2

/32-07A 17.2 21.7 16.9 M5 x 0.8 10/32UNF 8 9.4 26.5 25.4 23.5 22.4 13.3 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation INDEX 478 Series AS-FG For M5, 10-32UNF Dimensions/ Universal type Seal method: Gasket seal For M5, 10-32UNF Applicable tubing O.D. d D3 D1 L4 L3 M D2 L5 A H T L1 L2 Metric Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 Note 1) A Note

Series VQ Metal Seal/Rubber Seal Body Ported

Manifold Specifications Series Porting specifications Applicable stations Port location Port size P, R A, B C3, C4, M5 C3, C4, C6, M5 C4, C6, C8 C6 C6 C8 VQ0 VQ1000 VQ2000 Side Side Side Max. 16 Max. 16 VV5Q14 Max. 16 Wiring Specifications/Negative COM (Option) Wiring Specifications/Positive COM The lead wires are connected to the valve as shown below.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

1.12-21 VQZ1000/2000/3000 Body Ported Dimensions: VQZ3000 VV5QZ32 C (35) 34 Station (12) 2n-C6, C8, C10, 02 (7.5) (5.5) 26 C8: One-touch fittings for 8 C6: One-touch fittings for 6 (4) 44.5 Mounting holes Grommet (G) C10: One-touch fittings for 10 02: Rc(PT)1/4 U side DIN rail clamp screw n Manual override 5 A A A A 2 4 B 4 4 4 4 (L4) (L3) 2 L2 L1 3 B 2 2 P=19 B 2 1 SMC B 21 Stations 6 D

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

4-14-15 Body Ported 16 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ32Stations C Grommet (G) (35) n-C6, C8, C10, 02 (11) 33.5 2-4.5 mounting hole (5.5) C8: One-touch fitting for 8 C6: One-touch fitting for 6 (7.5) 24 DIN rail clamp screw (2.5) C10: One-touch fitting for 10 02: Rc 1/4 U side n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P = 19 1 21 6 Stations Courtesy of Steven

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

2.10-15 VQZ100/200/300 Body Ported VQZ300 VV3QZ32C Station C10: One-touch fittings for 10 C8: One-touch fittings for 8 C6: One-touch fittings for 6 n-C6, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P=19 1 21 6 Stations D side 1.8 (C6, C8) 17.5 3.5 20.5 10.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

4-14-37 Base Mounted 38 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ35Stations Port size C Grommet (G) (35) (5.5) 2-4.5 mounting hole 43.5 (11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 34 (7.5) (3) DIN rail clamp screw 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 02: Rc1/4 U side n A 2 A 2 5 Manual override 4 (L4) 3 (L3) L2 L1 2 P = 20 P = 20 19.5 1 23 9 Courtesy

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

2.10-34 VQZ100/200/300 Base Mounted Dimensions: VQZ200 VV3QZ25C Port size Station (35) 38 (11) Grommet (G) 24.5Mounting holes (5.5) 30 (7.5) DIN rail clamp screw n-C4, C6, C8, 01 (3.5) 21.5 C4: One-touch fitting for 4 C6: One-touch fitting for 6 U side C8: One-touch fitting for 8 n 01: Rc(PT)1/8 A 2 A 2 Manual override 5 SY SMC 4 (L4) (L3) SYJ L2 L1 P=16 P=16 15.5 3 2 VK 1 18 VZ Station

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

L1 L2 L3 L4 L n 12 260.5 250 229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 402 Series 10-SZ3000 EX510 Gateway-type Serial

CRQ2

Applicable shaft types: J, X, T W1 = L1 = L3 = X = W2 = L2 = L4 = Y = (mm) (mm) W2 L2 max Y Y Y Y Y W1 L1 max X 2 X 2 X 2.5 X 3 X 3 L4 max L2 1 L2 1 L2 2 L2 2 L2 2 Y 4 to 18 4.5 to 20 6.5 to 30 8.5 to 32 9.5 to 36 L3 max L1 1 L1 1 L1 2 L1 2 L1 2 Size 10 15 20 30 40 X 6 to 18 6.5 to 20 9.5 to 30 11.5 to 32 12.5 to 36 Size 10 15 20 30 40 0.5 to 1.5 0.5 to 1.5 1 to 2 1 to 2 1

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB, CA1 T0425 x 1 m Tube bore x Length VQ0149-C4 Speed controller AS2001F-04 AN103-X233 Silencer Tube bore x Length T0604 x 1 m 30 41 VQ11 -C6 Speed controller AS3001F-06 Silencer AN103-X233 T0806 x 1 m Tube bore x Length VQ2149-C8 Speed controller AS3001F-08 Silencer AN200-KM8

VZ100/300/500

hole) (Pitch) VG (P , R port) VP S070 VQ VKF VQZ 4-M3 x 0.5 depth 4.5 (Bracket mounting screw) VZ VS Stations n L1 L2 20 341 328 17 293 280 18 309 296 19 325 312 16 277 264 13 229 216 14 245 232 15 261 248 12 213 200 9 165 152 10 181 168 11 197 184 8 149 136 5 101 88 6 117 104 7 133 120 4 85 72 2 53 40 3 69 56 VFN L3 16 32 48 64 80 96 112 128 144 160 176 192 208 224 240 256 272 288 304 L4

Table of Contents

VFS C8, C10 2-Rc 1/8 (PE port) VS4 VQ7 EVS C8: Max. 6.5 C10: Max. 7 6-Rc 1/2 (P, EA, EB port) For wiring specifications, refer to page 3-5-8.

Possible to transfer a workpiece at low-speed.

X C8 Specifications Symbol -XC8 to XC11, XC18/XC19 Applicable shaft type S, W, Y Additional Reminders The rotation starting point shows the positions of one flat chamfering and the key groove when pressurized to the connecting port (B). Symbol: C8 Symbol: C9 Symbol: C10 Angle adjustment at the rotation starting point and the end point are at 5. Rotating range is changed.

Vacuum Unit

No. 11 12 13 14 15 16 17 18 19 20 Exploded View y VVQ1000 51A C8 L Dimension 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 Port size L Dimension 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 C8 8 One-touch fitting N9 5/16" One-touch fitting No. 31 32 33 34 35 36 37 38 39 40 L Dimension 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 33 Exploded

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.32 0.24 0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Body ported for internal pilot Base mounted for internal pilot 10-SS5YJ7-20 10-SYJ723 10-SS5YJ7-21 10-SS5YJ7-40 10-SS5YJ7-41 10-SS5YJ7-42-C6 10-SS5YJ7-42-C8

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A port) P=19 21 22.5 9.5 R X R X P P 43 43 71.5 [72.8] 67.5 81.1 35 35 C6: MAX. 6 C8: MAX. 6.5 C6: MAX. 6 C8: MAX. 6.5 (Lead wire length) 300 80.6 [87.1] 300 (Lead wire length) (P/R port) 4-Rc (PT)1/4 57.1 [ ] for AC Other dimensions are the same as the grommet

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N7 N9 G F SA 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 One-touch fitting for NPTF T VA 5 32" One-touch fitting for 1 4" One-touch fitting for SYA5000 One-touch fitting (Metric size) Bracket 5 16" One-touch fitting for VM Symbol Port size Applicable series C4 C6 C4 C6 C8

SYJ300/500/700

Station n L1 L2 3 78 68 Station 20 401 391 6 135 125 8 173 163 10 211 201 Station 2 59 49 4 97 87 5 116 106 7 154 144 9 192 182 11 230 220 12 249 239 13 268 258 14 287 277 15 306 296 16 325 315 17 344 334 18 363 353 19 382 372 4-4-47 48 Series SYJ700 N7 N9 C6 C8 [ ] for AC Type 42 Manifold: Side Ported/SS3YJ7-42Stations -01, , Grommet (G) For (Built-in One-touch fitting) N7 N9 C6, C8,

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 3 78 68 Station 20 401 391 6 135 125 8 173 163 10 211 201 Station 2 59 49 4 97 87 5 116 106 7 154 144 9 192 182 11 230 220 12 249 239 13 268 258 14 287 277 15 306 296 16 325 315 17 344 334 18 363 353 19 382 372 4-4-47 Series SYJ700 N7 N9 C6 C8 [ ] for AC Type 42 Manifold: Side Ported/SS3YJ7-42Stations -01, , Grommet (G) For (Built-in One-touch fitting) N7 N9 C6, C8, 63.5

VQC

Example: -BRS Cylinder port size C4 C6 C8 CM L4 L6 L8 B4 B6 B8 LM With 4 One-touch fitting With 6 One-touch fitting With 8 One-touch fitting Mixed sizes and with port plug Top ported elbow With 4 One-touch fitting Top ported elbow With 6 One-touch fitting Top ported elbow With 8 One-touch fitting Bottom ported elbow With 4 One-touch fitting Bottom ported elbow With 6 One-touch fitting Bottom