15

CY1L CY1H X210 Standard model no. X322 Standard model no.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

8-15-6 ) Series CY3R Page 8-15-16 1000 900 800 700 600 500 450 400 350 300 250 200 150 100 50 Series Long stroke (2001 mm and up) Low speed specifications (7 to 50 mm/s) Hydro specifications Axial ports High speed specifications Helical insert thread specifications Added mounting tap positions for slider Oil-free exterior specifications (XB11) (XB13) (X116) (X132) (X160) (X168) (X206) (X210

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CX DSymbol Specifications 1200 -XB11 Long stroke (2001 mm and up) -X -XB13 Low speed specifications (7 to 50 mm/s) 1100 40 40 -X116 Hydro specifications 20-X132 Axial ports 1000 -X160 High speed specifications Data 900 -X168 Helical insert thread specifications -X206 Added mounting tap positions for slider Theoretical thrust (N) 800 -X210 Oil-free exterior specifications -X322 Outside of

CY1

Symbol Symbol 12 Added mounting tap positions for slider 13 Oil-free exterior specifications -X206 -X210 CY1B CY1S X210 Bore Stroke Magnetic holding force Magnetic holding force CY1B X206 Bore Stroke Added mounting tap positions for slider Oil-free exterior specifications Mounting taps have been added on the surface opposite the standard positions.

REA/REB

Order Made Symbol Symbol 4 Helical insert thread specification 6 Non-lubricated exterior specification -X168 -X210 REA REAS REAL REAH REBH REA REAS X210 Bore size Stroke X168 Bore size Stroke Non-lubricated exterior specification Helical insert thread specification Suitable for environments where oils are not tolerated. A scraper is not installed.

AZ1000

High inlet pressure Changes from the standard type are: 0.14 20 AZ1210 AZ1215 Option Other Parameters HR Source pressure Proof pressure (Inlet) Burst pressure Vacuum to 3000 psig (20.7 MPa) 4500 psig (31 MPa) 9000 psig (62 MPa) 0.07 10 0.00 0 0 100 200 300 400 500 600 700 Flow rate (slpm, N2) Dimensions inch (mm) AZ1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEFS40l SGMJV-04A3A SGDV-2R8A11l (LECYM2-V8) SGDV-2R8A21l (LECYU2-V8) Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /m40 (Motor rotation speed) (4500

Series AP500

High inlet pressure Changes from the standard type are: 30 0.21 AP1210 AP1215 Option Other Parameters Vacuum to 3000 psig (20.7 MPa) ) 4500 psig (31 MPa) 9000 psig (62 MPa) HR Source pressure 20 0.14 Proof pressure (Inlet) Burst pressure 10 0.07 ) 3/4 inch face seal fittings rated to 2400 psig (16.5 MPa) maximum.

REA/REB

-X210 Non-lubricated exterior specifications RZQ -X324 Non-lubricated exterior specifications (With dust seal) -X431 Switch rail mounting on both sides (With 2 pcs.)

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-X210 Non-lubricated exterior specifications RZQ -X324 Non-lubricated exterior specifications (With dust seal) -X431 Switch rail mounting on both sides (With 2 pcs.)

modular-press-e

Model name Model AMR3000 AMR4000 AMR5000 AMR6000 :E3-02 :E3-03 :E4-02 :E4-03 :E4-04 :E5-04 :E5-06 :E6-06 1:E6-10 1 4 3 8 1 4 3 8 1 2 3 4 3 4 Adapter assembly Note 7) 1 2 Float style auto drain (AMR100) Note 8) AD33-X203 AD33X202 AD33-X210 AD33-X201 AD33-X203 AD33-X202 IS1000-01 (0.4 MPa setting) AD33-X210 AD33-X201 Compact pressure switch Elbow (R x Rc) Note 9) 135510 135613 135510 135613

Modular F.R.L. Pressure Control Equipment

Model name Model AMR3000 AMR4000 AMR5000 AMR6000 :E3-02 :E3-03 :E4-02 :E4-03 :E4-04 :E5-04 :E5-06 :E6-06 1:E6-10 1 4 3 8 1 4 3 8 1 2 3 4 3 4 Adapter assembly Note 7) 1 2 Float style auto drain (AMR100) Note 8) AD33-X203 AD33X202 AD33-X210 AD33-X201 AD33-X203 AD33-X202 IS1000-01 (0.4 MPa setting) AD33-X210 AD33-X201 Compact pressure switch Elbow (R x Rc) Note 9) 135510 135613 135510 135613

REA/REB

-X210 Non-lubricated exterior specifications RZQ -X324 Non-lubricated exterior specifications (With dust seal) -X431 Switch rail mounting on both sides (With 2 pcs.)

Environment

150 Lead 5: LEY63C LEC Y Lead 10: LEY63B 100 Lead 20: LEY63A Motorless 50 LAT 0 0 200 400 600 800 1200 1000 Speed [mm/s] LZ Allowable Stroke Speed [mm/s] LC3F2 Model AC servo motor Lead Stroke [mm] Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 600 700 800 A 12 900 600 B 6 450 300 C 3 225 150 LEY25 Motor mounting position: Top/Parallel, In-line 100 W /40 (Motor rotation speed) (4500

KT10

series Vespel (Option: PEEK) PCTFE Wetted Parts Body Surface finish Inlet filter Piston and trim Seat, main valve Seat, vent valve 2500 17.2 13.8 2000 Delivery pressure (MPa) Delivery pressure (psig) Viton (Option:Polyurethan, Buna-N, Ethylene propylene) O-ring 1500 10.3 Rings, back up PTFE 1000 6.9 Dimensions inch (mm) KT10 3.4 500 2.25 (57.2) 0.0 0 0 500 1000 1500 2000 2500 3000 3500 4000 4500

Slider Type Ball Screw Drive/11-LEFS Series

Operating condition Model LC3F2 A LEC-MR-RB-032 B LEC-MR-RB-12 Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 Up to 1300 Up to 1400 Up to 1500 H 24 1800 1580 1170 910 720 580 480 410 A 16 1200 1050 780 600 480 390 320 270 LEJS40 100 W/ m40 B 8 600 520 390 300 240 190 160 130 (Motor rotation speed) (4500 rpm

Micro-Mist Separator with Prefilter Series AMH

---I -~ _:_::-::: : ::-0.7ipa ~,,:-~~.'. "". 0~~1~00 ~~2~0~~~ ~ 0 30~0-4~OLO-~50~0~~60~0 0 1500 3000 4500 6000 7500 Air flow rate Qlmin (ANR) Air flow rate Qlmin (ANR) AMH350 AMH850 0.5MPa )7MPa I I // ",0.06I-Air pressure 0.3MPa '" 0.06 Inlel air pressure 0.3MPa / a. V o/pa ~pa ::;; a. V~V ::;; Q) /-Y :; ~0 . 04 '// ~ / /,/ ~ 0.04

Series AP3100

Specifications AP3100 AP3102 AP3150 AP3157 AP3125 Select compatible materials of construction for the gas Operating Parameters Gas Vacuum to 3000 psig (20.7 MPa) 1) Vacuum to 1300 psig (9.0 MPa) Vacuum to 3000 psig (20.7 MPa) 1) Operating pressure Vacuum to 1300 psig (9.0 MPa) Proof pressure Burst pressure Ambient and operating temperature Cv 3) 4500 psig (31 MPa) 10 psig (69 MPa) -40 to

Series AP3500

Select compatible materials of construction for the gas Operating Parameters Status Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv 2) Vacuum to 3000 psig (20.7 MPa) 1) Vacuum to 1300 psig (9.0 MPa) 4500 psig (31 MPa) 10 psig (69 MPa) 14 to 149F (10 to 65C) (No freezing) 1.0 0.7 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 3) Ra max