SMC Corporation of America
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L/min) For Option MT: 0.32 (at 10 L/min)/0.32 (at 14 L/min) Circulating fluid system Rated flow (50/60 Hz)7 [L/min] 7/7 For Options T, MT: 10/14 Flow display range20 [L/min] 2 to 16 Electric conductivity display range [S/cm] 0.1 to 48 (Only for Option DM) Electric conductivity setting range [S/cm] 0.5 to 45 (Only for Option DM) Particle filter nominal filtration rating19 [m] 5 Bypass valve19

The cooling capacity required for the oscillator is, 20 [kW] 6 [kW] = 14 [kW] Considering a safety factor of 20%, 14 [kW] x 1.2 = 16.8 [kW] r Calculate based on the laser output. Laser output power 6 [kW], conversion efficiency 30% The oscillators power consumption is, 6 [kW] 0.3 = 20 [kW] Example 2: When the heat generation amount in the users equipment is not known.

If the voltage increase ratio (dV/dt) at the zero cross should exceed 40 V/200 sec., it may result in malfunction. 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Max.

Cooling Capacity HRS100-A-20/40(50 Hz) HRS100-A-20/40(60 Hz) 14 14 12 12 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 40C Ambient temperature 32C Ambient temperature 40C 8 8 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature

Rod end nut Seal washe. r'ratanalr CorB sht Rolld sle6l Seal-NBF '142 lnder 1 4 Qoriac flTre 14 14 hltn.lal k C1\ | 2o3 Port valves for vacuum use . . . . . .14 Series KJ, Series I Tl KQ, rV-3, M5. . . . 14 14 tTV0090,tTV2090 ...tso 143 Vacuum Regulator series lRVl 000/2000/3000 Standard Specifications Model rRvlooo I rRvzno .ii I :lRv3qqot ,,l Regulaiing pressure range Nole 1 -100 to -1.3kPa

for Lasers Water-cooled refrigeration Air-cooled refrigeration Thermo-chiller HRLE Series How to Order/Specifications Air-cooled refrigeration . p. 9 Water-cooled refrigeration . p. 11 Cooling Capacity. p. 13 Pump Capacity. p. 13 Dimensions. . p. 14 Parts Description. p. 14 Recommended External Piping Flow. . p. 16 Cable Specifications. p. 16 Operation Display Panel. . p. 17 Alarm. p. 17

When deionized water is used, the electric conductivity should be 1 mS/cm or higher (Electric resistivity: 1 Mcm or lower). 30 min 20 min 14 min 10 min 6 min 4 min Facility Water Supply 2 min 1 min Warning Operating time 30 s 20 s Max. 1. The water-cooled refrigeration type thermo-chiller radiates heat to the facility water.

No anchor bolt is included. 139 A HRSH090 Series Inverter Type * If the product is used at altitude of 1000 m or higher, refer to Operating Environment/ Storage Environment (page 151) Item 14 * For altitude of 1000 m or higher.

14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.

$ ) VX3 Series VVX32 VXA VN LVC LVA LVH Series VVX31 LVD Variations LVQ Electrical entry Valve LQ * + * %( * #, * %( % LVN " . " . TI/ TIL " " Material PA " $ % % .(( !"

Reset the accumulated time here. 14 Anti-freezing function Circulating fluid is protected from freezing during winter or at night. Set beforehand if there is a risk of freezing. i [ ] lamp Equipped with a timer for start and stop.

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

KFG2 MS KKA KP LQ MQR T IDK 165 KS Series Male Connector: KSH (Standard) H (Width across flats) Effective area (mm2) Applicable tubing O.D.

nylon tube polyurethane tube Body rotates at 360 around the stud axis 3.18/2.18 x M5 6/4 x M5 MS-5H-6 MS-5ATHU-3 KA 3.18/2 x M5 P.338 KQG2 Hose elbow For nylon, soft nylon, and polyurethane tube Body rotates at 360 around the stud axis 4/2.5 x M5 4/2.5 x M5 MS-5HLH-4 MS-5ATHU-4 For soft nylon and polyurethane tube KG KFG2 6/4 x M5 6/4 x M5 MS-5ATHU-6 MS-5HLH-6 MS MS P.338 P.339 KKA KP LQ

M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 76 64 52 37 7.5 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14

2 VX3 ) VXA How to Order VN VXH2230 02 1 G LVC LVA Bracket Nil B 3 -B JIS Symbol LVH LVD Valve/Body 0 3 ' +0 Electrical option Nil 3 LVQ S ( L LQ Z + ( Port size 6 ( 2 (-' LVN 02 03 04 6 +" 6 &+$ 6 +! TI/ TIL Electrical entry G 8 PA Rated voltage C ) 2 ! >) +# = 1 >) +# = D 543 PAX T ) 3 >) +# = 6 ( 4 !! >) +# = PB 7 !"

Rated Flow Range: 06 (60 to 6000 l/min), Thread Type: Rc, Port Size: 14 (1 1/2), Output Specifications: DS (Out: NPN; Func: Analog Current Output <-> External Input)

Rated Flow Range: 06 (60 to 6000 l/min), Thread Type: Rc, Port Size: 14 (1 1/2), Output Specifications: FS (Out: PNP; Func: Analog Current Output <-> External Input)

Rated Flow Range: 06 (60 to 6000 l/min), Thread Type: Rc, Port Size: 14 (1 1/2), Output Specifications: ES (Out: PNP; Func: Analog Voltage Ouput <-> External Input)

Rated Flow Range: 06 (60 to 6000 l/min), Thread Type: Rc, Port Size: 14 (1 1/2), Output Specifications: ES (Out: PNP; Func: Analog Voltage Ouput <-> External Input), Lead Wire: N (w/o Lead Wire and M12 Connector)