5 119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104
x 1.5 21.5 42.5 M32 x 2 188 1/4 In the case of with rod boot, refer to basic style on page 6-4-31 and f dimension on page 6-4-13.
2 x M20 x 1.5 thread depth 13 (Conduit port) 90.2 18 (Pitch) P=16 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.
10 (12) M5 x 0.8 18 15.5 40 13 14 8 12 2 5.5 6 28 35 5 26 M4 x 0.7 5 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 44 17 16.5 10 14 2 5.5 7 32 40 6 31 M5 x 0.8 5.5 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 53 17 20 12 18 2 6.6 7 38 40 6 38 M5 x 0.8 5.5 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 61 19 26 16 25 2 6.6 8 46
(mm) Series CQ2 CQS Bore size (mm) G G Th9 Th9 0 0.043 0 0.043 12 1.5 1.5 15 15 0 0.052 0 0.052 16 1.5 1.5 20 20 MGC Series MGG Series (mm) (mm) 0 0.043 0 0.043 20 2 2 13 13 0 0.043 0 0.052 0 0.052 0 0.062 0 0.062 0 0.062 0 0.074 0 0.043 25 2 2 15 15 Bore size (mm) Bore size (mm) Throttle dia. () Throttle dia. () 32 2 21 20 5 20 3 40 2 28 25 5 25 3.5 50 2 35 32 6 32 6 63 2 35 -X -
across flat 6 5 Width across flat 8 Width across flat 10 Width across flat 8 Width across flat 10 Vertical 2 2 2 2 3 13 A D B 3 13 A D B With Adapter: Vacuum Inlet 2 2 2 2 13 A D B B D A M6 x 0.75 M6 x 0.75 M3 x 0.5 7 0.3 M3 x 0.5 7 0.3 M8 x 0.75 M8 x 0.75 M3 x 0.5 M3 x 0.5 7 Vertical 3 3 13 With Buffer: Vacuum Inlet 3 3 7 0.3 0.8 2 1.5 0.8 3 3 2 2.5 0.8 2 2.5 0.8 1.5 2 0.3 Lateral With
UL/C-ULK5 13 19 13 13.6 (1) (a) () SD 1(4.12) (b) ( ) (c) () 13 20 13 M 1. 2. 3. () 4. 5. 1. 2. 3. () 4. 1. ()(FR-BIF()) 2.
12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 G 22 22 22 22 20 26 32 40 30 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 NA 2 2 2 2 2 2 4 4 4 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA 162 218 258 13-/22-MXS25L-10 13-/22-MXS25L-20 13-/22-MXS25L-30 13-/22-MXS25L-40 13-/22-MXS25L-50 13-/22-MXS25L-75 13-/22-MXS25L-100 13-/22-MXS25L-125 13-
(latching) (A)(B) (A)(B) 4 2 4 2 5 13 5 13 (R1) (P) (R2) (R1) (P) (R2) Metal seal Rubber seal 2 Note 1) 2 position double (double solenoid) Lead wire is not included.
Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.
boss mount (mm) Bore (mm) 12 16 20 25 Th9 G 15 0 -0.043 20 0 -0.052 13 0 -0.043 15 0 -0.043 1.5 1.5 2 2 Note1) Rod side with guide boss: Option (Specify "XC36'' at end of model no.)
2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 109 109 119 129 145 177 220 245 13-/22-MXQ1610 13-/22-MXQ1620 13-/22-MXQ1630 13-/22-MXQ1640 13-/22-MXQ1650 13-/22-MXQ1675 13-/22-MXQ16-100
60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16 16 16 16 51 61 109 159 KA 125 173 223 13-/22-MXS16L-10 13-/22-MXS16L-20 13-/22-MXS16L-30 13-/22-MXS16L-40 13-/22-MXS16L-50 13-/22-MXS16L-75 13-/22-MXS16L-100 13-/22-MXS16L-125 791 MXS 1322Air Slide Table Dimensions
-3-2 2 Series ZR Large Size Vacuum Module: Ejector System/Vacuum Pump System Modular Components Introduction System Ejector System Vacuum Pump System 13-3-4 to 13-3-33 13-3-34 to 13-3-49 Component equipment Characteristics Ejector unit ZR1-W Nozzle dia.
) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Same side 10 35 55 100 100 110 90 100 110 90 100 110 1 Different sides 2 Same side 35 + 30 (n 2) n = 2, 3, 4 90 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8
2, 3, 4 75 + 35 (n 2) n = 2, 4, 6, 8 80 + 35 (n 2) n = 2, 4, 6, 8 90 + 35 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 Different sides RB D-A44C n Same side J 10 75 80 90 1 2 (Different sides, Same side), 1 D85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 15 + 40 n = 2, 4, 6, 8 (n 4) 2 (
N through 4-O counterbore With boss in head side With Boss in Head Side Bore size (mm) 12 16 20 25 G Th9 0 0.043 0 0.052 0 0.043 0 0.043 15 20 13 15 1.5 1.5 2 2 Note) With boss in rod side would be optional.
1 Metal Seal/Rubber Seal Series VQ7-6 Prewired Connector Type 2 position single : VQ7-6-FG-SSC single (Reverse pressure): VQ7-6-YZ-SSC 120.5 120.5 68.5 52 Mounting hole 2-6.5 68.5 50 50 Manual override 42.5 42.5 13 (A port) 13 (B port) 25 25 (R1, R2) 2-3/8 P R2 R1 VK A B 14 11 VZ 38 50 62 50 62 A 12 9 VF R2 R1 P (L 500) Cable with connector B A 2-1/8 13 13 VFR Mounting hole 2-6.5 42.5 42.5
8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.
-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P = 11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 35 4 L2 38 L1 42 M plug connector (M) 1 2 3 4 5 n U side D side Stations Direct manual override (Non-locking) 24 15 43 L plug connector (L) Dimensions n: Stations n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31