Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA)

Micro Mechanical Valve Series VM1000

OFF 45 Max. 6 ON 44 Symbol 3 port 24.5 38 (A) 2 (A) 2 12 12 1 (P) (78.5) 50.5 14.5 3 1.5 1.5 28 5 port (A) 2 (A) 2 12 12 3 (R) 3 (R) 1 (P) 14.5 47.8 37.2 17 R port (5 port only) 3 x 1/8 44 * 0.5 MPa supply F .O.F .* 20 N T.T. 45 6 A Series VM100 Series VM100/Side Ported With bracket VM120-01-A-B VM130-01-A-B VM121-01-A-B VM131-01-A-B With bottom mounting thread VM120U-01-A VM130U-01-A VM121U

Table of Contents

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

ZP

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

ZP

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

ZP

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

VM

only) 0.5 MPa supply L Model A 1.5 mm P.T. 20 N F.O.F. 7.5 VM120-01-00 VM130-01-00 32.5 1.5 mm O.T. 3.5 VM121-01-00 VM131-01-00 28.5 2-4.6 mounting hole 3.0 mm T.T.

1

OFF 45 Max. 6 ON 44 Symbol 2 port 24.5 38 (A) 2 (A) 2 12 12 1 (P) (78.5) 50.5 14.5 3 1.5 1.5 28 3 port (A) 2 (A) 2 12 12 3 (R) 3 (R) 1 (P) 14.5 47.8 37.2 17 R port (5 port only) 3 x 1/8 44 * 0.5 MPa supply F.O.F.* 20 N T.T. 45 INDEX 330 Series VM100 Series VM100/Side Ported With bracket VM120-01-A-B VM130-01-A-B VM121-01-A-B VM131-01-A-B With bottom mounting thread VM120U-01-A VM130U-01-A

2

AD17-A AD27-A AD37-A AD47-A Spacer Y100-A Y200-A Y300-A Y400-A Y500-A Y600-A Spacer with bracket Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Check valve Note 5) Note 6) AKM2000-01-A (02)-A AKM3000-(01)-A 02-A AKM4000-(02)-A 03-A Pressure switch Note 6) IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A IS10M-60-A T-spacer Note 5) Note 6) Y110-M5-A Y210-01-A (02)-A Y310-(01)-A 02-A Y410-(02

Table of Contents

ASS Dimensions ASR AS220M-01 02 AS120M ASF H 8 (Hexagon width across flats) L1 T2 24.8 (MAX. 29.8) 28.2 (MAX. 33.2) M5 x 0.8 L2 A L3 D1 9 10.3 10 M5 x 0.8 10-32 UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 D1 D2 Model Min. Min. Max. Max.

V100

side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve

VM

only) 0.5 MPa supply L Model A 1.5 mm P.T. 20 N F.O.F. 7.5 VM120-01-00 VM130-01-00 32.5 1.5 mm O.T. 3.5 VM121-01-00 VM131-01-00 28.5 2-4.6 mounting hole 3.0 mm T.T.

CATALOG

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

AC

AC ARM 2500 05 A 02 G1 AV Optimal for central pressure control. AU Accessories (Options) Regulator manifold None (with plug) G1 G2 AF G33-10-01 GA33-10-01 Easily set up using the new handle. Also has a One-touch lock system. AR Body size Pressure gauge is attached, not mounted.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

A B D B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5 32 13 63 65 46 68 31.5 43 21.5 75-01-A18 75-01-A18 143 198.5 154 209.5 ZPT50HBJ25-01-A18 ZPT80HBJ25-01-A18 75.5 131 88.5 144 50-01-A18 50-01-A18 110.5 166 123.5 179 50 52 36 54 24 35.5 16.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

number will be VF113c, VF123c. 3-4-5 6 Series VF1000 How to Order Port size (P, A, B) Thread type Only when 01 (1/8) M5 01 M5 x 0.8 Nil F N T Rc G NPT NPTF 1 8 EA, EB port: M5 x 0.8 Option F With bracket Body ported VF1 1 2 1 L 01 0 Not installed when delivered Manifold VF1 1 3 0 1 L 01 Port size (A, B) Body option Type of actuation Coil rated voltage M5 01 M5 x 0.8 Electrical entry 0 Standard

VM

VM430-01-06 VM430-01-06S Polyacetal roller Hard steel roller Cross roller plunger VM430-01-07 VM430-01-07S Toggle lever VM430-01-08 VM-30AR Red VM430-01-30R VM-30AB Black VM430-01-30B Push button (Mushroom) VM-30AG Green VM430-01-30G VM-30AY Yellow VM430-01-30Y VM-32AR Red VM430-01-32R VM-32AB Black VM430-01-32B Push button (Extended) VM-32AG Green VM430-01-32G VM-32AY Yellow With a set

5 Port Solenoid Valve Series SY3000/5000/7000/9000

-01, 1 8 For 8, 5/16" Applicable tubing O.D.: 6, 1/4" (A, B port) One-touch fitting (Pitch) (Pitch) 9 18 P=17.5 9 18 P=17.5 (A, B port) 1/8 7.5 23 7.5 23 B B B B A A A A L2 L1 5 (Pitch) P=17.5 21 + 13.8 15.2 + (4.9) 5.3 7.3 68.1 100.2 [102.4] (For mounting) 4 x 4.5 27.7 20 139.6 [144] 20 20 37.7 66.7 B B P EB EA B B B 127 [131.4] 100.5 A A A A A 16 Manual override (P , EA, EB port) 1/4 +

Table of Contents

02 03 Pressure switch with piping adapter 02 03 04 IS1000E-40 (6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04 Y14-M5 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

Proposals for Energy Saving

VM430-01-32G VM-32AY Yellow VM430-01-32Y A set of Red, Black, Green, and Yellow included.