C85

Same side Different sides Different sides 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-C7 D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7 50 15 10 50 + 45(n 2) D-C80 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF ) 10 + 35 (n = 2, 4...) ( n2 2 15 + 45 (n = 2, 4...) ( n 2 ) 2 10 5 65 15 10 65 + 50(n 2) D-F7V D-J79 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-J79C D-A79W 60 + 55(n 2) 60 15 10 D-F7W D-J79W ) 15 + 35 (n

Series AP500

) Connections 1/2, 3/4 inch face seal, 1/2, 3/4 inch tube weld 3.

CA2

D-K39C 20 + 35(n 2) n = 2, 3, 4 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 Different sides n 100 + 100(n 2) n = 2, 3, 4 Same side 100 + 100 (n2), n = 2, 4, 6, 8 80 90 80 90 80 90 10 20 55 1 Different sides 2 Same side 20 + 35(n 2) n = 2, 3, 4 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 55 + 50(n 2) n = 2, 3, 4 80 + 50(n 2) n = 2, 4, 6, 8 90 + 50(n 2) n =

CM2

(n=2, 4, 6) 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 10 65 20 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 20+50( ) (n=2, 4, 6) 10 75 15 75+55(n2) n2 2 D-B59W 15 75 20 D-A3lA D-G39A D-K39A D-A44A 35+30(n2) 10 100 35 100+100(n2) Mounting Bracket Auto Switch Mounting Band Refer to p.1.4-35 for part numbers of the mounting brackets.

Clean Regulator

air, N2 Clean air, N2, Ar, CO2, Pure water Fluid Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Grade B Air, N2, Ar, CO2, Water Air, N2 Port size Proof pressure 1.5 MPa Grade A Clean air, N2 Clean air, N2, Ar, CO2, Pure water Max. operating pressure 1.0 MPa Fluid Grade B Air, N2 Low pressure type High pressure type Air, N2, Ar, CO2, Water 0.02 to 0.2 MPa Set

Table of Contents

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

Series AK1000

pressure (mm Hg abs) -21 600 Delivery pressure (kPa) -35 500 -48 400 -61 300 -75 200 -88 100 -101 0 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

2

(See Fig. 2.)

Series SV

voltage suppressor (Station 1) (Station n2) n1 = Valve stations n2 = Input block stations L2 = L1 10.5 L3 = 20.5 x n1 + 70.5 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 20.5 x n1 + 56 L7 = 21 x n2 + 83.5 82.7 63.8 60 12 (for DIN rail mounting) (10) 14.7 L1: DIN rail overall length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block stations (n2) 0 1 2 3

SV

x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 A A A A B A B A B A B A L1: DIN Rail Overall Length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block Stations(n2) 0 1 2 3 4 5 6 7 8 198 223 248 260.5 285.5 310.5 323 348 373 223 235.5 260.5 285.5 298 323 348 360.5 385.5 235.5 260.5 273 298 323 335.5 360.5 385.5 398 248

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Made to Order

D-M9BW: 2 pcs.

AZ1000

Connections 1/2 inch face seal 1/2 inch tube weld 0.21 30 3.

SZ3000

13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Digital Flow Switch

) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal

3

unit Detection method Applicable fluid Series 1 2 0.2 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 Air N2 Argon CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 20 2000 PFMC 5 500 Thermal type (MEMS) New New Dry air N2 1 L/min 10 1000 Bypass flow type 20 2000 PF2A

5 Port Solenoid Valve Series SY3000/5000/7000/9000

With External Pilot Specifications One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" (Pitch) P = 24 22.2 24.3 R R 4 A 4 A 4 A 4 A 3/5 3/5 4 A 4 A R R 18.8 18.8 4 A 4 A 4 A 4 A 3/5 3/5 18 4 A 4 A 63.3 39.3 39.3 40.1 79.8 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D. :

0.4

47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 45 L7 = 47 x n2 + 89.8 L1: DIN Rail Full Length Valve stations (n1) I/O unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 1 2 3 4 5 6 7 8 9 210.5 223 235.5 235.5 248 260.5 273 285.5 298 298 310.5 323 335.5 348 360.5 373 373 385.5 398 410.5 423 435.5 435.5 448 260.5 273 273 285.5 298 310.5 323 335.5 335.5 348 360.5

2/3 Port Valve

22 2, 23 2 1 2 3 2 3 4 2 3 4 2 3 4 2 3 4 1 2 3 Option (Bracket) Grommet: G Conduit: C Min. pitch for bracket is H mm.

SMC Pneumatic Clean Series

1.5 M26 x 1.5 M20 x 1.5 M10 x 1.25 M8 x 1.25 26-0.033 0 16 13 13 1/4 1/8 1/8 26-0.033 0 M10 x 1.25 32-0.039 0 8 10 M32 x 2 M14 x 1.5 With air cushion 2-NN WC GB Cushion valve (Width across flats 1.5) Relief port M5 x 0.8 WA GA GC Width across flats B2 2-P (Rc, NPT, G) WB Width across flats B1 H1 H2 I 2-Eh8 D MM AL A K H F 1.5 N1 1.5 N2 F NA ZZ + Stroke S + Stroke (mm) ZZ S P N2 I E D A 22