SZ3000

Stations...3 2 1 Serial unit (D side mounting) SS5Z3-60SRID-05U-C6 . 1 set (manifold part number) SZ3160-5LOZ-C6. 2 sets (single solenoid part number) SZ3260-5LOZ-C6. 3 sets (double solenoid part number) The symbol indicates built-in.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

One-touch fitting Silencer 2.10-3 3 Port Solenoid Valve VQZ100/200/300 Valve Single Unit Body Ported Plug Lead Unit How to Order Valve VQZ100 VQZ 1 1 5 5 M C6 PR Series 1 VQZ100 Body width 10mm Bracket F None With bracket Configuration N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

P 1 3 R 1.5 A Rc 1/8 3(R) port Rc 1/4 1(P) port 2-3 die-cast hole For manifold gasket positioning DIN terminal (Y): VQZ32(R)-Y-C6/C8/C10/02 L plug connector (L): VQZ32(R)-L-C6/C8/C10/02 89 300 (Lead wire length) Indicator light 30.5 <35.5> 92.5 Max. 10 Pg.7 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 M plug connector (M): VQZ32(

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Fieldbus System

Symbol Version Cable length Description No cable 1 m 3 m Nil 1 3 Note 1) Cannot be communicated with the EX600-HT1-l. Refer to page 15 for a table of mountable units. Note 2) Cannot be connected with the EX600-SPR1, EX600-SPR2, EX600-SDN1, or EX600-SDN2.

VFR

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Polarity 1.5 m 3 m 5 m SOL.A SOL.B SOL.A SOL.B (+) () () (+) 1 1 1 station 1 station (+) () () (+) 2 2 SOL.A SOL.B SOL.A SOL.B (+) () () (+) 3 3 For other commercial connectors, use a 26 pins or 20 pins with strain relief conforming to MIL-C-83503.

4/5 Port Air Operated Valve Series SYJA3000

2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at manifold base mounted, 2 position single operating

SYJ300/500/700

Type SS3YJ7-40 1/8 1/8 1/8 1/8 C6 C8 Type SS3YJ7-41 Base mounted for internal pilot Type SS3YJ7-42-01 SYJ74 1/4 1/4 Type SS3YJ7-42-C6 Type SS3YJ7-42-C8 1/4 Body ported for external pilot SYJ72R 1/4 1/8 2.2 0.34 0.55 2.4 0.32 0.62 Type SS3YJ7-21R Type SS3YJ7-41R 2.2 2.0 1.6 2.1 0.35 0.27 0.32 0.24 0.59 0.47 0.39 0.51 2.4 2.2 2.2 2.3 0.36 0.32 0.27 0.31 0.66 0.56 0.54 0.59 1/8 1/8 C6 1/4 1

42

with silencer box: D side exhaust SU Note 2) Direct exhaust with silencer box: U side exhaust W IP65 enclosure 01 1 station Cable (Length) 16 16 stations 0 Cable length 0.6 m 1 Cable length 1.5 m 2 Cable length 3 m Cylinder port C6 6 One-touch fitting C8 8 One-touch fitting C10 10 One-touch fitting C12 12 One-touch fitting 02 1/4 03 3/8 B Bottom ported 1/4 CM Mixed N7 1/4" One-touch fitting

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators 5 1 C6 M 60 10-SZ3 Clean series CE-compliant CE-compliant Nil Q Actuation type 2 position single solenoid A, B port size (A)4 2(B) 1 C4: 4 One-touch fitting C6: 6 One-touch fitting N3: 5/32" One-touch fitting N7: 1/4" One-touch fitting Pilot type 1 (P) (EA)5 3(EB) Nil Internal pilot Manual override 2 position double solenoid R External pilot

VZS

Porting specifications 4(A), 2(B) port Port size Applicable valve model Wiring Base model 1(P), 5(R1) 3 (R2) 4(A) 2(B) Stations Plug-in type VV5ZS2-51F VV5ZS2-51G 2 to 16 stations With D-sub connector With attachment plug lead wire Rc VZS250-FZ 1 8 Rc 1 8 Side Grommet L plug connector M plug connector K plug connector C4 VZS250G L M KZ Non plug-in type VV5ZS2-51 2 to 24 stations C6

SZ3000

When entry of part numbers becomes complicated, indicate on the manifold specification sheet. 1-3-25 26 Series SZ3000 How to Order SZ3 5 1 C6 M 60 Type of actuation A, B port size 2 position single solenoid C4: One-touch fitting for 4 C6: One-touch fitting for 6 (A) 4 (B) 2 1 Pilot type 5 (EA) 1 (P) 3 (EB) A 4 Nil R Internal pilot Manual override 2 position double solenoid External pilot

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(Manifold specification sheet on page 39.) 20 Cassette Type Manifold Series SZ3000 How to Order SZ3 5 1 C6 M 60 Type of actuation A, B port size 2 position single solenoid C4: 4 One-touch fitting (A) 4 (B) 2 C6: 6 One-touch fitting 1 Pilot specifications 5 (EA) 1 (P) 3 (EB) A 4 External pilot Nil R Internal pilot Manual override 2 position double solenoid Nil: Non-locking push type B 2

3 Port Air Operated Valve Series SYJA300

8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5

Rubber seal 5 Port Solenoid Valve Series SYJ5000

8 1/8 1/4 1/8, C6 (One-touch fitting for 6) P, R port M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8

Rubber seal 5 Port Solenoid Valve Series SYJ7000

2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal pilot Type SS5YJ7-42-C6 Type SS5YJ7-42-C8 Note)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible The flow rate value and the device status can be figured out easily via the process data.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L plug connector (L) (Made to order) 100V AC 200V AC 110V AC 220V AC 0.6 0.7 M plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.