Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: N (Without Lead Wire w/Function), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: C6 (6mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side), Operation Manual/Calibration Certificate: Y (None

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: M (SI units only), Bracket: S (Bracket (mounting position: Stream side))

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: 01 (Rc1/8), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: N (Without Lead Wire w/Function), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: C6 (6mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: M (SI units only)

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: N (Without Lead Wire w/Function), Unit Specification: Unit Specification, Bracket: None, Operation Manual/Calibration Certificate: Y (None)

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: C6 (6mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

SYJ300/500/700

(For details, refer to page 4-4-11.) 4-4-6 7 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Construction (A) 2 (A) 2 N.C.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 20 20 20 2-2.6 (For mounting) (2.3) (2.3) 20 (2.3) 23 23 23 23 27 Refer to the page 91 for dimentions with connector cable. 28 Series SYJ5000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ5220-M5 Built-in one-touch fitting: SYJ5220G H C4, N3 C6, N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2 [91.6] 43 3.5 11 5 B

5 Port Air Operated Valve SYA3000/5000/7000 Series

Note 2) ( ): denotes without sub-plate. 1461 SYA3000/5000/7000 Series Dimensions/SYA3000 Series: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Manual override (Non-locking) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting

SYA3000/5000/7000

Note 2) ( ): denotes without sub-plate. 1731 Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting

3 Port Air Operated Valve Series SYJA300

(Value in the initial state) VA Body ported SA Series SYJA500 VA With Bracket VM VR Air operated valve type SYJA5 2-M5-F, SYJA7 2-01-F 1 2 1 2 Note) Bracket is not mounted.

Serial Transmission System Series EX250 Series EX500

Ports 2, 4 size (metric) Ports 2, 4 size (inch) Ports 2, 4 Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 M Ports 2, 4 Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 M Ports 1, 3, 5 Applicable series Ports 1, 3, 5 Applicable series 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting

7ND9071en

Screw 306 1 Bed of Local User Interface (LUI) 307 3 Screw 308 2 Screw 311 1 Shaft 312 2 Screw 313 2 Cam disc 314 2 Screw 315 6 Terminal block 322 1 Proximity switch (D__) 323 2 Screw 346 1 or 2 Bushing (I__) 347 2 Inductive proximity sensor (I__) 348 1 Fastening plate 349 2 Screw 350 1 Washer 351 1 Screw 355 2 Microswitch (K0_, B06) 357 2 Spring washer (K0_, B06) 358 2 Screw (K0_, B06) 44

Intrinsically Safe Valve

length) 120.8 Max. 10 5 Body Ported Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position double, 4-position dual 3 port L-type plug connector (L) 22.6 2 A B C 16.7 53-SY5 20-L-01 (-F2) 2 x M3 x 0.5 thread depth 3.5 (For mounting bracket) 65.4 Insulator: Black () 11.6 A B Insulator: Red (+) 2 x 3.2 (Manifold mounting hole) 16.2 Manual override 36 2 x 1/8" {A(4), B(2) port} 37 (2 x