 Low speed specifications (7 to 50 mm/s) 1100 40 40 -X116 Hydro specifications 20-X132 Axial ports 1000 -X160 High speed specifications Data 900 -X168 Helical insert thread specifications -X206 Added mounting tap positions for slider Theoretical thrust (N) 800 -X210 Oil-free exterior specifications -X322 Outside of
Bleed port M5 thread IN OUT Symbol X206 With Bleed Port Fittings (Applicable Tubing O.D.: 4) 2 Regulator with a fitting in order to connect it to the bleed port. X206 Standard model no. With bleed port fittings Dimensions Other dimensions are the same as the standard type.
Small additional clearance required for cartridge replacement T E C H N I C A L SPECIFICATIONS D I M E N S I O N S M I S T S E P A R AT O R S E R I E S NAMD Max Operating Pressure 1MPa / 145PSI Minimum Operating Pressure 0.05MPa / 8 PSI Ambient and Fluid Temperatures 5 60C / 40~140F Filtration Degree 0.01m Oil Mist Removal 99.9% NAMD150 200 NAMD250 250 NAMD350 1000 NAMD450 2000 NAMD550 3500
Small additional clearance required for cartridge replacement T E C H N I C A L SPECIFICATIONS D I M E N S I O N S M I S T S E P A R AT O R S E R I E S NAMD Max Operating Pressure 1MPa / 145PSI Minimum Operating Pressure 0.05MPa / 8 PSI Ambient and Fluid Temperatures 5 60C / 40~140F Filtration Degree 0.01m Oil Mist Removal 99.9% NAMD150 200 NAMD250 250 NAMD350 1000 NAMD450 2000 NAMD550 3500
LEY63 T8 (Motor mounting position: Top/Parallel, In-line) 787 [3500] 674 [3000] Lead 2.86: LEY63 L (Top/Parallel only) 562 [2500] Force lbf [N] Lead 5: LEY63 C 450 [2000] 337 [1500] Lead 10: LEY63 B 225 [1000] 112 [500] Lead 20: LEY63 A 0 10 12 20 30 40 50 Torque limit/Command value [%] Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 20 or less 100 100 (60)
Bar length (mm) 300, 380, 620, 780 1100, 1260, 1500 1900, 2300 661 A Series IZS31 Dimensions Feedback sensor/IZS31-DF Amplifier part Head part 2 x 3.4 2 x 3.4 3500 1500 16.6 13 SMC 9 58 25 4.8 10.2 69 15 4.8 23 8 87.5 78 0.5 11 13 6.5 7.8 8.8 8.8 0.5 10.2 10.2 13 60 7.7 7 6 1 50.5 14 Detection hole 10 61 2 x R3.3 Autobalance sensor [High-precision type]/IZS31-DG Amplifier part Head part 2
A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 44 2 x 5.4 18 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 432 Ionizer IZS40/41/42 Series Dimensions Feedback sensor/IZS31-DF 2 x 3.4 Amplifier 2 x 3.4 Head 1500 3500 IZS IZS 9 16.6 13 SMC IZN 4.8 10.2 25 58 4.8 69 23 87.5 IZF 78 ZVB
series Vespel (Option: PEEK) PCTFE Viton (Option: Polyurethane, Buna-N, Ethylene propylene) PTFE C 300 SS series 316 SS Wetted Parts Body Inlet filter Piston and trim Seat, main valve Seat, vent valve O ring Rings, back up Dimensions Flow Characteristics inch (mm) KT10 2.25 (57.2) KT10 6000 psig (41.4 MPa) inlet 1500 psig (10.3 MPa) inlet Inlet pressure: 3000 psig (20.7 MPa) inlet 4000 27.6 3500
3500 temperature temperature or or Cooling capacityW Cooling capacityW 3000 3000 facility water temperature facility water temperature 2500 2500 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz The cooling capacity will be reduced by 300W when option: T and MT are selected.