3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Descrption Subplate Note VQZ100-S-01T 1 Body VQZ100 1/8" Aluminum die cast Metal seal VQZ200-S-01T Spool/Sleeve VQZ200 1/8" Stainless steel 2 Rubber seal VQZ200-S-02T Spool valve VQZ200 1/4" Aluminum/NBR 3 VQZ300-S-02T Piston VQZ300 1/4" Resin 4 VQZ300-S-03T Pilot valve VQZ300 3/8" 26 Base Mounted Type Series VQZ Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 45% Grommet (G): VQZ115

PSE530/200

rated pressure range, Ambient temperature 25 3C) Linearity 1% F .S. or less Repeatability 1% F .S. or less Power supply voltage effect 1% F .S. or less based on the analog output at 18 V ranging from 12 to 24 VDC Enclosure IP40 Temperature range 0 to 50C; Stored: 10 to 70C (No freezing or condensation) Resistance Withstand voltage 1000 VAC, 50/60Hz for 1 minute between external terminals

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 For XLF/XLG Symbol Changed part*2 Leakage [Pam3/s or less]*1 Internal External Nil None 1.3 x 1010 (FKM) 1.3 x 1010 (FKM) A w, e, r 1.3 x 108 1.3 x 108 B w, e 1.3 x 108 1.3 x 1010 (FKM) C r 1.3 x 1010 (FKM) 1.3 x 108 D w 1.3 x 108 1.3 x

V100

S Z Nil 14 1 2 1 20 2 Indicator light is not available for grommet type.

0.4

EX124D-SMJ1] Note 1) U S U S e w AXT100-1-P Note 2) U S U S SYJ AXT100-1-F Note 2) Note 1) Dust-tight, Water-jet-proof (IP65) Note 2) Top entry connector for FU, PU while side entry connector for FS, PS.

MHZ2/MHZJ2

N1 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1) [EX123D-SUH1] Note 2) EX120-SSL1(-XP) Note 1) [EX123D-SSL1] Note 2) EX120-SSL2(-XP) Note 1) [EX123D-SSL2] Note 2) q EX120-SDN1 [EX124D-SDN1] Note 2) EX120-SCS1(-XP) Note 1) [EX124D-SCS1] Note 2) EX120-SCS2(-XP) Note 1) [EX124D-SCS2] Note 2) EX120-SMJ1(-XP) Note 1) [EX124D-SMJ1] Note 2) EX120-SCM1 EX120-SCM3 AXT100-1-P Note 3) U S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1) [EX123D-SUH1] Note 2) EX120-SSL1(-XP) Note 1) [EX123D-SSL1] Note 2) EX120-SSL2(-XP) Note 1) [EX123D-SSL2] Note 2) q EX120-SDN1 [EX124D-SDN1] Note 2) EX120-SCS1(-XP) Note 1) [EX124D-SCS1] Note 2) EX120-SCS2(-XP) Note 1) [EX124D-SCS2] Note 2) EX120-SMJ1(-XP) Note 1) [EX124D-SMJ1] Note 2) EX120-SCM1 EX120-SCM3 AXT100-1-P Note 3) U S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-

SMC Electronic Switch Series Variations

102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

Table of Contents

(1/8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

VQC

C10 (for 10) Side P: Rc 1/2 C12 (for 12) VQC400-5 T Kit: Terminal block box S Kit: Serial transmission VQC4000 VV5QC41R: Rc 3/4 Rc 1/4 ( ) S Kit 1 to 16 stations VQC401-5 Rc 3/8 Bottom Rc 1/4 Note 1) One-touch fittings in inch sizes are also available.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

1 N1 1 N1 11221122112211222 N2 2 N2 2 N2 2 N2 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D 1 N1 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D Specifications and dimensions other than the above are the same as the basic type (including narrow type).

SY

1) For AC, there is no "S" specification, since it is integrated with the rectifier.

CRB2/CRBU2/CRB1

0.3 0.5 0.1 0.5 1 Rotation time (s/90) Rotation time (s/90) How to calculate the kinetic energy of the load 1.

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Model T1 T2 (1) (1) (1) Max. number 16 14 16 16 14 8 8 16 16 Note 1) Due to the limitation of internal wiring.

5 Port Solenoid Valve, Series VQC

block box N3 (for 5/32") N7 (for 1/4") N9 (for 5/16") C8 (for 8) C10 (for 10) C12 (for 12) N7 (for 1/4") N9 (for 5/16") N11 (for 3/8") Rc 1/4, Rc 1/8 (NPT, NPTF, G) S Kit: Serial transmission ( ) 4150 (9.15) T Kit 1 to 10 stations S Kit (without unit) Solenoid weight is not included.

Cylinder with Lock

Step M z Precautions on Model Selection Caution Find the maximum load speed: V [mm/s] from the load movement time: t [s] and the movement distance: st [mm]. 1.

C76

12.5 145 Rubber cushion: C76RBY Without magnet, Built-in magnet Bore Stroke B S + Stroke ZZ + Stroke (mm) AM 20 24 C 12 14 D 37.5 46.5 EE G 1/8 G 1/4 F 42.4 52.4 FF M6 x 1 depth 11 M8 x 1.25 depth 14 FX 30 36 G1 22 27 H 36 40 K 10 12 KK M10 x 1.5 M12 x 1.75 N1 29 38 N2 17 22 NB 34.5 42.5 NDh8 S 80 105 SW 17 19 WH 16 16 ZZ 116 145 Bore 26 0 0.033 32 40 32 0 0.039 6-10-40 41 Series C76R Air