Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes]

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes]

Stations: 5 Stations, Piping: U Side: Closed; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 2 to 16 L/min, Return Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Supply/Return Port Size: 1/2, Return Unit Flow Switch Output Specifications: L2 [Out 1: IO-Link/Switch Output (N/

Stations: 5 Stations, Piping: U Side: Closed; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 2 to 16 L/min, Return Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Supply/Return Port Size: 1/2, Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N

Stations: 7 Stations, Piping: U Side: Closed; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 2 to 16 L/min, Return Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Supply/Return Port Size: 1/2, Return Unit Flow Switch Output Specifications: L2 [Out 1: IO-Link/Switch Output (N/

Stations: 7 Stations, Piping: U Side: Closed; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 2 to 16 L/min, Return Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Supply/Return Port Size: 1/2, Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N

Stations: 5 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 2 to 16 L/min, Return Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Supply/Return Port Size: 1/2, Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P)

2

Lock button INDEX 224 Series AC10-A Series AC20-B to AC60-B Dimensions AC10-A S N A F M J R B C V Q2 Q1 Q1 IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC20-B S N A F M J R B C Q2 V Q1 Q1 K IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC25-B to AC60-B N A F S J M R V Q1 Q1 B C K OUT IN 2 x P1 (Port

CATALOG

B O L S ADH4 00 04 T H R E A D .Rc(PT) N .NPT M A X.

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

ZP

M8 x 1.25 F 04 4 06 6 08 8 M Width across flats H Model A B C 2 D E F G H J Vacuum inlet direction q Pad dia.

Table of Contents

8 2.1 5.5 7.1 7.7 M-01H-4 M-01H-6 15-2-56 4 Miniature Fittings Series M Series M5 Barb Fitting for Nylon Tubing: M-5AN-4/-6 Effective area (mm2) Weight (g) Model A B C 12 14 5 8 1.8 2.5 2.1 4.0 1.6 1.7 M-5AN-4 M-5AN-6 M5 x 0.8 Width across flats 7 Barb Fitting for Soft Tubing: M-5AU-3/-4/-6 K Effective area (mm2) Weight (g) Model C B A M M-5AU-3 11.5 4.5 1.6 1.7 1.5 1.8 2.5 2.1 4.0 1.6 5

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

KJ

8 2.1 5.5 7.1 7.7 M-01H-4 M-01H-6 15-2-56 4 Miniature Fittings Series M Series M5 Barb Fitting for Nylon Tubing: M-5AN-4/-6 Effective area (mm2) Weight (g) Model A B C 12 14 5 8 1.8 2.5 2.1 4.0 1.6 1.7 M-5AN-4 M-5AN-6 M5 x 0.8 Width across flats 7 Barb Fitting for Soft Tubing: M-5AU-3/-4/-6 K Effective area (mm2) Weight (g) Model C B A M M-5AU-3 11.5 4.5 1.6 1.7 1.5 1.8 2.5 2.1 4.0 1.6 5

Table of Contents

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000