Regulator Unit Combination: Filter Regulator, Port Size: Rc3/8, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug

Port Plug), Size of Body: 30, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: 0.02 to 0.2 MPa, Drain Outlet: N/A, Lubricator Oil Discharge Outlet: Without drain cock, Pressure Unit: Name plate and pressure gauge unit: MPa, T shape spacer: None

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 03 (3/8), Option: Standard, Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 03 (3/8), Option: Standard, Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: 1 (0.02 to 0.2MPa Setting)

Body Size: 25, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: 1 (0.02 to 0.2MPa Setting)

Body Size: 30, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: 1 (0.02 to 0.2MPa Setting)

Body Size: 30A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: Standard, Attachment: Standard, Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: Standard

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 3/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control Side

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 3/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control Side

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 3/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control Side

Certificate: A (Calibration Certificate), Made to Order: X128 (Analog 4 to 20mA 2 Output Type)

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: Calibration

2

03-A 02-A IS10E-3003-A 04-A Cross spacer Note 6) Y14-M5-A Y24-01-A 02-A Y34-01-A 02-A Y44-02-A 03-A Y54-03-A 04-A Note 1) in part numbers for a round pressure gauge indicates a pipe thread type.

Table of Contents

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

AC

02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%

CATALOG

02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering Courtesy of Steven Engineering, Inc. !

Table of Contents

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

Table of Contents

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

Table of Contents

Manifold material PFA Tubing size 1 2 ... Stations Orifice diameter 1/4 3/8 1/2 3/4 Valve type Symbol Type 4 8 10 16 Basic type N.C. P P P PA PB PA Stations are counted from station 1 on the left side, with the A (OUT) ports in front. PB A A A PA N.O. PB PA PB A A A Double acting N.C. N.O. Double acting A (OUT) port LLC2A-03-S11 1set 1 set Manifold base part no.