E-P HYREG ® Series VY1 1

20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY11300 1 VY1400 1 VY1500 1 1 1 1 0.8 0.8 0.8 A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2

LEC-OM02704CN

A 1 () () A 2 LECSCSeries/ / *3) 1 1.5 3) 1 1 () A 3 1. 15P()-N() 2. L1L2L3(MC) (MC) 3. () () A 4 4.

Series PF2W Digital Flow Switch For Water

A current of more than 80 mA is flowing to OUT1. Note 2) Check the load and the wiring for OUT2. A current of more than 80 mA is flowing to OUT2. Note 1) The set data has changed for some reason. Perform the RESET operation, and reset all the data again. Note 2) Note 1) The flow rate is over the flow rate measurement range.

VFS

48 VAC/DC: 40 mA 100 VAC/DC: 20 mA VS4 Max. switch capacity Note 1) Voltage: 24 VDC to 100 VAC Inner voltage drop: 4 V Note 2) Combination of a valve VFS41 (single) and a release valve spacer can be used as an air release valve.

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

by connecting it to a P/A remote type display unit Series PF2W3.

Vacuum System Peripherals:

3 3 8 1.1 M V VX3334 -03 M V 4 VX3244 -03 1.6 M V VX3344 -03 For Vacuum Pad Orifice dia.

VQ5000

4 (B) 2 (A) 4 (B) 2 1 W DC (42 mA), 0.5 W DC (21 mA) (3) 24 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) Note (3) 12 VDC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Power consumption (Current) 3 position pressure center 2 position double (Metal) Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 110 VAC (A) 4 (B) 2 (A) 4 (B) 2 Inrush 2.4 VA (12 mA

LEC-OM07605CN

A b . A b . A 1 2 3 1 b012 Ab. 0 1 b b . A b .

MB

C0.5 file chamfer AL B MM R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 30 C 30 DA DA C0.5 R sphere DA DA C AL MM 30 A H T W1 A H C A H H Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 DA MM 30 AL MM 30 H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 DA 30 30 DA L RD 30 MM 30 MM MM DB DB T T C B A H A A A L K H W H H

Modular F.R.L. Units

-03-A (04)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve 6 VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter 6 E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06-A 10-A 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter 6 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Cross spacer 6 Y14

E-P HYREG

Port 2 (A) pressure (MPa) Port 2 (A) pressure (MPa) 0.8 0.8 0.8 0.7 0.7 0.7 0.6 0.6 0.6 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 VY1D00-5 VY1B0-5 VY120-5 1 0 1 2 3 4 5 0 1 2 3 4 5 V V V 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 2 2

Table of Contents

Note 3) When selecting a power supply voltage, refer to How to Order on page 2. Note 4) Install a circuit breaker with a sensitivity of 30 mA or less.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port} VQZ200 VQZ300 Symbol Port size V100 Nil Without sub-plate Rc 1/8 Rc 1/4 Rc 3/8 01 02 03 SY Type of actuation SYJ (A) 2 N.C.

Proposals for Energy Saving

(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

IR1000/2000/3000

When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.

Table of Contents

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

Modular F.R.L. Unit

-4004 03 04 04 with piping adapter 06 Note 6) Y24-01 Y34-01 Y34-01 Y44-02 Y54-03 Cross interface Y14-M5 02 02 02 03 04 Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

7ND9071en

: 16 V DC, Ii: 52 mA 2 2-wire, AC voltage proximity switches: I32 OMRON E2E-X2Y1 U: 24-240 V AC, Imax: 200 mA 2 Dual module type proximity switches:: D33 SST Dual Module, NO 2 A 8-125 V DC, 24-125 V AC 1 D44 Namur Dual Module 3 mA; 1 mA, 6-29 V DC 1 DC/AC voltage micro switches: K05 OMRON D2VW-5 3 A 250 V AC, 0.4 A 125 V DC, 5 A 30 V DC 2 Number of switches: 2 Protection class of housing: