Vacuum System Peripherals:

Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage (2 W DC) type and long period energized type available.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

) [ ] for AC SS3YJ3-S42RStation -M5, C4 L plug connector (L) M plug connector (M) 2-M5 X 0.8 (External pilot port) 8 8 53.4(GZ, GS: 54.1) [55.1] 36.1 (Lead wire length) 5 5 20.5 X X X X X X 32.5 X 59.6 [66.1] 300 36 300 (Lead wire length) 12 12 2-4.5 (Mounting holes) 53.2 [54.5] 49.2 L2 L1 4 62.8 17.5 11.5 P R 17.5 11.5 P R 48.5 [55] 8.5 8.5 36.1 22.5 48.5 [55] A A 20 5 n-M5 X 0.8, n-C4

Table of Contents

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(For details, refer to page 610.) 605 3 Port Pilot Solenoid Valve 10-SYJ300 Construction 2(A) 2(A) Directional Control Valves Air Grippers Modular F. R. Fittings & Tubing Air Cylinders Rotary Actuators N.C. N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

VQC

1 2 3 4 5 6 7 Stations D-side 8 U-side C10 3(R) port 2-G3/4 Conduit port 2-C12 3(R) port DIN rail clamp screw 77.5 49.5 30 25 10 12 13.5 25 C10 1(P) port (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting Formulas: L1 = 16n + 57, L2 = 16n + 163 n: Stations (maximum 20 stations) n L L1 L2 L3 L4 1 73 179 200 210.5 2 89 195 212.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

C6: One-touch fitting for 6 VVQZ200-10A-2 VV3QZ22-05C 2.10-13 VQZ100/200/300 Body Ported Dimensions: VQZ100 VV3QZ12C Station (5.5) (35) Grommet (G) (11) 27 2-4.5 Mounting holes n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 1 2 P N SZ3000-42-2A-DSZ3000-42-1A-D For D-sub connector D side 1 2 1 2 P N SZ3000-42-4A-DSZ3000-42-3A-D For flat ribbon cable 26 pins D side Note) The assembly part numbers with power supply terminals are 24 VDC specifications

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 D side SZ3000-40-2A-D For D-sub connector 1 2 P N SZ3000-40-1A-D 1 2 1 2 P N D side SZ3000-40-4A-D For flat cable 26 pins SZ3000-40-3A-D Note) The assembly part numbers with power supply terminals are 24VDC specifications

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 4 3 8 VSA430 Individual EXH 1 2 VSA430 3 4 3 4 Common EXH , 1 2 3 4 How to Order 1 2 standard , 1 2 3 4 , 3 8 1 2 3 8 VSA440 3 4 Individual EXH 1 2 SA VV 4 2 0 N 1 05 Piping specifications/Side ported, bottom ported Manifold Air operated valve Series VSA 4 port valve Thread type Body size Nil Rc EXH port Symbol Size N Piping NPT NPTF PF Individual 1 Symbol Common Type 2 3 1 4 3 8 1 2

VZS

VVZS3000-4-1 VVZS3000-4-2 18 x 15 x 1.5 7.5 x 4.5 x 1.5 VVZS3000-5-n (1) q Description Material Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS3000-5-1-1 (2) Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. Assembly part no.

3 Port Solenoid Valve Series SYJ300/500/700

C4 N3 Type S42R Manifold: Side Ported (Pilot valve is on the A port side) / SS3YJ3-S42RStations -M5, Grommet (G) For M5 For (Built-in one-touch fitting) C4 N3 M5 x 0.8 (X port) 8 8 1/8 (P, R port) 5 5 20.5 12 52.9 [55.1] Approx. 300 (Lead wire length) 30.7 X X 36 17.5 35.9 R P 2-4.5 (For mounting) 11.4 Manual override 18.5 (Pitch) P=10.5 (4.4) L1 L2 4 8.5 (Station n) (Station 1) (Station

VCC

How to Order Manifold VV CC1 M 06 10 C4 G04 q w e r t This How to Order is that of the example below. w 2 port valve mountable number Note 1) r Pilot port fitting size q Type (Passage number) 2 3 M 4 One-touch fitting 6 One-touch fitting C4 C6 2 port valve 3 port valve 2/3 port valves mixed mounting 00 02 04 Without 2 port valve 2 pcs. (colors) 4 pcs. (colors) 40 40 pcs.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

(20P) (Conforming to MIL-C-83503) Release for switching connector direction D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L n Formula: L1