ITV

Within 0.2% (Full span) Within 0.12% (Full span)/C Temperature characteristics 0 to 50C (With no condensation) Operating temperature range IP65 equivalent Enclosure Connection type Built-in One-touch fittings z, x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Compact and Lightweight

Therefore, use a spacer with a thickness 1 or above. Applicable model t ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 2 Minimum C Factor of a Supply Valve Model C[dm3/(sbar)] ZH05A 0.12 ZH07A 0.23 ZH10A 0.47 ZH13A 0.80 ZH15A 1.06 ZH18A 1.53 ZH20A 1.88 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 1 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 t 2.

Tamper Proof and Flat Head Screw

40.7 18 1.5 36.7 AS22 0-N02-ST NPT 1/4 17.5 NPT 1/4 AS32 0-02-ST Rc 1/4 19 22.5 R 1/4 AS32 0-F02-ST PF 1/4 24.3 9.5 30 55.3 22.4 1.5 49.3 AS32 0-N02-ST NPT 1/4 NPT 1/4 AS32 0-03-ST Rc 3/8 19 22.5 R 3/8 AS32 0-F03-ST PF 3/8 24.3 9.5 30 53.7 20.8 1.5 47.7 AS32 0-N03-ST NPT 3/8 NPT 3/8 AS42 0-04-ST Rc 1/2 24 27.5 R 1/2 AS42 0-F04-ST PF 1/2 28.5 12 38.5 63.8 26.7 1.5 55.8 AS42 0-N04-ST NPT 1

Stainless Steel 316 Fittings

KFG2V0122-N01 KFG2V0122-N02 KFG2V0325-N01 KFG2V0325-N02 KFG2V0704-N01 KFG2V0704-N02 KFG2V0906-N01 KFG2V0906-N02 KFG2V0906-N03 KFG2V1163-N02 KFG2V1163-N03 KFG2V1163-N04 KFG2V1395-N02 KFG2V1395-N03 KFG2V1395-N04 Applicable tube 12 14 12 14 12 14 12 14 19 14 19 22 14 19 22 11 19 11 19 16 25 23 31 45 38 51 75 46 59 83 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 16.1 19.8 16.1

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

Pressure Relief 3 Port Valve with Locking Holes

Example) VHS30-N03-RZ-D Symbol Description Body size 20 30 40 Thread type Nil Rc*1 N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Nil Flow direction: Left to right a Flow direction Semi-standard R Flow direction: Right to left Nil Name plate in imperial units: MPa b Pressure unit Z*2 Name plate in imperial units: psi *3 *3 *3 *1 EXH port thread type: G *2 For thread type: NPT This product

ISG

Note) Not available for ISG 19/29 type Material Port size 0 1 Copper alloy Stainless steel 316 R 3/8 NPT 3/8 03 N03 Other Operating Environment Caution 1. Never use in an environment, where flammable fluids or gases are used. Since this product is not explosion-proof and may trigger an explosive disaster. 1. Bellows assembly is available for maintenance.

VH Series, 4 Way Hand Valve

(Exhaust center) 1/4" 17(0.9) Exhaust center VH302-N02, N03 VH312-N02, N03 2 (Position) 2 1 1.56 (0.71) (A) 2 (B) 4 VH3 1/4", 3/8" VH320-N02, N03 VH330-N02, N03 3 (Closed center) 3/8" 20(1.1) 1 (P) 3 (R) VH321-N02, N03 VH331-N02, N03 3 (Exhaust center) VH322-N02, N03 VH332-N02, N03 2 1 3 4 2 (Position) VH400-N02 to N06 VH410-N02 to N06 3 (Closed center) 1/4" 45(2.5) 4 3 VH401-N02 to N06 VH411

ISG

Note) Not available for ISG 19/29 type Material Port size 0 1 Copper alloy Stainless steel 316 R 3/8 NPT 3/8 03 N03 Other Operating Environment Caution 1. Never use in an environment, where flammable fluids or gases are used. Since this product is not explosion-proof and may trigger an explosive disaster. 1. Bellows assembly is available for maintenance.

Dual Speed Controller with One-touch Fitting Series ASD

Port size 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 x 0.8 R 1/8 R 1/4 R 1/4 R 3/8 R 1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

NPT 1/4 AS321F-N03 AS331F-N03 NPT 3/8 AS421F-N04 AS431F-N04 NPT 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

AS331F-N02 NPT 1/4 AS321F-N03 AS331F-N03 NPT 3/8 AS421F-N04 AS431F-N04 NPT 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 16 Construction AS2200

44

KFG2H0122-N01 KFG2H0122-N02 KFG2H0325-N01 KFG2H0325-N02 KFG2H0704-N01 KFG2H0704-N02 KFG2H0906-N01 KFG2H0906-N02 KFG2H0906-N03 KFG2H1163-N02 KFG2H1163-N03 KFG2H1163-N04 KFG2H1395-N02 KFG2H1395-N03 KFG2H1395-N04 KQ2 16.2 19.4 16.2 19.4 17.9 21.1 20.1 22.3 23.6 25.3 25.6 27.1 27.1 27.2 28.7 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 12 14 12 14 12 14 19.4 23.8 19.4 23.8 21.1

AS-FG/ASD-FG

ASD330FG-01 R(PT) 1/8 ASD430FG-02 R(PT) 1/4 ASD530FG-02 R(PT) 1/4 ASD530FG-03 R(PT) 3/8 ASD630FG-04 R(PT) 1/2 ASD230FG-U10/32 10-32 UNF ASD330FG-N01 NPT 1/8 ASD430FG-N02 NPT 1/4 ASD530FG-N02 NPT 1/4 ASD530FG-N03 NPT 3/8 ASD630FG-N04 NPT 1/2 Specifications 1.5MPa Proof pressure JIS symbol 1MPa Maximum operating pressure Minimum operating pressure 0.1MPa Ambient & fluid temperature 5 to

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS321FG-N02 NPT 1/4 AS331FG-N03 AS321FG-N03 NPT 3/8 AS431FG-N04 AS421FG-N04 NPT 1/2 Note 1) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size Model Port size 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" ASD230FG-M5 M5 x 0.8 ASD330FG-01 R 1/8 ASD430FG-02 R 1/4 ASD530FG-02 R 1/4 ASD530FG-03 R 3/8 ASD630FG-04 R 1/2 ASD230FG-U10/32 10-32 UNF ASD330FG-N01 NPT 1/8 ASD430FG-N02 NPT 1/4 ASD530FG-N02 NPT 1/4 ASD530FG-N03 NPT 3/8 ASD630FG-N04 NPT 1/2 Specifications Air Fluid 1.5 MPa Proof pressure 1 MPa Max.

NAIV

(g) 120 1 1 0 100 90 80 l|AN20002 U1 35 (1.9) .04 (17) NAN3OO-N03 % 60 (3.3) .06 t25) NANtrco+to4 90 (5.0) .08 (35) 60 NAN50(rN0,6 3A 160 (8.8) .36 (165) NAN6OO.NI O 1 27O llsl .46 e25) NAN700+i12 1]4 444 Q4l 1 .87 (4901 Supply pressure: 7l PSI Distance from silencer: NAN200-500-) 31t NAN6O0-7OO+ 6.5fi MN800_900 ,10f1 NANSOO-N,'4 1\h 590 (33) 2.21 (580) NANgOO-N2O 2 960 (53) 3.13 (820) Construction