AC Servo Motor Driver (Pulse input type/Positioning type) Driver Servo amp lifier (Note 7) (Note 7) (Note 4, 9) (Note 2) 24VDC CN1 CN1 1 DICOM 9 ALM Trouble (Note 6) RA1 13 DOCOM 10 SA Speed reached (Note 3, 5) Forced stop RA 2 EM1 SON RES 8 4 3 (Note 9, 11) Servo-on 11 RD Ready RA 3 (Note 9, 10, 12) Reset Electromagnetic brake interlock 12 MBR Speed selection 1 RA 4 SP1 5 6 Forward rotation start Reverse rotation start ST1 ST2 7 10m max. 10m max
Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to
Restrictor: ASN2-01 Pressure: 0.5 MPa Mounting orientation: Horizontal, with no load, piston extended The above piston speed is for reference purpose only.
Restrictor: ASN2-01 Pressure: 0.5 MPa Mounting orientation: Horizontal, No-load, Piston extended The above piston speed is for reference purpose only.
Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate
Rated Flow Range: 0.05 to 5 L/min, Flow Adjustment Valve: None (Straight), Port Size: Rc1/8, Output Specification: Out 1: PNP; Out 2: Analog 4 to 20 mA, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/o Flow Adjustment Valve, Calibration Certificate: Calibration Certificate, Made to Order:
Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: C4 (ΓΈ4), Output Specification: L4 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: None, Made to Order: X731 (Compatible
Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide Mixed Gas)
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate), Made to Order: X731 (Compatible
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide
to Order: X731 (Compatible with Argon and Carbon Dioxide Mixed Gas)
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide Mixed Gas)
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: L2 (Out 1: IO-Link or NPN/PNP, Out 2: NPN, PNP, or Input), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide Mixed
Use the RA face to turn it counter-clockwise (reverse actuation).
Port size 01 02 03 1 8 1 4 3 8 Thread Rc(PT) NPTF G(PF) NPT Refer to table q for configuration.
Cylmoer IS unlocked allln"le of shipment See page 9 lor notes and Instruc~ons 01 engagHlg lOCk unit.
SP O2('5 (1'{' NPIF PORTg |l{ct-uDEs 1 Block XI 01 t2 3 Soc Hd Sc.ws NXT010.19A (1G24X1%1 1 Gaskol NXT010.14 2 Fltlsh Plugs r/4"NPT ORDERII{G PART NO. SP O30' (3,l .
available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02 2PW Delivery pressure Option Ports Delivery pressure Code 0.5 to 10 psig (0.0034 to 0.07 MPa) Sub-atmospheric (A): 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Range options 1) Specification Code Ports 2 ports 3 ports Standard (Cv: 0.07) Code Specification Standard Sub-atmospheric 2PW 3PW No code 01
CN1 CN1 24VDC Emergency stop (Note 6) EMG DOCOM (Note 4) Servo-on SON DICOM (Note 4) ALM Trouble RA DOCOM -12- 3.2 I/O signal connection 3.2.1 Connection example (Sink I/O interfaces) An example of a connection for the I/O signal connection is shown below. Connect wires as necessary.