Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

PSxx-OMV0003CN

] 39 <> UPDOWN[F10] SET UP DOWN 2 OFF (OUT1) (OUT2) [dUAL]2 SET () [LinE] SET () () 40 () UP DOWN () SET , (SET ) SET () [dUAL]2 SET () AbY(Z) 40 () 019 ( ) UP DOWN / () SET 1 () SET SET [F10] -38No.PS-OMV0003CN-G <> UPDOWN (OFF) OUT1 OUT1 OUT2 OUT2 ( OFF ) (n_1) n_2 OFF [F10 ] () () OUT1 OUT1 OUT1 OUT2 OUT2 OUT2 () () (n1L) (n1H) n2L n2H [

PSxx-OMV0008CN

] 42 <> UPDOWN[F10] SET UP DOWN 2 OFF (OUT2) (OUT1) [dUAL]2 SET () [LinE] SET () () Line 43 () UP DOWN Line () SET , Line (SET ) SET () [dUAL]2 SET () AbY(Z) 43 () 019 ( ) UP DOWN /() SET 1 Line (Line ) SET SET [F10] -41No.PS-OMV0008CN-E <> UPDOWN (OFF) OUT1 OUT1 OUT2 OUT2 ( OFF ) OFF (n_1) n_2 [F10 ] () () OUT1 OUT1 OUT1 OUT2 OUT2 OUT2 (

PFxx-OMS0001CN

[F 2] OUT2 OUT1 -41No.PF-OMS0001CN-A [F 3] <> [F 3] [RES][] [rES] [] [F 3] -42No.PF-OMS0001CN-A [F10] OUT1 OUT2 OUT1 OUT2 OFF <> [F10] [SUb][] [SUb] [] [F10] -43No.PF-OMS0001CN-A <> a. 500L/min =P_1 =N_1 =P1L =P1H =N1L =N1H -44No.PF-OMS0001CN-A <()> b. 9 L 3 1.5 6 3 9 L 9 F30(49 ) + 1 =0 =0 F20(47 ) 9 L 3 1.5 6 3 9 L 6 0 0 F30(49 ) + 1 = = 47 F20 -45No.PF-OMS0001CN-A

PF-OMM0004_C

[F 2] OUT2 c()F( oF)() -40No.PF-OMM0004-D -41No.PF-OMM0004-D [F 3] [F 3] [RES] [F3] 7 s -42No.PF-OMM0004-D [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] [F10] -43No.PF-OMM0004-D -44No.PF-OMM0004-D 9L 3 1.5s6 3s 9L [9] [F30] 1S =0 =0 [F20]45 9L 3 1.5s6 3s 9L 6 0 [0] [F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20

LV50-OMQ0002

[F10] Sub screen Page 41 Flow direction [F20] External input Page 45 [F22] Analogue output Page 46 Free range analogue output for instantaneous flow: OFF [F30] Accumulated value display Page 47 OFF [F32] Setting of flow direction / back flow detection function.

LFE-OMY0008

[F 2] OUT2 39 No.LFE*-OMY0008 [F3] [F 3] [RES] [F 3] 40 No.LFE*-OMY0008 [F10] OUT1 (OUT2 ) OUT1 (OUT2 ) () OFF [F10] [SUb] OFF OFF OFF OFF [F10] 41 No.LFE*-OMY0008 (20 L/min ) (=P_1 ) (=N_1 ) (=P1L ) (=P1H ) (=N1L ) (=N1H ) 42 No.LFE*-OMY0008 ( ( ( ( ) ) ) ) 9L3 (1.5S)6 (3S) 9L(9) () + 1 (0) 9L 3 (1.5S)6 (3S) 9L 6 0 [0] () + 1 () (=)(=) 1 / 43 No.LFE*-OMY0008 ( ( ( ( ) )

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

PFxx-OMO0004CN

[F 2] OUT2 OUT1 -43No.PF-OMO0004CN-E [F 3] <> [F 3] [F 3][rES] [rES][] [F 3] -44No.PF-OMO0004CN-E [F10] <> [F10] [F10][FLo] [FLo][] [F10] 3) 9 L(9.9 ft 3 3 3 50 L 60,008 L 203,481,019 L (57 ) (47 ) ((49 )) -45No.PF-OMO0004CN-E [F13] ON <> [F13] [F13][rEv] [rEv][] ON OFF() ON() [F13] -46No.PF-OMO0004CN-E [F20] [---] =00 = ONEEPROM 100+100 OFF <> [F20] [F20]

PFxx-OMP0001CN

[F 2] OUT2 OUT1 -40No.PF-OMP0001CN-F [F 3] <> [F 3] [F 3][rES] [rES][] [F 3] -41No.PF-OMP0001CN-F [F10] <> [F10] [F10][FLo] [FLo][] [F10] 3) 90 L(9 ft 3 3 3 50 L 60,010 L 203,481,020 L (54 ) (44 ) ((46 )) -42No.PF-OMP0001CN-F [F13] ON <> [F13] [F13][rEv] [rEv][] ON OFF() ON() [F13] -43No.PF-OMP0001CN-F [F20] [---] =00 = ONEEPROM 100+100 OFF <> [F20] [F20][inP] [inP

MB

Bore size (mm) 32 40 50 63 80 100 125 Note 1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 MB-L12 Foot MB-F03 MB-F04 MB-F05 MB-F06 MB-F08 MB-F10 MB-F12 Flange MB-C03 MB-C04 MB-C05 MB-C06 MB-C08 MB-C10 MB-C12 Single clevis Double clevis MB-D03 MB-D04 MB-D05 MB-D06 MB-D08 MB-D10 MB-D12 Note 1) Two foot brackets required for one cylinder.

PFxx-OMJ0005CN

] OFF 25 100 24 551005009.5 221002003.8 <> [F10] [EEP] OFF 5 2 [F10] -38No.PF-OMJ0005CN-I [F11] OFF [---] <> [F11] [AFL] 1.5s 100ms [F11] -39No.PF-OMJ0005CN-I [F12] 30 <> [F12] [ECo] [F12] 30 () -40No.PF-OMJ0005CN-I [F13] 46 <> [F13] [Pin] [F13] -41No.PF-OMJ0005CN-I [F98] <> [F98] [ALL] [on] [oFF] [oFF] [F98] -42No.PF-OMJ0005CN-I 1 2 (OUT1) 3 (OUT1) 4 (UT1)

4-channel Flow Monitor ( compatible)

(page 35 and 40) -42No.PF-OMA1011-A [F10] Sub display setting Change the display style of the sub display. Detailed contents are shown in the pages from 44. Press the UP or DOWN button in function selection mode to display [F10]. Press the SET button. Move on to the sub display setting.

10

DBore size [mm] 32 40 50 63 80 100 -X Axial foot MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Rod flange MB-F03 MB-F04 MB-F05 MB-F06 MB-F08 MB-F10 Technical Data Note) Order two foots per cylinder. 413 MBKW Series Theoretical Force OUT (Unit: N) IN Bore size [mm] Rod dia.

PSxx-OMM0002CN

] <> [F10] [Pin] [F10] 000 40 -35No.PS-OMM0002CN-F [F98] <> [F98] [ALL] [on] 1 [oFF] [oFF] 2 [F98] 1 37 -36No.PS-OMM0002CN-F 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 7 OUT2 8 OUT2 -N-P 9 OUT2 10 OUT2 11 12 -R-S-T-V 13 14 15 16 17 18 19 20 2 -37No.PS-OMM0002CN-F [F99] <> [F99] [ON] 5 [oFF] [F99] -38No.PS-OMM0002CN-F / ()() 1 "Hi" 1 1 "

PSxx-OMT0001CN

() (OFF) (OFF) (OFF) (ON) (ON) () -43No.PS-OMT0001CN-E 4 30 [F10](56 ) SUP SUP 1 2 OUT1 OUT SUP OFF 1 2 SUP SUP () 1 SUP SUP () 2 SUP SUP () 2 OUT OUT () 1 OFF 1 SUP OUT , 1 [0 kPa] 2/ SUP / 1 ,/ -44No.PS-OMT0001CN-E 4 OUT1OUT2/ OUT1OUT2/ (50 ) ,OUT2 ()(52 ) OUT1 OUT1 ISA3-F () () ISA3-G () () ISA3-H () () ON() OFF() -45No.PS-OMT0001CN-E 4 OUT2 , (OUT