ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

Vacuum

OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

ZP

Elliptic pad 2.

Table of Contents

2 Rod seal NBR !

CU

2 Carbon steel 9 Steel ball 1 Magnetic material 10 Magnet A F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm

V

0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering Courtesy of Steven Engineering, Inc. !

Free-Mounting Cylinder with Air Cushion Series CU

2 Carbon steel 9 Steel ball 1 Magnetic material 10 Magnet A F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (

P

Symbol Thread dia. 1 A8 Adaptor connection thread Symbol Pad dia. 1 02 to 08 2 A10 B5 3 A14 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] S ZP 06 B5 R [wR type adaptor] Adapter connection thread Symbol S Pad dia. 02 to 16 Pad dia.

Flow ranges (lpm): 10-100; Port sizes: 25A (32mm O.D.) ; Temperature rating: 0-70°C; Output options: NPN/PNP, (switch); 1-5V, 4-20mA; Accuracy: ±3% F.S.; Repeatability: ±2% F.S.

BACKET FOR PF3W511

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: 2 (OUT1: Analog 4 to 20mA)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 06 (3/4), Output Specification: 2 (OUT1: Analog 4 to 20mA)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 10 (1), Output Specification: 2 (OUT1: Analog 4 to 20mA)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 10 (1), Output Specification: 2 (OUT1: Analog 4 to 20mA)

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 1, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

type, DIGITAL FLOW SWITCH, INSTRUMENTATION, IFW/PFW FLOW SWITCH, 2X, IFW/PFW NO SIZE ALL OTHER, 1.87392 lb, ModelApplicable fluidDetection methodRated flow rangeFluid temperatureAccuracyRepeatabilityTemperature characteristicsOperating pressure range Note 2)Proof pressure Note 2)Pressure lossAnalog outputIndicator lightPower supply voltageCurrent consumptionEnvironmentStandards and