Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 3/8, Output Specification: OUT1: PNP; OUT2: Analog 4 to 20mA, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 3/8, Output Specification: OUT1: PNP; OUT2: PNP, Temperature Sensor: Temperature Sensor, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 03 (3/8), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Magnetically Coupled Rodless Cylinder

Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 3. Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data K A .

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 3. Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data K A .

XL

) Max 10.5 (except connector) XLDV-40 to 80/With solenoid valve C M Fn (KF flange) Fd (K flange) C Port R (exhaust port) Solenoid valve for initial exhaust N Solenoid valve for main exhaust B 8.5 8.5 A G A Port P (pressure port) (mm) N M G Fn C B A Fd K Model XLDV-25 50 123 48 40 26 6.5 12 12 54.5 58.5 73.2 83.6 41 52 70 83 95 110 55 75 87 114 66 79 100 117 170 183 217 256 65 70 88 90

High Vacuum Angle Valve, XL Series

) Max 10.5 (except connector) XLDV-40 to 80/With solenoid valve C M Fn (KF flange) Fd (K flange) C Port R (exhaust port) Solenoid valve for initial exhaust N Solenoid valve for main exhaust B 8.5 8.5 A G A Port P (pressure port) (mm) N M G Fn C B A Fd K Model XLDV-25 50 123 48 40 26 6.5 12 12 54.5 58.5 73.2 83.6 41 52 70 83 95 110 55 75 87 114 66 79 100 117 170 183 217 256 65 70 88 90

1

m is number of I/O Units.

Industrial Filters

(m) Nominal filtration accuracy (m) Symbol Symbol FN V N T A Bronze Stainless steel Polypropylene Glass fiber Cotton (Fiber) Cotton (Paper) Element material Fiber (Honeycomb) 050 070 074 075 100 105 120 X50 001 002 005 010 020 040 50 70 74 75 100 105 120 0.5 1 2 5 10 20 40 B S T G H P M L J EB ES Paper Micromesh HEPO 2 Stainless steel 304/Epoxy Stainless steel 316 Polyester/PP Note) For

Table of Contents

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

Bag Filter

FQ1 FN Specifications EB ES FGFA FGFB Coolant (oil-based, water-soluble), Weak alkali-based cleaning fluid, Industrial water 5, 10, 25, 50, 100 m (standard element), 500 to 1000 m (sub-element) Max. 80C Max. 400 L/min Differential pressure 0.1 MPa Polyester (standard element), Vinylidene chloride (sub-element) 190 x L440 1800 cm2 190 x L770 3400 cm2 Applicable model Main applicable fluid

10

Bore size [mm] Dd9 L l m d Part no.

MB

Lead wire length symbols: 0.5 m Nil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z Besides the above models, there are some other auto switches that are applicable.

Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

99

4 m 6 m 13 m Filtration efficiency 99% FQ1 HEPO 2 FGH100 to 300 FN The membrane element cannot be selected for FGH100.

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: F (G), Port Size: 03 (3/8), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order Caution Be sure to read before handling. Refer to front matter 56 for Safety Instructions and pages 468 to 471 for Flow Control Equipment Precautions.

MU

Nil (Example) A73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN Solid state switches marked with are produced upon receipt of order.