MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

MHZ2/MHZJ2

A gripping force of 24N is obtained from the intersection point of gripping point distance L = 30mm and pressure of 0.4MPa.

SMC Electronic Switch Series Variations

L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis

V100

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

0.4

VV5Q11 (L4) (L3) L2 (5.25) (12) 13 27 28 L1 Indicator light 63.5 23.5 10.5 (n-1) x 10.5 1.5 Manual override A A A B A B A B A B A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN (35) (5.5) 0 1 DIP SW. 4 x M4 mounting hole 61.5 4.5 Drawing shows a SC case.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(general purpose type) Dust-protected SI unit (L4) (L3) L2 (5.25) (12) 13 27 28 L1 Indicator light 63.5 23.5 10.5 (n-1) x 10.5 1.5 Manual override A A A B A B A B A B A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN (35) (5.5) 0 1 DIP SW. 4 x M4 mounting hole 61.5 4.5 Drawing shows a SC case.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(general purpose type) Dust-protected SI unit (L4) (L3) L2 (5.25) (12) 13 27 28 L1 Indicator light 63.5 23.5 10.5 (n-1) x 10.5 1.5 Manual override A A A B A B A B A B A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN (35) (5.5) 0 1 DIP SW. 4 x M4 mounting hole 61.5 4.5 Drawing shows a SC case.

Series VQ Metal Seal/Rubber Seal Body Ported

direction of the L and M connectors of a pilot valve is opposite to that of the single and double style.

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

1

Set value L = Effective area H = Fixed hysteresis (3 digits) Vacuum Set value Window comparator mode Window comparator mode H H L P2 (n2) P2 (n2) H H L P1 (n1) P1 (n1) 0 0 ON 0 0 ON Time Time Normal mode output Normal mode output OFF OFF Time Time Reverse mode output ON Reverse mode output ON OFF OFF Time Time Caution: Motion differs only for remote controlled high accuracy pressure switch

VQC

SUP block plate VVQ1000-16A EXH shutoff position When using EXH block base (VVQC1000-19A--C ) Note 1) Port plug Note 2) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B With 3.2 (1/8") One-touch fitting C3 (N1) Side port Fill out in case of mixed sizes (CM/LM/NM).

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Fittings & Tubing Air Cylinders Rotary Actuators Side tapped mounting [1/N1] Through-holes in open/close direction [2/N2] 4 x MM through Thread for mounting attachment C C B A 4 x H through Hole for mounting attachment S S O O B A (mm) (mm) MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 C 2 2.5 4 5 H 2.9 3.4 4.5 5.5 B 5.7 7 9 12 B 5.7 7 9 12 Model A 3 4 5 6 Model A 3 4 5 6 11221122112211221 N1

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(Station 1) Light/Surge voltage suppressor Side A: Orange Side B: Green 18.9 (DIN rail dimension) (62.4) ON ON 43.5 OFF OFF (7.5) 34.2 Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5

SY

Models/Series SY5000 Models/Series SY9000 Port size Effective area mm (Cv factor) Weight g Port size Effective area mm (Cv factor) Weight g Valve model Type of actuation Valve model Type of actuation Grommet DIN terminal L/M type plug connector 67 70 82 89 Grommet DIN terminal L/M type plug connector 238 242 254 262 P, EA, EB P to A/B A/B to EA/EB P, EA, EB P to A/B A/B to EA/EB A, B A, B

Series VQ Base Mounted Metal Seal/Rubber Seal

Port plug VVQ0-58A VFR The plug is used to block the cylinder port when using a 4 port valve as a 3 port valve. VP7 VP4 When ordering assemblies incorporated with a manifold, indicate L or B for the manifold port size. Elbow fitting assembly VVQ1000-F-L VQ C3 C4 C6 M5 VQ4 It is used for piping that extends upward or downward from the manifold.

CRB2/CRBU2/CRB1

ti g ot 9 a t 0 e o Key t 0 0 o r 2 r r 8 y +4 0 y +4 0 0 e y e e K +4 0 K K +4 0 Key Key 0 0 (40) 1 Key e g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Screw Model CRB1BW 50 CRB1BW 63 CRB1BW 80 CRB1BW100 L M6 48 M8 52 M8 60 M10 80 68 Rotary Actuator Vane Type Series CRB1 Rotary Actuator with Built-in

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Auto switch type Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.