.: 32mm, Output Specification: OUT1: PNP; OUT2: Analog 1 to 5V, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Port Size, Pipe O.D.: Port Size: 25A, Pipe O.D.: 32mm, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Port Size, Pipe O.D.: Port Size: 25A, Pipe O.D.: 32mm, Output Specification: OUT1: PNP; OUT2: Analog 4 to 20mA, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

.: 32mm), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 11 (10 to 100 L/min), Port Size, Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: D (OUT1: NPN; OUT2: Analog 4 to 20mA), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 11 (10 to 100 L/min), Port Size, Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: R (Bracket)

Table of Contents

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 3 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

ZP

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 3 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

V

8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering

CU

Note Hard anodized Kit components CU20A-PS 20 1 Aluminum alloy 1 CU25A-PS 25 1 Hard anodized Aluminum alloy 2 Rod cover/Bearing 13, 14, and 15 CU32A-PS 32 1 Clear chromated Aluminum alloy 3 Head cover 1 Chromated Aluminum alloy 4 Piston 1 Stainless steel 5 Piston rod 1 Phosphate coated Carbon tool steel 6 Snap ring 1 Nickel plated Carbon steel 7 Rod end nut (2) 8 Cushion needle assembly

Table of Contents

1 3 7 Stroke 3 + Stroke 7 CUJ CU CQS Note 1) Solid state switch: D-M9 includes one auto switch.

Free-Mounting Cylinder with Air Cushion Series CU

Note Hard anodized Kit components CU20A-PS 20 1 Aluminum alloy 1 CU25A-PS 25 1 Hard anodized Aluminum alloy 2 Rod cover/Bearing 13, 14, and 15 CU32A-PS 32 1 Clear chromated Aluminum alloy 3 Head cover 1 Chromated Aluminum alloy 4 Piston 1 Stainless steel 5 Piston rod 1 Phosphate coated Carbon tool steel 6 Snap ring 1 Nickel plated Carbon steel 7 Rod end nut (2) 8 Cushion needle assembly

P

ZR ZM Symbol 1 Pad dia. 02 to 08 ZH 2 10 to 16 3 20 to 32 4 40, 50 ZU ZL T 1 ZP A5 [qAdaptor] ZF ZP With Buffer ZCU Vacuum related T ZP 16 K20 A10 06 UGN [Pad model no.] Symbol Thread dia. 1 A8 Buffer connection thread Symbol Pad dia. 2 A10 2 10 to 16 B5 3 20 to 32 3 A14 4 40, 50 B8 T 2 ZP B5 [qAdaptor] Not used for 02 to 08 diameter.

smcmaintenancepartslist

1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Actuators Modular F.R.L.

1

1 SY 3 5 1 0 0 1 Base mounted !

AC Servo Motor Driver (MECHATROLINK-III type)

.1 A.8A5 External Encoder Overheated Gr.1 A.8A6 Regeneration Error Gr.1 A.B31 Current Detection Error 1 Gr.1 A.B32 Current Detection Error 2 Gr.1 A.B33 Current Detection Error 3 Gr.1 A.B6A MECHATROLINK Communications ASIC Error 1 Gr.1 A.B6B MECHATROLINK Communications ASIC Error 2 Gr.2 A.BF0 System Alarm 0 Gr.1 A.BF1 System Alarm 1 Gr.1 A.BF2 System Alarm 2 Gr.1 A.BF3 System Alarm